Rated Vacuum Range: F (-100.0 to 100.0 kPa), Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: N01 (NPT1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover), Bracket: A1 [Bracket A (ZS-46-A1)], Operation Manual: K (Operation Manual, Calibration Certificate)

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: M (SI Unit Only, Fixed Unit: kPa, MPa), Piping Specification: 01 (R1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover), Bracket: A1 [Bracket A, Vertical Mounting (ZS-46-A1)], Operation Manual: K (Operation Manual, Calibration Certificate)

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: P [Units Selection Function (Initial Value psi)], Under New Measurement Act Selection Function not Permitted for use in Japan, Piping Specification: N01 (NPT1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover), Bracket: A1 [Bracket A, Vertical Mounting (ZS-46-A1)], Operation Manual

Rated Vacuum Range: F (-100.0 to 100.0 kPa), Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: M5 (Female Thread), Lead Wire: W (Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover), Bracket: A1 [Bracket A (ZS-46-A1)], Operation Manual: Y (w/o Operation Manual, w/o Calibration Certificate)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: P [Units Selection Function (Initial Value psi)], Under New Measurement Act Selection Function not Permitted for use in Japan, Piping Specification: 01 (R1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover), Bracket: A1 [Bracket A (ZS-46-A1)], Operation

ZS-46-A1)]

NCA1

Although a zener diode for surge protection is connected at the output side of a solid state auto switch, damage may still occur if the surge is applied repeatedly. When a load, such as a relay or solenoid which generates surge is directly driven, use a type of switch with a built-in surge absorbing element. 8.

Air Cylinder

B A B A B A B A B A B A B 20 33 24 (32) 29 20 (28) 28.5 19.5 (27.5) 29.5 20.5 (28.5) 25 16 (24) 23.5 14.5 (22.5) 26.5 17.5 (25.5) 25 32.5 24.5 (32.5) 28.5 20.5 (28.5) 28 20 (28) 29 21 (29) 24.5 16.5 (24.5) 23 15 (23) 26 18 (26) 32 34 25 (33) 30 21 (29) 29.5 20.5 (28.5) 30.5 21.5 (29.5) 26 17 (25) 24.5 15.5 (23.5) 27.5 18.5 (26.5) 40 39 27 (36) 35 23 (32) 34.5 22.5 (31.5) 35.5 23.5 (32.5)

Air Cylinder

(mm) Auto switch model Bore size (mm) 20 25 32 40 D-M9l(V) D-M9lW(V) D-A9l(V) Auto switch model Bore size 20 25 32 40 D-A9l(V) 6 6 6 6 BM5-020 (A set of a, b, c, d) BM5-025 (A set of a, b, c, d) BM5-032 (A set of a, b, c, d) BM5-040 (A set of a, b, c, d) D-M9l(V) D-M9lW(V) D-M9lA(V) 3 3 4 3.5 D-M9lA(V) Note 2) BM5-020S (A set of b, c, d, e) BM5-025S (A set of b, c, d, e) BM5-032S (A set of

MQQ

, 28 Bore size (mm) FZ L M 55 18 10 60 20 16 FV 64 20 20 65 22 34 25 72 22 FT 40 28 FX B + Stroke L FZ A + Stroke 4-FD Rear flange type/MQQLG 10, 16, 20 (mm) 25, 28 Bore size (mm) Stroke range (mm) A L 4-FD 2-FD 75 8 10 10 to 40 88.5 10 16 10 to 60 97 10 20 10 to 60 FV FV M 104.5 12 25 10 to 50, 75, 100 124 12 28 10 to 50, 75, 100 B + Stroke L FT FX FZ FX (Dimensions other than A and L

Electric Actuators

A A A A A Speed Home position A B C Speed no. Time Two pattern combination example (A five point movement of absolute move A and incremental move B) Acceleration no.

MQQ

8 48 56 L B + Stroke RZQ FZ 28 10 to 50, 75, 100 104 126 5.5 8 54 62 A + Stroke 2-FD MI W S Bore size (mm) FZ L M 25, 28 CEP1 10 55 18 16 60 20 FV CE1 20 64 20 25 65 22 34 CE2 28 72 22 40 FT FX L B + Stroke FZ ML2B A + Stroke 4-FD C J G5-S Rear flange style: MQQLG 10, 16, 20 25, 28 Bore size (mm) Stroke range (mm) A L 2-FD 4-FD CV 10 10 to 40 75 8 16 10 to 60 88.5 10 MVGQ 20 10 to 60

MQQ

A 20 10 to 60 79 99 6.6 8 42 52 FT FX 25 10 to 50, 75, 100 84.5 106.5 5.5 8 48 56 L B + Stroke RZQ FZ 28 10 to 50, 75, 100 104 126 5.5 8 54 62 A + Stroke 2-FD MI W S Bore size (mm) FZ L M 25, 28 CEP1 10 55 18 16 60 20 FV CE1 20 64 20 25 65 22 34 CE2 28 72 22 40 FT FX L B + Stroke FZ ML2B A + Stroke 4-FD C J G5-S Rear flange style: MQQLG 10, 16, 20 25, 28 Bore size (mm) Stroke range (mm

C85

Hs C76 D-F7 D-F7W D-J79 D-J79W D-F7BAL D-F79F C85 Auto Switch Mounting Position (mm) C95 23 A B 1 Bore Single acting/Spring extended Auto switch model Hs 11 B A CP95 1 to 50 st 27.5 25.5 27.5 32.5 26.5 31 31 28 26 28 33 27 31.5 31.5 28.5 26.5 28.5 33.5 27.5 32 32 27.5 25.5 27.5 32.5 26.5 31 31 3.5 24.5 29 29 51 to 100 st 27.5 25.5 27.5 58.5 52.5 56 56 28 26 28 59 53 56.5 56.5 28.5 26.5 28.5

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

19.5 (27.5) 19.5 (27.5) 20.5 (28.5) 22.5 (31.5) 27.5 (39.5) 27.5 (39.5) B B A B A A B B A 16 (24) 16 (24) 17 (25) 19 (28) 24 (36) 24 (36) 32 (46) 32 (46) 17.5 (25.5) 17.5 (25.5) 18.5 (26.5) 20.5 (29.5) 25.5 (37.5) 25.5 (37.5) 33.5 (47.5) 33.5 (47.5) 15.5 (22.5) 15.5 (22.5) 15.5 (23.5) 19 (26.5) 22.5 (34.5) 22.5 (34.5) 30.5 (44.5) 30.5 (44.5) 20.5 (28.5) 20.5 (28.5) 21.5 (29.5) 23.5 (32.5)

Table of Contents

1Bore size , VV5FR5-01FUStation 1Bore size Light/Surge voltage suppressor 235.5 204 (72) 60 11 4 60 U side Manual override (Non-locking) 6 [2] 21 R5.5 B B B B A A A A n B B B A A A B B B B A A A A 3 L1 L2 2 11 11 71.5 (Pitch) P = 51 Pitch P = 51 71.5 1 Stations 2n-Rc 1/2, 3/4 (A, B port) 20 24 [23] 105.5 176.5 209 Plug assembly: VVZS3000-21A(Option: Refer to page 3-5-8.) 2n-Rc 1/2 58 28 70

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

Hs Auto switch 12 15 22.5 A B 33 101 Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA Proper auto switch mounting positions (mm) Auto switch type D-A5, D-A6 D-A3, D-A44 D-G39, D-K39 D-F5, D-J5 D-F5W, D-J5W D-F5BAL D-A59W D-F5NTL D-F5F D-B5, D-B64 D-B59W Bore size (mm) A B A A A A A B A B B B B B 40 10.5 11.5 14.5 14 21 17 22 23 11 12 15 15.5 22 18 50 11 13

CL

a guide, use a solenoid valve with a large effective area for the unlocking solenoid.

KJ

P. 22 KQ2W P. 16 KQ2K Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bulkhead union Bulkhead connector P. 28 KQ2E P. 28 KQ2E Use to connect male thead and tube through a panel. Use to connect tubes through a panel.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

, 2(B) port] Applicable tubing O.D.: 8, 5/16" 10, 3/8" Manual override 8 DIN rail holding screw DIN rail 1/4 [4 (A), 2 (B) port] 38.5 (DIN: 39.8) 38.5 (DIN: 39.8) 60.7 [62.9] 51.5 (DIN: 52.8) 134.4 [138.8] 121.4 [125.8] (5.4) 38.1 39.4 28 28 35 20 5.5 A 4 B 2 A 4 B 2 A 4 B 2 A 4 B 2 A 4 B 2 A 4 B 2 19 1P 1P 8 (Pitch) P = 19 22 32.5 42.5 [49.5] 51 (1/4 port) 5 (L4) L3 L2 (Rail mounting hole