Unit Size: 75mm, Cup Flange Shape: 42mm x 42mm, Manufacturer: 01 [UR: 3(e), 5(e), 10(e), 16(e)], Cup Series: Basic, Cup Diameter: ø20, Cup Form: Flat with Rib, Cup Material: NBR, Attachment: with (Guide) Attachment

Unit Size: 75mm, Cup Flange Shape: 42mm x 42mm, Manufacturer: 01 [UR: 3(e), 5(e), 10(e), 16(e)], Cup Series: Basic, Cup Diameter: ø25, Cup Form: Flat with Rib, Cup Material: Urethane Rubber, Attachment: with (Guide) Attachment

Unit Size: 75mm, Cup Flange Shape: 42mm x 42mm, Manufacturer: 01 [UR: 3(e), 5(e), 10(e), 16(e)], Cup Series: Basic, Cup Diameter: ø10, Cup Form: Flat with Rib, Cup Material: NBR, Attachment: with (Guide) Attachment

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

n x Mounting hole Pitch = 100 Mounting hole quantity n Quantity Stroke 100 2 4 200 3 6 300 4 8 A = (n 1) x pitch 400 5 10 30 500 6 12 600 7 14 LTF8 M6 bolt 3.5 2 x n x Mounting hole 6.6 or M6 Pitch = 100 Mounting hole quantity n n Quantity Quantity Stroke Stroke 100 2 4 600 7 14 200 3 6 700 8 16 A = (n 1) x pitch 36 300 4 8 800 9 18 400 5 10 900 10 20 500 6 12 1000 11 22 93 Series LTF Deflection

10

Cushion valve G 2 x Rc P W V Port G E Width across flats KA TX D E B C H1 AL MM MB MA N 2 x 4 x J N TY B C Width across flats B1 A H K F TT ZZ + Stroke S + Stroke With rod boot d e 10.2 10.2 f h l [mm] Bore size [mm] A AL B B1 C D E F G H H1 J K KA MA MB MM N P S TT TX TY V W ZZ 32 22 19.5 46 17 32.5 12 30 13 13 47 6 M6 x 1 6 10 16 4 M10 x 1.25 27 1/8 84 17 48 49 4 6.5 135 40 30 27 52 22

Series PF2W Digital Flow Switch For Water

Real-time switch output Hysteresis mode Unit switching ON YES OFF P-1 P-2 For Air Instantaneous flow rate Display Instantaneous flow rate Accumulated flow "P" Window comparator mode H : Hysteresis L/min L CFM x 10-2, CFM x 10-1 ft3 x 10-1 H H ON CFM = ft3/min NO OFF P-1 P-2 High Flow Rate Type (For Air) Instantaneous flow rate OUT1 Output mode Display Instantaneous flow rate Accumulated

Low Profile Guide Type

mcos + msin P m P 0.1 x m + m P D 1.6 x D 5.0 x D 5.0 x m m mv P Pv m > mv P > Pv Determination of allowable load mass & pressure Inclined operation (Refer to page 1548

Dedicated Controller

Dedicated Controller/LC1 P.73 Controller setup software P.80 Dedicated teaching box P.82 Options P.85 Dedicated Regenerative Absorption Unit/LC7R P.86 Non-standard Motor Compatible Drivers P.89 73 2 Series LC1 Controller Single Axis Type Built-in AC Servo Driver Series LTF: Standard Motor Compatible How to Order 2V LC1 F 1 H 1 L 3 Number of axes Mounting bracket 1 3 5 1 axis M3

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

mcos + msin P m P 0.1 x m + m P D 1.6 x D 5.0 x D 5.0 x m m mv P Pv m > mv P > Pv Determination of allowable load mass & pressure Inclined operation (Refer to page 8-16-8

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

mcos + msin P m P 0.1 x m + m P D 1.6 x D 5.0 x D 5.0 x m m mv P Pv m > mv P > Pv Determination of allowable load mass & pressure Inclined operation (Refer to page 8-16-8

48

Direct teaching P P P Position Set in units of 0.01 mm [Pushing]: Pushing start position JOG teaching P P P P P P P P P P P P P P Set in units of 1 mm/s2 Acceleration/deceleration during movement Select from 16-level Acceleration/Deceleration Step data setting (Excerpt) Set in units of 1% Rate of force during pushing operation Select from 3-level (weak, medium, strong) Pushing force Set

NAAMS Standards Compliant

2 x P H7 depth D 2 x 2 x MM depth J 2 x 2 x NPT 1/4 G Rc Hexagon socket head plug RD B [mm] Bore size B C D E GA GB J L LA LB MM N P Rubber cover Metal cover 50 92 48 12 13.7 95 166 12 376.6 155.5 78.4 78.4 M8 x 1.25 19 8 63 110 54 15 16.6 99 171.5 12 391.6 161 78 78.4 M10 x 1.5 22 10 Bore size PA PB PC PD R RA RB RC RD RR W XB XC Y Without switch cover With switch cover 50 45 45 5 40 46

Rotary Gripper Series MRHQ

x 0.8 Port A M5 x 0.8 Port B 4-M6 x 1 Depth 10 I N J E A D P A A M N 16.5 27 6.5 8 17.5 26 SMC R R 16 8 E O P T P A I R R Y G A R I 36 Side A Side B Scale: 40% 11 Series MRHQ Rotary Gripper 1in = 25.4mm Dimensions (mm) Scale: 50% MRHQ25 A B 58 70 93 4-M5 x 0.8 Depth 8.5 47 66h9 0 0.074 33.3 opened +2.5 0.2 10 0 0.1 12 0 0.06 M5 x 0.8 Finger closing port 19.3 closed 0 0.8 4-M5 x 0.8 (mounting

Electric Slide Tables

150 st) 22 60 6 5H9 (+0.030 0 ) depth 5 5H9 (+0.030 0 ) depth 5 G x M8 x 1.25 x 16 G x 6.6 A 38 2 x M8 x 1.25 x 16 Top mounting not available 39.8 6 A G x 11 J F 12 (G/21) x J Connector With lock Step Motor Lock cable (3.5) Motor cable (2 x 5) Motor cable 20 20 20 Lock cable (1.5) 65 Cable length 180 117 15 Note 1) Range within which the table can move when it returns to origin.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

This could cause an auto switch malfunction. 19.2 20 3.5 0.3 3 4 x M2.5 x 0.45 thread depth 2.5 6.5 12.5 K M 21 3 x M3 x 0.5 thread depth 5 2 N 1 x F 3 depth 2.5 +0.03 0 9 27 F 4 4 x M2.5 x 0.45 thread depth 3.5 6 (Extension end adjuster) 1.5 13.5 3.5 5.5 12 15 10 14 27 20 31 0.5 Retraction end adjuster 4 Extension end adjuster 5.5 3 N x M3 x 0.5 thread depth 4 Note 1) Note 2) 3 depth 2.5

SJ3A6

fitting [1(P) release pressure port] Applicable tubing O.D: 8, 5/16" One-touch fitting (X: External pilot port) Applicable tubing O.D: 4, 5/32" 20.5 6.2 One-touch fitting [PE: Pilot EXH port] Applicable tubing O.D: 4, 5/32" 46.5 (with plug) F1 release pressure side Filter body assembly Connector entry upward M5 x 0.8 (with plug) 43.5 [PS pressure detection port] F2 vacuum pressure side Filter

Pneumatic Transfer System Series MF

Plate mounting support bracket Body mounting side support Auto switches mountable (both sides) Types of Units and Parts Type of units and parts Type of units Type of parts Single units P.1 to P.9 Combination units P.11 to P.18 Set parts P.11 to P.14 Parts P.16 Spare parts P.4 & 5 Optional parts P.2 Catalog pages Parts for combination units.

Rotary Table/Rack & Pinion Style Series MSQ

1.25 M10 x 1.5 M10 x 1.5 M12 x 1.75 WE M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 WD 3.5 4.5 4.5 5.5 WC 3H9 4H9 4H9 5H9 WB 15 20.5 23 26.5 WA 59 65 68 77 UU 17.7 25 25 31.4 SU 45 60 65 75 SF 13 12 14 15 SE 9 10 11.5 14.5 SD 92 117 127 152 Q S 34 37 40 46 JJ M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 YA YB YC JU M8 x 1 M10 x 1 M10 x 1 M14 x 1.5 P M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 WF 8 10 10 12 Size XA XB XC 3.5

Air/Manually Operated High Purity Chemical Valve Series LV

Concentration 50% or less Nitrogen gas X X X Ultrapure water X X Note 1) Note 1) Note 2) Toluene X X X X Note 2) Hydrofluoric acid X X X Note 2) Sulfuric acid (except fuming sulfuric acid) X X X X Phosphoric acid Concentration 80% or less The material and fluid compatibility check list provides reference values as a guide only.

Escapements Series MIW/MIS

mounting thread 2 x LA Mounting hole EA C D 2 x P Attachment mounting thread 2 x FD through Supply port Groove position for auto switch mounting (2 pcs.)