Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11- tolerance Port size Vacuum port, relief port Ambient and fluid temperature JIS class 2 +1.0 0 mm 0.035MPa 0.025MPa M5 x 0.8 M5 x 0.8 Without auto switch: 10 to 70C With auto switch: 10 to 60C Piston speed Piston rod diameter 1 to 200mm/s 0.5 to 200mm/s Bore size (mm) 11(Vacuum type) 16 M8 x 1.25 M14 x 1.5 JIS class 2 Standard stroke: mm M5 x 0.8 12 16 20 25 Female threads Male threads Fluid
However, use of a regenerative absorption unit is recommended under all conditions. m : Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) Pitching Yawing 10.2 10.2 Allowable dynamic moment Actuator rating LJ1H10 Model Mounting orientation Work load Maximum speed Maximum stroke 5kg 600mm/s 500mm Load movement direction
F R L T B 1 R Axial entry Right entry 200/230VAC (50/60Hz) 2 Y 0 Without motor Bottom entry Specifications Intermediate strokes 100 5.1 200 5.9 300 6.7 400 7.4 500 8.2 5 to 40 (with no condensation) 10 225 400 mm kg C kg N mm/s mm Standard stroke Strokes other than the standard strokes on the left are available by special order. Consult P/A.
Vertical Horizontal l: Load eccentricity m Mounting position m L L to 100 to 300 Maximum speed mm/s to 500 to 100 to 300 to 500 Load eccentricity lmm 100 50 200 100 50 200 100 50 200 1 2 3 4 5 6 7 8 9 10 11 12 Selection graph L: Overhang (the distance from the cylinder shaft center to the load center of gravity) The direction of L can also be a diagonal direction .
Shock absorber Port variations R L R L Tighten the four unit fixing bolts equally to secure the unit body. R R R R L L L L R L R L L R Slide table operating direction 8-14-26
min (ANR)) Inlet air flow rate (l/min (ANR)) 14-19-38 35 Series IDG Membrane Air Dryer Unit Type Dimensions (Type M) IDG3M/5M IDG3HM/5HM Dew point indicator (Option: S) Port size: 1/8, 1/4 50 173 30 45 50 11 Drain Discharge With float type auto-drain (N.C.)
L R S Piping port position Nil Operating direction Left Right L R S a b h g d c f e Note) Plugs are installed in ports other than those indicated for the model.
A + Stroke 20Data Common Dimensions: MVGPM/MVGPL B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking IC Standard stroke (mm) Bore size (mm) ID IE IF IG IH J K L 20 25 32 9.5 10 9 79.5 10 10 12 32.5 8.5 9 9 26.5 36 40 49 M5 x 0.8 6.5 7 8 21.2 18 21 24 10 12 16 36 42 48 10.5 37 83 93 112 6 7.5 9 24 30 34 M5 M5 M6 32 18 21 24 3 20, 30, 40, 50, 75, 100, 125 150, 175, 200,
A + Stroke 20Data Common Dimensions: MVGPM/MVGPL B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking IC Standard stroke (mm) Bore size (mm) ID IE IF IG IH J K L 20 25 32 9.5 10 9 79.5 10 10 12 32.5 8.5 9 9 26.5 36 40 49 M5 x 0.8 6.5 7 8 21.2 18 21 24 10 12 16 36 42 48 10.5 37 83 93 112 6 7.5 9 24 30 34 M5 M5 M6 32 18 21 24 3 20, 30, 40, 50, 75, 100, 125 150, 175, 200,
stroke 25, 50, 75, 100, 125, 150 94 69 15 6 25 42.5 M5 x 0.8 16 5.2 25 15.5 25, 50, 75, 100, 125, 150, 175, 200 106 78 15.5 10 36 53.5 M8 x 1.25 10 8 28 25.5 Q R T V Y N O P Bore size (mm) 12 20 M4 x 0.7 M5 x 0.8 47 7 53.5 22 7 5.5 M6 x 1 M5 x 0.8 50 15 62.5 36 5 For rod nut and accessory bracket, refer to page 10-12-20.
I Rotary Gripper Series MRHQ How to Order Length of lead wire 0.5m 3m 5m Nil L Z S F9N L Q D MRH 10 90 F9NV L Number of auto switches Rotary gripper 2 pcs. 1 pc. Nil S Gripper Type of auto switch for detecting rotation Nil Without auto switch Parallel type: 2 fingers Q Applicable auto switches Gripper bore Lead wire length (m) Load voltage Auto switch part No.
Supply pressure: 0.1 MPa (7 L/min (ANR) per nozzle) Installation height of sensor: 10 mm 3 Electrostatic potential [kV] 20 With sensor Ionizer 2 Without sensor Without sensor Discharge time [s] 15 1 With sensor L 0 10 1 Workpiece Without sensor 5 2 With sensor 3 0 500 1000 1500 2000 Installation distance L [mm] 1 2 3 4 Time [s] Run mode after static neutralization (electrostatic potential
L R S Piping port position Nil Operating direction Left Right L R S a b h g d c f e Note) Plugs are installed in ports other than those indicated for the model.
L R S Piping port position Nil Operating direction Left Right L R S a b h g d c f e Note) Plugs are installed in ports other than those indicated for the model.
kitD-sub connector T kitTerminal block box T1 kitIndividual terminal block kit L kitLead wire S kitSerial transmission 4.1 Rc 3/4 Option Direct exhaust with silencer box Rc 3/8 Rc 1/2 Side T kit 11 stations VV5Q51VQ5L00 VQ5L01 L kit Not including solenoid valve weight.
(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) * Standard lead wire length is 0.5 m.
Bore Sizes: 056 (9/r6"1, O75 1314"1,106 (1-rlf6"t, r50 (1-112"1,2OO (2'1, EO lt1lz"l a o a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a NGOS Design Features square body allows for close center-to-cener mounting VoJnli_g o_ ALlo S\rilcl_es / S rper Co, rpac I Ver s on i:ti t b Avarlab e (l,,lagnet Type) Grecn L ne is NCOT Very Compacl B ack Lrne s
(mm) 26 20 16.5 14 C 16 12 10 8 D 25 18 14 12 E 2 2 2 2 F 13<10> 20<18> 20 20 GA 50 40 40 35 H 8 6 6 5 H1 19 17 17 13 B1 47 38 31 26 I 187 175 173 163 ZZ M6 x 1 depth 12 M5 x 0.8 depth 8 M5 x 0.8 depth 7.5 M4 x 0.7 depth 7 J 27 19.5 19.5 15.5 AL Bore size A M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 MM 44 35.5 29 24 NA 1/8 1/8 1/8<M5 x 0.8> 1/8<M5 x 0.8> P 9 7 7 7 RA 87 95 93 93 S 6 5.5 5.5
x 0.8 Relief port X GA RA 2 x Rc P H1 Width across flats KA 2 x LD GB MM R0.4 D I 0 E0.05 LH L Width across flats B1 ZZ + Stroke S + Stroke H A AL N Y L LX K F Female thread type X effective depth A1 MM ZZ + Stroke H (mm) LD I H1 H K F E A AL L B1 D Stroke range MM LH LX GA GB KA RA S Y 40 30 27 25 6 19 16 47 8 39 Up to 300 52.4 2 32 22 19.5 18 5.5 17 12 32 6 38 Up to 200 42.4 2 25 22 19.5