High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

J type J type fitting assembly procedure Pull out the lever pin q. Rotate the lever assembly w to align the holes on the lever assembly w and the base e. Insert the lever pin q into the holes to fix the lever assembly w. 1 !

VXD21/22/23

59 59 60 P Port size Rc VXD2140 Q R a b c d e f M L K J H F E D C B A N 69 (76) 77 (84) 87 (97) Q N 61 69 79 Q N 61 (68) 69 (76) 79 (89) N 61 (68) 69 (76) 79 (89) Normally open Normally closed VXD2142 , 30 30 35 59 59 62 57 74 81 34 51 58 29 37 43 34 43 47 20 20 23 92 92 95 104 (116) 26 44 59 66 28 35 40 3 8 8 14 23 39 47 47 48 39 65 78 86 42 46 56 52 56 66 63 80 90 3 8 1 2 32.5 118 (136)

VHK

Do not use any other agent except a seal tape. q Contact SMC if using fluids other than air. w Do not supply air pressure from 2(A) port. The air will leak to 1(P) port. e Since the valve may have slight air leakage, it may not be suitable for holding pressure in a pressure vessel.

ZQ

Actuation Warning 1 Normally closed q Cannot be used for vacuum retention. w Use a release valve. (Without a release valve, the workpiece may not be released.)

2/3 Port Solenoid Valve for Chemicals

3 Sleeve 7 Iron Spacer 8 PBT r Return spring 9 Stainless steel w Board assembly 10 e Casing 11 PBT q Plug 12 NBR O-ring 13 NBR 3 Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM10/100 Construction/Base Mounted Type LVM13R LVM14R LVM16R !2 !0 !2 !0 !2 !0 !1 !1 !1 y y y t t t u u i i u i o o !3 !3 o !3 r r r e e w w e w q !4 !4 q q !4 LVM115 Description No.

7.4

VQ1000-FPG-C4M5-D: 6 sets Double check block 757 S0700 Series Construction Body Ported Construction 2(B) (A)4 S0716 2-Position Single r u e w q 3(R2) (R1)5 1 (P) t y i 2-Position Double S0726 2(B) (A)4 r u e w q 3(R2) (R1)5 1 (P) t y i 3-Position Closed Center S0736 r u e w q 2(B) (A)4 (R1)5 1 (P) 3(R2) t y i 4-Position Dual 3-Port Valve S07A6 r u e w q 2(B) 4(A) 5(R1) 3(R2) 1(P) N.C. + N.C

MXQ

8 q @0 !2 e !3 !5 MX MTS t !6 r u y w !

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

0 q t r i S u y o !4 !8 !

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

1 u t q w e y !2 i r !4 !0 MX MTS MY CY !9 !8 !5 !7 MG CX MY1WK with side seal D@5 @0 @3 @4 @2 @1 -X 20Data Component Parts No. q w e r t y u i o !0 !

MY1

1 u t q w e y !2 i r #3 !4 !0 !9 !8 !5 !

Stainless Steel 316

Construction q w Material No.

Modular Pressure Control Equipment F.R.L. Replacement Procedure

1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Digital Flow Switch For Air/Water Series PF2A/PF2W

The display of the accumulated flow will be reset to zero. q r q w LCD display/Orange Displays the measured flow rate, each setting condition, and error code. e Output (OUT1) display/Orange Displays the output condition of OUT1. Illuminates when turned ON. i Displays the selected unit.

Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM

3 Sleeve 7 Iron Spacer 8 PBT r Return spring 9 Stainless steel w Board assembly 10 e Casing 11 PBT q Plug 12 NBR O-ring 13 NBR 3 Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM10/100 Construction/Base Mounted Type LVM13R LVM14R LVM16R !2 !0 !2 !0 !2 !0 !1 !1 !1 y y y t t t u u i i u i o o !3 !3 o !3 r r r e e w w e w q !4 !4 q q !4 LVM115 Description No.

Multi-Axis Step Motor Controller

Name Description Details q PWR Power supply LED (Green) Power supply ON: Green turns on Power supply OFF: Green turns off o q w w RUN Operation LED (Green) Running in parallel I/O: Green turns on Running via USB communication: Green flashes Stopped: Green turns off !

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

KPGU12-00 KPQU12-00 24 20.9 32 58 46 20.9 18.1 55.2 31.9 Q Note 1) D indicates the maximum diameter.

KT10

Gauge port 2) (Inlete, Outletr) Porting Configuration Pressure gauge Code r psig/bar unit MPa unit r e 0 6 10 20 40 60 Q No pressure gauge w q w q 600 psig/bar 3) 4.1 MPa 7 MPa 14 MPa 28 MPa 41 MPa 70 MPa qIN wOUT eGauge port (Inlet) rGauge port (Outlet) Connections (Inletq, Outletw) 1000 psig/bar 3) Ports Code 2000 psig/bar 3) Connections 4P V 4PN 4000 psig/bar 3) e 4P 4PN 4 4B NPT 1/4 inch

Fluoropolymer Piping Equipment

P0.01MPa 2 0 2 4 6 8 10 0 Number of needle rotations 939 B LVN Series Construction t r w e q With reducer i y u Part lists Material Description No.

Refrigerated Air Dryer

A D E Ventilation direction Compressed air inlet Illuminated switch Compressed air outlet J F G Evaporation thermometer Ventilation direction C Ventilation air inlet Drain tube (O.D.: 0.4 [10 mm], Length: 31.5 [0.8 m]) H N M K L Power cable with plug (Length: 110 [2.8m]) Dimensions Unit: inch [mm] A B C D E F G H J K L M N Q Model Port size 3/8 8.9 [226] 16.1 [410] 18.6 [473] 2.6 [67] 4.9

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

10-/21-AR20-B30-B: Max. 3.5 10-/21-AW40-B: Max. 5 AR50-B/60-B 10212 x P1 (Port size) A BB Pressure gauge (Option) C H K IN OUT B Q AA Applicable tubing 6/4 P2 (Pressure gauge port size) R F J M D J U Bracket (Option) T N S Optional specifications Standard specifications Model Round type pressure gauge Bracket mounting size Panel mount P1 P2 A B Note 1) C D Q R S T U V W Y Z F J K AA BB H