CLQ

A A1 E1 L1 MM RR1 U1 ND NX NZ L 34 41 42 56 71 79 8.5 16 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 34 41 42 56 71 79 8.5 10.5 14 18 21 21 16 20 22 28 38 44 25 30 30 40 50 55 M8 x 1.25 10.3 12.8 12 16 21 24 11.5 14 14 20 27 31 8 10 10 14 18 22 8 10 18 22 28 32 8 10 10 14 18 22 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10

AHC System Series MA

Tool adapter <10/15> MA 210 A M3 A210 10 MHR2 Cylinder bore For MA2 With adapter Air connection size 10 mm 15 mm 10 15 Auto hand changer M3 M3 x 0.5 <10/16> MHZ Tool adapter A210 D 16 MHZ2 Y69A N Transportable mass MHF Transportable mass 3 kg 2 Cylinder bore MHL For MA2 With adapter 10 mm 16 mm 10 16 MHR Finger position MHK Standard Narrow type Nil N MHS Auto switch type Nil Without auto

HRX-OM-W058

Transport and Setting Up . 3-1 3.1 Transport. 3-1 3.1.1 Transportation using casters . 3-2 3.2 Installation . 3-3 3.2.1 Environment . 3-4 3.2.2 Location (Required ventilation rate) . 3-6 3.2.3 Installation and Maintenance Space . 3-7 3.3 Installation . 3-8 3.3.1 Mounting . 3-8 3.3.2 Electrical wiring . 3-9 3.3.3 Preparation and wiring of power supply cable . 3-10 3.3.4 Wiring of remote operation

EXxx-OMQ0015CN

10.5 5.25 21 1934 5 20 1950 10 5 20 1024 3 12 1024 5.25 2.625 10.5 114 1 4 0 0 0 0 0 0.75 3 : 010 V 10 VPLC 1950 -49No.EX-OMQ0015CN (3) AD -3276732767 = : 15 V (1)15 V (2)5000 1000 1000 1 V 2000 2 V 3000 3 V 4000 4 V 5000 5 V (3)(5 V-1 V)(5000-1000)1/1000 15 V 1/1000 3000 AD 1000 5000 PLC (AD ) (ab) [V] [mA] 10 010 15 05 020 420 -32766 32767 10 5 5 20 20 -32767 32766 0

EX510

for EX510-DX1) Mounting example 1 Mounting example 2 60 35.1 2 x M4 2 x M4 30.8 1707 Series EX510 Parts Description EX510-DX2 EX510-DX1 w r w u r i 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 CN0 CN1 CN2 CN3 CN4 CN5 CN6 CN7 i 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 CN0 CN2 CN4 CN6 CN8 CN10 CN12 CN14 0 1 2 3 0 1 2 3 CN1 CN3 CN5 CN7 CN9 CN11 CN13 CN15 1 q 4 5 6 7 4 5 6 7 3 q 5 8 9 10 11 8 9 10 11

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Flow Rate and Sonic Conductance Universal type Symbol AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 3.2 6 8 10 12 3.2 6 4 6 8 10 4 4 8 10 12 Metric size 6 10 Tubing Flow Direction Symbols on Body 1/8" 3/16" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 1/4" 1/8" O.D. 5/32" 5/16" 5/32" 1/4" Meter-out type Meter-in type Inch size 3/16" 5/16" 3/8"

VDW Series

Clip part numbers (2 port) N.C. (2) N.O. (3) VDW 2 0 10 2 (1) IN 3 port valve Maximum operating pressure differential MPa (psi) Series Orifice size mm Model 2 3 10, 20 30 Pressure ports 2, 3 Note 1 & 2) Pressure port 1 0.3 (43.5) 1 0.9 (130.5) VDW200 0.1 (14.5) 1.6 0.7 (101.5) 0.2 (29) 2 0.8 (116) VDW300 0.1 (14.5) 3 0.4 (58) Piping to 3 Port Valve N.O.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

Fittings & Tubing Air Cylinders Rotary Actuators B LH 15 LT W 2 x LC (Knock pin position) Y X M W X Y 4 x LD LX Z LS + Stroke LZ ZZ + Stroke (mm) 7 7 6 6 LD 3 3 3 3 LT 4 4 4 4 LC 51 (60) 53 (61) 53 (61) 53 (61) LS Z 30 25 22 20 LH 135 (144) 125.5 (133.5) 123.5 (131.5) 118 (126) ZZ B 54 44 36 32 LX 4 3.5 3.5 3 M 16.5 16 15 15 X 8.5 8 7 7 Y 71 58 49 44 LZ 10 10 10 10 W Bore size 54.5 45 38.5

SMC Wireless System EtherNet/IP ® compatible

ms or less (the input connected to the base) AD refresh time 0.1/0.2/0.5/1/2/5/10/30/60 s (the input connected to the remote) 3 Analogue input/output 10 ms or less (the output connected to the base) Input/Output specifications DA refresh time 0.1/0.2/0.5/1/2/5/10/30/60 s (the output connected to the remote) 3 Output type Source/PNP (-COM) Sink/NPN (+COM) Number of outputs Max. 32 points

LEF-OM006xx

INC 100 -10.00 3000 3000 0 0 0 100 10.00 20.00 0.50 30[mm] No.1 No.1INC 10INC) C :10(INC) 50[mm] 0 10 20 30 40 50 [mm] [mm] -10INC) C :-10(INC) 10[mm] 0 10 20 30 40 50 [mm] [mm] -24- ) 1. 2. 3.No.1 4.No.2 5. 1 SVON(ON SVRE(READY 2 SETUP SETON INP(IN ) OUT0 OUT1 OUT2 3)4) OUT3 OUT4 OUT5 INP BUSY IN0 IN1 IN2 IN3 IN4 IN5 DRIVE 3)5) No.1 3 OUT0 OUT1 OUT2 3)

DOC1001322

Transport. 3-1 3.1.1 transportation using forklift and hanging . 3-2 3.1.2 Transportation using casters . 3-3 3.2 Installation . 3-4 3.2.1 Environment . 3-4 3.2.2 Operation at low ambient temperature or low circulating fluid temperature . 3-5 3.2.3 Location . 3-6 3.2.4 Installation and maintenance space . 3-7 3.3 Installation . 3-8 3.3.1 Installation . 3-8 3.3.2 Electrical wiring .3-10 3.3.3

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Refer to page 8-16-9 and 8-16-10 for detailed selection procedures. 8-16-6 6 Model Selection Series CY1F (2) CY1F/M2 (1) CY1F/M1 (3) CY1F/M3 30 30 30 MX CY1F25 20 20 20 MTS CY1F25 CY1F25 MY 10 10 10 CY MG 5 5 5 Moment Nm Moment Nm Moment Nm 4 4 4 CX CY1F15 3 3 3 DCY1F10 2 2 2 -X CY1F15 CY1F15 20CY1F10 CY1F10 1 1 1 Data 0.5 0.5 0.5 500 100 300 50 500 100 300 50 500 100 300 50 Piston speed

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Nm Moment Nm Moment Nm 4 4 4 CX CY1F15 3 3 3 DCY1F10 2 2 2 -X CY1F15 CY1F15 20CY1F10 CY1F10 1 1 1 Data 0.5 0.5 0.5 500 100 300 50 500 100 300 50 500 100 300 50 Piston speed mm/s Piston speed mm/s Piston speed mm/s (4) CY1F/m1 (5) CY1F/m2 (6) CY1F/m3 (7) CY1F/m4 30 30 30 30 20 20 20 20 CY1F25 CY1F25 CY1F25 CY1F25 10 10 10 10 CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass

IDX-OM-W022

. 8 1 8 2 Specifications . 8 1 Chapter 9 Specification for Option L 9 1 Safety instructions . 9 1 9 2 Specification . 9 1 9 3 Installation of heavy duty auto drain . 9 2 9 4 Maintenance . 9 2 Chapter 10 Specification for Option M 10 1 Safety instructions . 10 1 10 2 Specifications . 10 2 10 3 Installation of motor type auto drain . 10 3 10 4 Electric circuit . 10 3 Chapter 11 Specification

IDX-OM-W023

. 10-1 10-2 . 10-2 10-3 . 10-3 10-4 . 10-3 11 R 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4 . 11-2 11-5 . 11-2 12 S 12-1 . 12-1 12-2 . 12-2 12-3 . 12-2 2 13 T 13-1 . 13-1 13-2 . 13-1 13-3 . 13-1 13-4 . 13-2 13-5 . 13-3 14 V 14-1 . 14-1 14-2 . 14-1 14-3 . 14-2 14-4 . 14-2 15 15-1 . 15-1 3 IDX-OM-W023 i i i-1 () 3 i 1 1 3 IDU Series i-1 i-1 IDX-OM-W023 i

SMC Pneumatic Clean Series

Direct mount type End lock Standard 1 3 3 1 2 Double rod Air Cylinder Direct mount type 10-/1121-/221 3 3 1 2 CA2 Air Cylinder Standard 10113 1 2 CUJ Mini-free Mount Cylinder 10-/1121-/221 3 3 1 2 CDU Free Mount Cylinder 10-/1121-/221 2 3 1 2 CQS Compact Cylinder 10-/1121-/221 2 3 1 2 CQ2 10113 1 2 REC Sine Cylinder Note) 11-/1221-/221 3 1 2 CXSJ 3, 4 Dual Rod Cylinder Note) 10-/11-/1221

100

opening [Number of rotations] 2 4 6 8 10 11 1 3 5 7 9 12 0 * The flow rate is not the flow rate output from the vacuum port.

PFxx-OMY0005

If using the product to detect very small flow differences, warm up the product for 10 to 15 minutes first. There will be a drift on the display of approx 2 to 3% for 10 minutes after the power supply is turned on. The product doesn't produce and output signal for 3 seconds after the power is supplied. Perform settings suitable for the operating conditions.

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

Type 2 3 Elbow Universal Applicable tubing O.D. Metric size Inch size 3.2 01 03 05 07 09 11 23 04 06 08 10 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Control type 4 6 8 10 0 1 Meter-out Meter-in Use 1/8" tube.

JXCx-OMU0026

1000 1000 50 40 10 100 0.0 0.0 5.0 Axis 1 Absolute 50 50.00 1000 1000 0 0 10 100 0.0 0.0 0.5 2 Axis 2 Absolute 50 50.00 1000 1000 0 0 10 100 0.0 0.0 0.5 Axis 3 Absolute 50 50.00 1000 1000 0 0 10 100 0.0 0.0 0.5 Movement (ex.)