CJ2

Component Parts No. q w e r t y No. u i o !0 !

Vacuum Equipment

Average suction flow rate V x 60 T1 V x 60 T1 Q = Q = + QL T2 = 3 x T1 T2 = 3 x T1 Q : Average suction flow rate /min (ANR) V : Piping capacity () T1 : Arrival time to stable Pv 63% after adsorption (sec.) T2 : Arrival time to stable Pv 95% after adsorption (sec.) QL : Leakage at work adsorption /min (ANR) 2.

Series AP3500

q e r q e r q e r q e r w w w w 125 Process Gas Equipment / Diaphragm Valve Specific Product Precautions Be sure to read before handling.

VQ7-6/7-8

0 t t r i w e r i u w y e q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com q VQ7-8-FG-DVQ7-8-FG-D-R !0 !0 t t r i w y e q r i w e q VQ7-8-D-R FHG FJG FIG VQ7-8-DFHG FJG FIG !0 !0 t t r i w y e q r i w e q VQ7-8-FPG-D!

VM

Component Parts w q Description Brass Brass t r Description Stainless steel Material Note No. Material Note No.

RSH/RS1H

9 u #0 #6 t #8 q y $0 $1 20 r !1 e @2 !2 #7 #3 #1 32 w 50, 63, 80 Double acting (DL, DM) @3 !3 !5 #6 o @5 @4 i @1 @6 !0 @7 @9 !6 t u !7 !8 q #8 $1 y Single acting, Spring extend (TL, TM) Double acting with spring (BL, BM) r $0 !1 !2 #7 #4 #7 @2 e #5 #3 @8 #7 #7 #1 @8 w 10-9-6 6 Heavy Duty Stopper Cylinder Series RSH/RS1H Construction Component Parts (For single acting) No.

Series AP3100

q e r q e r q e r q e r w w w w 125 Process Gas Equipment / Diaphragm Valve Specific Product Precautions Be sure to read before handling.

RSH/RS1H

MK(2) Resistance RS Q G Adjustment dial RS H A RZQ Adjustment dial rotation angle MI W S 90 CEP1 Stopper direction can be changed within 90 CE1 CE2 The stopper lever can be rotated 90.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

Series SYJ7000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) r w w q t r e y q t A A B B SY SYJ i i SX R1 P R2 R1 P R2 VK 3 position closed center/exhaust center/pressure center u VZ 3 position closed center (A) 4 (B) 2 VF t q r w 5 (R1) 3 (R2) 1 (P) VFR 3 position exhaust center (A) 4 (B) 2 A B VP7 5 (R1) 3 (R2) 1 (P) VP4

EX500-GPR1A.eng

SI unit for VQC/S0700 series valve ( EX500-Q ) Current consumption Supply current for block Supply voltage for block Connected block station Connected block Solenoid valve ( single, double ) General purpose output block ( EX500-Q 02 only ) Supply current for block 0.65A Max.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

6 e (1 pc.) @4 10-11-10 10 Series MIW/MIS Escapements Construction: Single Finger Type (MIS) 8 12, 20 i e u q !3 y w o t RE A B !2 w r !0 !1 REC CX CY 25, 32 Option w @0 !1 !7 !8 !5 !9 MQQ M RHC !6 MK(2) (32 only) RS Q G Scraper Stroke adjuster RS H A No. Description Material Note Component Parts RZQ No. Description Material Note Hard anodized Piston seal NBR Aluminium alloy Body !

VM

Description Material Notes q Description Material Notes No.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

6 MK(2) (32 only) RS Q G Scraper Stroke adjuster RS H A No. Description Material Note Component Parts RZQ No. Description Material Note Hard anodized Aluminium alloy NBR Piston seal Body !0 q MI W S NBR Rod seal Piston assembly !1 w Heat treatment/Special treatment Carbon steel NBR (MIW8 ... M-3P) Gasket Finger !2 e CEP1 Hard anodized Aluminium alloy Cover r Plug !3 (MIW12 to 25 ...

CXT

Vertical mounting: f=W =0.3(Slide bearings) =0.1(Ball bushing bearings) MGC W MGF b 0.5 q CY1 q MY1 NO Confirmation of adjusting bolt capacity W WA Determine the movable weight WA which can be operated only by adjusting bolts.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

1 i q !4 r e !0 !1 q i !2 o !3 y Component Parts No.

SYJ3000/5000/7000

Component Parts Replacement Parts No. u i Description Description Sub-plate Pilot valve No. q w e r t y Note Aluminum die-casted Part no.

Speed Controller with Indicator

2 q !5 q t t r u u i i r y y w !6 w Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread e o !3 !1 !0 !4 !2 !5 q t u i r y !7 w Meter-in type Meter-out type Component Parts No.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

3 e $2 q $0 #9 !8 u i o y !0 @8 @3 !1 $1 #0 r MY2H16 MY2HT16 $5 !4 @5 !9 @3 !5 #1 @4 $4 !2 $3 #3 #5 #6 @0 #4 #7 !7 #2 @6 @7 Component Parts Note No.

Fieldbus system PROFINET compatible SI Unit

Red LED is ON (C/Q or P24) (When diagnostics is valid) Check the parts showing an error using the LED display or via the Web server. Re-wire the short-circuited part or check if the cable, IO-Link master device or IO-Link device are normal. Short circuit of L + power supply or C/Q terminal or P24. 8 LB1 Red and green LEDs are ON alternately.

2-Apr-01 Quick Reference Auto Switch Chart with (PnP) M-8 (3 pin) & M-12 (4 pin) Connectors, Page 1/2 32, 40, 50, 63, 80 & 100 Bore sizes (Auto Switch Spacer # BMP1-032 required) 32, 40, 50, 63, 80, 100, 125 & 200 Gripper Bore sizes (sizes depend on seri

Auto Switch Precautions q Design & Selection Warning In the same way, when operating under a specified voltage, although an auto switch may operate normally, the load may not operate. Therefore, the formula below should be satisfied after confirming the minimum operating voltage of the load. qConfirm the specifications.