MTS

W (kg) 2 3 4 5 40 32 0.04 0.05 1 0.03 0.5 0.4 0.3 0.2 25 20 8 0.02 16 12 0.1 0.01 5 10 20 30 5 10 20 30 40 50 100 200 Overhang L (mm) Overhang L (mm) Graph (3) Graph (6) Maximum Speed: Up to 500 (mm/s) Maximum Speed: Up to 600 (mm/s) 0.3 20 30 40 50 0.2 10 0.1 Weight W (kg) Weight W (kg) 2 3 4 5 40 32 0.04 0.05 1 0.03 0.5 0.4 0.3 0.2 25 8 20 0.02 16 12 0.01 5 10 20 30 0.1 5 10 20 30 50 100

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

AN103-01 AN203-02 AN303-03 AN403-04 5-10-3 4 Silencer Metal Case Type Series 25 How to Order Exhaust in only one direction Prevents scattering of mist and noise. 25 10 002 Port size Thread type Body size 002 003 004 006 010 1/4 3/8 1/2 3/4 1 R NPT Nil N 04 05 06 07 08 10 11 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

E-P HYREG ® Series VY1 1

Note) A M5 01 02 02 03 04 04 06 10 10 12 14 20 Note) M5 1 8 1 4 1 4 3 8 1 2 1 2 3 4 1 Note) Note) 3 Body ported 5 1 1 11 4 7 1 4 11 2 1 2 2 9 Note) Only bracket or foot may be mounted. 14-10-2 3 E-P HYREG Series VY1 Standard Specifications 02 03 04 04 06 10 02 03 04 VY1A0 0 1-M5 VY1B0 0 1M 0 5 1 VY110 0 10 0 1 2 VY120 0 10 0 1 2 VY130 0 1VY140 0 1VY150 0 1VY170 0 11 1 0 2 VY190 0 11 2 4

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

(mm) Stroke (mm) 20 40 50 30 +10.5 +12.5 +22.5 +24 10 to 16 +37.5 +40 +66.5 20 to 50 13-11-114 19 Series ZPR Vacuum Pad: Ball Joint Type Lateral Vacuum Entry with Buffer 20 25 32 ZPR F 10-0-A10 (With buffer) 10 13 16 J K J K ZPR F 10-0-A14 (With buffer) S S M10 x 1 M14 x 1 Hexagon width across flats 14 3 I Hexagon width across flats 19 3 5 Hexagon width across flats 10 J ZX Applicable tubing

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

X axis Y axis Z axis Z 5 W 5 mm 10 mm 20 mm 0.8 kg 20 Y 10 3.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Seal material and its changed part Seal material Part numbers indicating changed seal material and leakage Compound No. 1349-80 Symbol Nil N1 Leakage Pa m3/s or less Note 1) Seal material FKM EPDM BARREL PERFLUORO Changed part Note 2) Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 2101-80 2, 3 2 3 Nil A B C P1 70W 1.3 x 10-11 (FKM) 1.3 x 10-9 1.3 x 10

HRX-OM-W032

3-1 3.1.1 Transportation using forklift and hanging . 3-2 3.1.2 Transportation using casters . 3-3 3.2 Installation . 3-4 3.2.1 Environment . 3-4 3.2.2 Operation at low ambient temperature or low circulating fluid temperature . 3-6 3.2.3 Location . 3-7 3.2.4 Installation and maintenance space . 3-8 3.3 Installation . 3-9 3.3.1 Installation . 3-9 3.3.2 Electrical wiring . 3-11 3.3.3 Preparation

CEx-OMI0064

38 10 . 40 10-1 . 40 10-2 . 42 1 , 1. 2. 3.

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

Note) Metric size Inch size With One-touch fitting 01 03 05 07 09 11 04 06 08 10 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 4 6 8 10 For low speed control Note) For applicable tubing O.D. selection, refer to the Model on page 727. Thread type Port size M5 U10/32 01 02 Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT M5 x 0.8 10-32 UNF 1/8 1/4 N Made to Order Lubricant: Vaseline X12 Ex.)

MU

NX NL R1 NO NX NZ R1 Allowable Rotating Torque (Nm) 25 +0.058 0 +0.058 0 +0.058 0 +0.070 0 CD-MU02 CD-MU03 CD-MU04 CD-MU05 8 10 10 14 8.5 10 11 16 11 14 15 20 3 4 5 6 13 14 17 23 8.5 10 11 16 19.5 24 26 36 9 11 13 16 8 10 10 16 21 24 27 39 9 11 13 16 18 22 26 32 I-MU02 I-MU03 I-MU04 I-MU05 Y-MU02 Y-MU03 Y-MU04 Y-MU05 32 40 50 63 Size Allowable rotating torque Work mounting allowable torque

Refrigerated Air Dryer

Model Applicable transformer Model Dimension Total weight (kg) A Weight (kg) B C D 171 217 30 40 43 50 31 35 44 51 35 39 48 55 IDF-TR500-1 IDF-TR500-2 IDF-TR500-3 IDF-TR500-4 IDF-TR500-1 IDF-TR500-2 IDF-TR500-3 IDF-TR500-4 IDF-TR500-1 IDF-TR500-2 IDF-TR500-3 IDF-TR500-4 IDF4E-10 284 573 345 315 171 217 IDF6E-10 IDU3E-10 IDF-TB403 6 284 171 217 IDF8E-10 IDU4E-10 643 370 340 284 Note) Weight

Fieldbus system PROFIBUS DP compatible SI unit

Content 0 Reserved 1 Reserved 2 Reserved 3 Reserved 4 Reserved 5 Reserved 6 Reserved 7 Reserved System diag.4 7 6 5 4 3 2 1 0 Byte 10 Bit No.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

M2max (from 3 of graph MY1MW: M2) = 24 (Nm) m1 M3 = m1 x g x Y = 6.525 x 9.8 x 29.6 x 10 3 = 1.89 (Nm) Load factor 3 = M2/M2max = 1.89/24 = 0.08 M2 MX 5.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

/s) L unit 1000 1000 Air cushion 500 400 300 500 400 300 L unit Air cushion 200 200 1002 3 4 5 10 20 50 100 1 2 3 4 5 10 20 30 400 50 Caution Load weight (kg) Load weight (kg) 1.

SL5200

(Standard) Vespel 3) Code SH No code Surface finish VS Code Surface finish Ra max 10 in. (0.25 m) Standard 7 in. (0.18 m) 5 in. (0.13 m) 3) Not available with SH material.

Series KG Stainless Steel One-touch Fittings

D L 4 KGC06-00 KGC04-00 3 3 4 6 KGC08-00 KGC10-00 10.4 17 16 12.8 18.5 17 15.2 20.5 18.5 18.5 23 21 6 8 10 12 20.9 24 22 8 KGC12-00 16 26.5 28 25 13 KGC16-00 130

CLQ

The lock ring becomes perpendicular to the piston, creating clearance between the piston rod and lock ring, which allows the piston rod to move freely. 40 CLQ Through-hole 50 Retraction locking Both ends tapped style 63 80 100 9-10-2 9-10-3 3 Series CLQ Specific Product Precautions 1 Be sure to read before handling. Selection Selection Warning Warning 1.

Swivels

Pressure 50 45 40 3/8" 45 40 35 40 35 Pressure Drop (psid) 30 1" 3/4" 35 Torque (in-lbs) 30 25 30 1" 1/2" 25 1/4" 1/4" RPM 25 20 1/2" 3/8" 20 3/4" 20 15 3/4" 15 15 1/2" 3/8" 10 1" 10 10 2" 1/4" 5 5 5 1-1/2" 0 0 0 0 2000 1000 3000 4000 5000 1000 0 2000 3000 4000 5000 0 10 20 30 40 50 60 70 80 90 Pressure (PSI) Pressure (PSI) Flow (USGPM) Quick Coupling Division 8145 Lewis Road Minneapolis

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

4 5 10 20 50 40 1001 2 3 4 5 10 20 30 4050 30 Air Cushion Stroke (mm) m3 max. m1 max. m2, m3 max.

MY1

4 5 10 20 30 100 2 3 4 5 10 20 30 0.5 40 50 100 Load mass (kg) Load mass (kg) 40 Horizontal collision: P = 0.5 MPa 20 Horizontal collision: P = 0.5 MPa 2000 1500 2000 1500 Collision speed (mm/s) Collision speed (mm/s) L unit 1000 1000 Air cushion 500 400 300 500 400 300 L unit Air cushion 200 200 100 1 2 3 4 5 10 20 30 1002 3 4 5 10 20 50 Caution 40 50 Load mass (kg) Load mass (kg) 1.