SMC Corporation of America
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EX260-SPN3/4: SI unit with 16 outputs, EX260-SPN3 or EX260-SPN4 This SI unit can be used with both firmware version 1.0.0 and 2.1.1 1, but the MRP function is not available. EX260-SPN3/4 MRP: SI unit with 16 outputs and MRP function, EX260-SPN3 or EX260-SPN4 This SI unit can be used with firmware version 2.1.1 1. This SI unit cannot be used with firmware version 1.0.0.

Dimensions (RS-232C without optional unit) Driver 5 100 40 1-5 hole 5 5 5 120 130 5 5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Driver input/output signal list (CN-1/F connector) Driver dimensions Pin no. Pin no.

Rated pressure range of switch Set pressure range of switch 16-2-54

1 (BUS OUT) CC-Link () 1 (M12 5 A code) 2 (BUS IN) CC-Link (IN ) 1 (M12 4 A code) 3 SI 1 (M12 5 B code) 4 (M3 ) 5 6 LED SI 2 7 SI (M330) SI 2 (BUS OUT)(1 ) 128 2LED 16 -9No.EX-OMP0004CN-I SI n L 1 2 3 4 5 6 7 8 L1 120.7 136.7 152.7 168.7 184.7 200.7 216.7 L2 80 96 112 128 144 160 176 L 9 10 11 12 13 14 15 16 L1 232.7 248.7 264.7 280.7

Setting range: MT.01 to MT.05 (Initial value: MT.01) Contact output signal 3 Select function 16. Press the [] key.

AFF125A-30 IDF120D-3 AMD910-30 220 30.0 AT220C-40 AFF220A-40 IDF150D-3 50 Hz area 60 Hz area IDF1D-1 IDF2D-1 IDF3DIDF4DIDF6DIDF8DIDF11CIDF15CIDF22C1-3 IDF22C1-3 IDF37C1-3 IDF55C-3 IDF75C-3 IDF120D-3 IDF120D-3 IDF150D-3 AMD1010-40 AMH150-03 AMH150-03 AMH250-03 AMH250-03 AMH350-04 AMH350-04 AMH450-06 AMH450-06 AMH550-06 AMH550-10 AMH650-14 AMH850-20 AMH850-20 IDG10-03 IDG20-03 IDG30-03

(mm) l : Tube piping length (mm) Vt = d2l 4 20 1 30 0.5 40 0.25 Tube length means the length from the switch valve (e.g. solenoid valve) to the actuator.

Occupied word size Unit Unit part number Input Output System diagnostic 1 0 Diagnostic data Unit diagnostic 1 0 SI unit EX600-SPL1-X26 (32 outputs) 0 2 EX600-DXB (8 inputs) 1 0 EX600-DXC (8 inputs) 1 0 EX600-DXC1 (8 inputs) (with open circuit detection) 1 0 Digital input unit EX600-DXD (16 inputs) 1 0 EX600-DXE (16 inputs) 1 0 EX600-DXF (16 inputs) 1 0 EX600-DYB (8 outputs) 0 1 EX600-DYE

Description SI unit specifications 16 16 outputs Installation 32 32 outputs Specification Item The following instructions must be followed during maintenance: Turn off the power supply. Stop the air supply, exhaust the residual pressure and verify that the air is released before performing maintenance. Otherwise an injury can result.

Initial Setting.16 4. 1 Gateway unit Communication speed switch (STATION NO.,B RATE) 16 4. 2 Setting the switch to change the communication CN2SW.17 4. Setting of controller (LEC) .18 5. External connection .21 5. 1 CN4: Power supply connector .21 5. 2 CN3: Bus connector .21 5. 3 CN1: CONT connector.21 5. 4 CN2: PC/TB connector.22 6.

Rc(PT) 3 8 28 to 30 Rc(PT) 1 2 28 to 30 Rc(PT) 3 4 36 to 38 Rc(PT)1 AN103-KM6 AN103-X233 AN103-X235 VEX 40 to 42 Rc(PT)1 1 4 AN203-KM8 1 2 48 to 50 Rc(PT)1 48 to 50 Rc(PT)2 3 Make sure not to apply a lateral load to the body during or after the installation.

Refer to pages 16-143 to 16-14-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 16-1-11 to 16-1-13 for Precautions on every series. C (COM) A (N.O.) Color of lead wire Black Symbol Contact C Common B (N.C.) A White Normally Open B Red Normally Closed Mounting & Wiring ZSE ISE IFW50--01 to 04/11 to 14/21 to 24 Caution PSE 1.

Minimum Operating Pressure Symbol Rubber bumper Unit: MPa 12 16 20 25 Minimum operating pressure Bore size (mm) 0.03 0.02 Standard Stroke Bore size (mm) 12, 16 20, 25 Standard stroke (mm) 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Replacement Parts: Seal Kit Theoretical Output OUT IN Unit: N Bore size (mm) Contents Kit no.

Manual reverse button 16 forward speeds are available. Forward speed switch SPEED 16 reverse speeds are available. Reverse speed switch !8 16 forward acceleration steps are available. Forward acceleration switch ACCEL 16 reverse acceleration steps are available. Reverse acceleration switch CN1 Power supply connector Connect the power supply cable. !7 CN2 Connect the motor connector.

When an Ethernet MPC is power cycled, communication to and control of ALL devices downstream of the Ethernet MPC is lost. 40 - IN20267 Explicit Messaging 16. The Ethernet MPC can be controlled using explicit messaging instead of implicit messaging as some PLCs do.

5 to 40 10 to 100 PF2W30 PF2W20 PF2W33 For Deionized Water and Chemicals For Deionized Water and Chemicals P. 44 Remote type Flow rate measurement range l/min Display unit Display unit (4ch) Sensor unit PF2D504 PF2D520 PF2D540 PF2D20 0.4 to 4 1.8 to 20 4.0 to 40 PF2D30 Application Examples Application Examples Flow control of cooling water for wafer temperature regulation and high frequency

: 95F (35C) Facility water: 95F (35C) 400 400 200 0 0 0 10 20 30 40 50 60 70 Circulating fluid temperature (C) 0 10 20 30 40 50 60 70 Circulating fluid temperature (C) HED007 60 80 100 120 140 F 40 1600 Facility water: 50F (10C) Facility water: 77F (25C) Cooling capacity (W) 1200 Facility water: 95F (35C) 800 400 0 0 10 20 30 40 50 60 70 Circulating fluid temperature (C) Heating Capacity

circuit 30 Nil E None With power-saving circuit 40 Electrical entry direction Orifice diameter Piping direction 45 left direction IN Symbol Series Orifice diameter (mm ) IN 1 3 4 6 1.0 3.0 4.5 6.0 30 L1 Nil 40 OUT OUT Quick Fastener Clip Part No. 90 left direction 45 right direction Series Size Quick fastener clip part no. (2 pcs.)