Stations 3 2 1 D D D D How to Order Valve 10-SV 1 1 0 0 F 5 Note) q w r e t y u i Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors q Series r Back pressure check valve Note) Available with manifold block for station additions.
Vacuum suction from the vacuum port minimizes external particle generation from the ball screw and guide. 25AVacuum suction LEC Vacuum suction LEC S LEC SS-T LEC Y Support Guide/11-LEFG Series Page 527 Motorless A support guide is designed to support workpieces with significant overhang.
Ii' .. , . t ~ .230 42.2 25.8 38.9 ' 39.5 33.9 44.7 28.2 35. 1 10.5 17 ~ 35 A SP330F-N01-07S 1/4" NPT1 /8 10-32UNF ASP330F-N01 -09$ 5/16" ~ 14.2 118 15.8 15 .2 :.g 1/2' 8 NP'W~ " ~ NE?'T, lta ".,I:SP'43oFi!
Rubber cover CKZ3N CKZ2N S T 050 X2742A 050 T Bore size Proximity switch T TURCK P P&F W None Bore size 050 50 equivalent 063 63 equivalent 050 50 equivalent 063 63 equivalent Metal cover Metal switch cassette cover CKZ3N T M 050 X2742A None X2734 With cover * The switch kit includes a switch cassette assembly, metal switch cassette cover, and mounting brackets.
Fittings & Tubing Air Cylinders Rotary Actuators HB HT HC X N A H HA CB W K 2 x plug 2 x P HP (Piping port) 4 x J x E T 4 x counterbore dia.
D B Valve size PVQ Sub-plate VEXD-5 VEXB-2-2 P (Port size: M5) VY1 VY1 Thread type Port size Symbol A B Port size M5 Symbol Nil F N T Thread type Rc G (7) VBA VBAT 1 8 AP100 NPT NPTF VYD-7 VEXB-4-1 Base gasket 2 4 Valve size VEX1-9-1 P VEX4-2AP Sub-plate Port size Thread type Port size Thread type Symbol A B Port size Symbol Nil F N T Thread type Rc G (7) Symbol A B C Port size Symbol Nil
Applicable model t ZH15DA-09-N03-11 ZH15DA-N02-N03-N03 2 Minimum C Factor of a Supply Valve Model C[dm3/(sbar)] ZH05A 0.12 ZH07A 0.23 ZH10A 0.47 ZH13A 0.80 ZH15A 1.06 ZH18A 1.53 ZH20A 1.88 ZH18DA-11-N03-13 ZH18DA-N03-N03-N03 1 ZH20DA-10-04-12 ZH20DA-03-04-04 ZH20DA-11-N04-13 ZH20DA-N03-N04-N04 t 2.
x T3 5 pcs. t Packing Drain V#6500 y Gasket AL-62S AL-63S AL-60S AL-61S AL-31S NBR JIS B 2401G35 1 pc. JIS B 2401G35 1 pc. JIS B 2401G35 3 pcs. JIS B 2401G35 3 pcs. JIS B 2401G35 5 pcs. u O-ring 14-20-25 5 Series AMD Dimensions AMD150 to AMD650 Accessory D: With auto-drain (N.O.) Drain cock: Black One-touch fitting C: With auto-drain (N.C.)
direction R T IN-OUT reversal direction Element service indicator Element service indicator Note) 20is applicable only to products with N.C. auto-drain (C) or N.O. auto-drain (D).
2 1 1 Resin Hard chromate plated Stainless steel Piston rod Magnet t !3 1 1 Carbon steel Zinc chromated Hexagon socket head screw Bushing Sintered oil-impregnated beaning y !4 2 1 NBR Rolled steel Cylinder tube gasket Seal holder u !5 1 1 Carbon steel Chromated Nickel plated Aluminum alloy Hexagon socket head screw Cushion seal holder i !
Normal condition: Flow display which is converted in atmospheric pressure at 0 C. 5: Total accuracy when used with applicable sensor. -37No.PF-OMH0003-F PF2W20 Model PF2W20 PF2W504(T) PF2W520(T) PF2W540(T) PF2W511(T) Applicable sensor PF3W504 PF3W520 PF3W540 PF3W511 Rated flow range 0.5 to 4.0 2 to 16 5 to 40 10 to 100 L/min L/min L/min L/min Instantaneous Setting/display flow range 1 0.35
T Tungsten 3. Specifications 3-1.
Hs T (mm) Symbol BX BY D F GA GB L M N S T W Wc Ws Z ZZ Hs IA K Bore size 40 56 54 16 44 77 10 55 M12 x 1.5 86 112.5 57 5 39 27.5 114 228 46 47 14 50 64 64 20 55 78.5 10 58 M16 x 1.5 87.5 117 60 7 41 33 118.5 232.5 50 58 17 63 74 74 20 69 82 12 58 M16 x 1.5 91 120.5 67 5.5 48 39 122 236 56 72 17 12 Series CLK1 Accessory Dimensions Single Knuckle Joint Double Knuckle Joint 0.040 0.076 Hole
D2 L1 L2 L3 M1 L4 H(1) A(2) D1 D2 L1 L2 L3 L4 T M1 Weight (g) Model Model Min.
Description Material Note q w e r t y u i o !0 !1 !2 !3 !4 !
5 t u y Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MDHR2 !4 q !3 @0 o !2 !1 !9 w !8 i !6 !7 i e r !5 !0 y u t Component Parts Note Description Material Note Description Material No. q w e r t y No. !1 !
5 t u y MDHR2 q !4 !3 o @0 !2 !1 !9 w !8 i !6 i !7 e r !5 !0 t y u Component Parts Component Parts Description Material Description Material Note No. q w e r t y No. !1 !2 !3 !4 !5 !6 !7 !8 !