Pressure Control Equipment Bracket Pressure gauge to 1 2 1 8 / / 14-5-15 Vacuum regulator IRV1000/2000/3000 Able to adjust the pressure for vacuum line Bracket Pressure gauge 100 to 1.3 kPa 14-6-1 M5 to 2 0.01 to 0.7 0.05 to 0.7 1 8 3 0 / Precision regulator VEX13 Large capacity exhaust regulators Setting sensitivity: 0.2% F.S. Repeatability: 0.5% F.S. Bracket Foot Pressure gauge Silencer 14-4-2 2 F.R.L.
Proper tightening torque (Nm) 7 to 9 12 to 14 22 to 24 28 to 30 28 to 30 36 to 38 Thread 1/8 1/4 3/8 1/2 3/4 1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2.
No.SY3000-OMH0002 SY V100 / -2,3 -4,5 -4,5 -6 -6 -6 -6 -7 -7 -7 -814 -15,16 -1No.SY3000*-OMH0002 ISO/IEC) (JIS) 1) 2 *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218-1992: Manipulating
L m3 m3103 L ... 1: Hysteresis can be set between "0" and "3% of maximum rated flow". If the difference between Set point 1 and Set point 2 is less than "6% of maximum rated flow", the maximum Set value of hysteresis is (Set point 1 Set point 2) divided by 2. 2: When Set point 1 = Set point 2, chattering may occur.
It should be provided by the customer. 2 Joint and modular adapter are shipped together with the product. 6 EX245 Series Specic Product Precautions 1 Be sure to read this before handling the products.
5 to 60C (No freezing) Ambient and fluid temperature Fluid Air Construction Relieving type Symbol Port Size/Weight Common IN Individual IN Port size Weight (kg) IN Pressure gauge port size 1 Model Piping IN side OUT side Body Regulator End plate End plate OUT IN 2 1 2 OUT Common IN 1 4 3 8 1 8 ARM2500 0.26 0.06 Individual IN 1 4 1 4 1 8 Common IN 3 8 1 2 1 8 IN 1 OUT 2 2 OUT ARM3000 0.47
Caution (1) Perform the following maintenance regularly to avoid possible danger due to unexpected auto switch malfunction. 1) Securely tighten the auto switch mounting screws.
GV*-OMH0003-C PRODUCT NAME High Vacuum Slit Valve MODEL / Series / Product Number XGT312-50336-** XGT313-50336-** B Contents Safety Instructions 2 to 3 1. Specifications 4 2. How to order 5 3. Construction/Operation 6 to 8 4. Precautions 9 to 10 5. Replacement Part List 11 6. Maintenance 12 7.
Recommended flow rate Note) (l/min (ANR)) Mass (g) Internal capacity (cm3) 1.7 ZA Model IN side, OUT side 2 3.2 4 4 6 6 8 1/8" 5/32" 5/32" 1/4" 1/4" 5/16" ZFC050-02 ZFC050-23 ZFC050-04 ZFC100-04 ZFC100-06 ZFC200-06 ZFC200-08 ZFC051-01 ZFC051-03 ZFC101-03 ZFC101-07 ZFC201-07 ZFC201-09 2 7 10 10 20 30 50 7 10 10 20 30 50 4.9 ZX 1.7 4.3 IN/OUT straight piping Metric size ZR Easy installation
pc., Input/output signal connector 1 pc., Power supply connector 1 pc., Operation manual (for installation/operation) 1, Quick manual (with a clear case) 1, Alarm code list sticker 1, Ferritic core (for communication) 1 pc.
-r I tt""d lii9;--1@_*_1aru" l . 6 l y ' | t Fiif_ilri v *r T f l l T r I L---+---J-J--fo O Series NCM Auto Switeh Mounting Position aAuto $vidr Placemer* dr|lsidrs D-85, 86 Type Front Nose Mounting type Auto switch Auta Swifuh Pkrcement Dfinensions 0.97 1.03 1 . 1 2 1.22 1.35 '( ) are for Front Nos Mounting type cylinders.
6 t Zinc chromated w Electroless nickel plated Black zinc chromated Accessory Accessory IN 2 Series ARJ310 Dimensions ARJ310-01 ARJ310F-01 Approx. 31 Approx. 56 Approx. 56 Approx. 35 32 22 M12 x 1 Panel fitting dimensions 12.5/Panel thickness: 4 or less Approx. 27 19 2 2 -5.5 Approx. 57.2 8.5 Approx. 82.5 15 Applicable tube O.D. 4, 6, 5/32, 1/4 Port size Rc, NPT 1/8 2 2 1 1 Pressure gauge
How to Order AS 2 2 0 1F G 01 06 W2D Flame resistant flat head screwdriver adjustable Body size 2 1/8, 1/4 standard 3 3/8 standard 4 1/2 standard Applicable tubing O.D.*1 Metric size 06 6 08 8 10 10 12 12 Elbow Control method 0 Meter-out 1 Meter-in *1 For selecting applicable tubing O.D., refer to the Model shown above.
Pod NVF3000 NVF5000 Supply SUP Cylindet cYL.1, CYL.2 A , B Exhaust EXH.1, EXH.2 Rl, R2 Symbol (SirEle solenoid) l c 1 : c Y L . 1 l IC2:CYL.2 lEl :EXH.r I {E2:EXH.2] Lubricant 1.
Series 10-VQD1000 [Option] 4 Port Direct Operated Poppet Solenoid Valve How to Order Valve Clean series Valve option Nil Standard (2 W) V Vacuum (2 W) U For large flow (3.2 W) W For large flow, Vacuum (3.2 W) Energy saving type Rated voltage 5 24 VDC 6 12 VDC Body type 2 Body ported (Single unit) 3 Body ported (Manifold) 5 Base mounted 10 V Q D 1 1 5 1 U 5 L M5 Electrical entry
AC 110 12 2 12 3 q e w e t y 220 10 1 10 1.5 440 6 1 3 1 550 5 0.8 2 0.5 r b contact w a contact r q DC 24 3 2.5 3 2.5 C C 48 1.5 1.2 1.5 1.25 When rising pressure q w = ON e r = OFF When rising pressure q e r y = ON q w r t = OFF 110 0.5 0.25 0.5 0.2 220 0.25 0.1 0.25 0.1 Insulation resistance: 100 M or more at 500 VDC by megameter Voltage resistance: 2000 VAC/1 min. 16-9-5 2 Series
No.VFR6000-OMQ0001 VFR6000 / -2,3 -4,5 -4,5 -5 -5 -5 -6 -6 -6 -7 -8,9,10 -11 -12 -1VFR6000-OMQ0001 ISO/IEC) (JIS) 1) 2 *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218-1992: Manipulating
1/4 Non-relieving Flow direction: Right to left Drain cock with barb fitting: 6 x 4 nylon tube Note 1) Body size 3 8 30 40 1 2 Note 2) Thread type Metric thread (M5) Rc NPT G Nil Display units for product name plate, caution plate for bowl, and pressure gauge: PSI, F Note 3) Note 1) N F When more than one specification is required, indicate in ascending alphabetical order.
Service life cycles (10 thousand) Operating pressure (Pa) Leakage (Pam3/s) Effective area (mm2) Model Valve type Piping size Orifice (mm) Internal External Fitting P.523 For VCR 1.3 x 10-11 XVD2-02V 50 0.2 MPa (G) to 1 x 10-6 5 x 10-9 1.3 x 10-11 Single acting (N.C.) 1/4 3 Main air supply: 4.6 Initial air supply: 0.2 to 4.6 Values at normal temperature, excluding gas permeation to For Swagelok