Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

Selection of air quality by purpose For these cases, degree of quality is 15 4 +3 5 specified as 1, 4, and 2 respectively. 40 5 +7 25 Refer to Guide (1). Refer to Guide (2). Refer to Guide (3). Refer to below piping system chart. Refer to Guide (4) page 14-14-4.

AMF

198 I 56 66 66 80 80 J 15 20 17 22 19 K 5 8 8 8 8 L 9 12 12 14 14 N 35 40 40 50 50 O 54 66 66 80 80 P 70 84 84 100 100 Q 26 28 28 34 34 R 4.5 5 5 5 5 S 1.6 2.0 2.0 2.3 2.3 1 8 1 4 3 8 , , 7.5 4 4 5 5 AMF150 5.5 6 6 7 7 139 152 158 184 190 13 13 16 16 19 55 66 72 92 98 63 76 76 90 90 63 76 76 90 90 10 10 10 10 10 1 4 3 8 , AMF250 1 2 3 8 1 2 , AMF350 3 4 14-20-46 6 Odor Removal Filter Series

LMU100/200 Series Mist Spray Unit

6 1 2 3 4 5 6 Air blow circuit 1 2 Available LMD1 LMD2 Not available Dimensions LMD1 n: Stations L 58 94 130 166 202 238 L1 44 80 116 152 188 224 Model LMD1-1 LMD1-2 LMD1-3 LMD1-4 LMD1-5 LMD1-6 n 3 6 9 12 15 18 L1 4 x 5.5 3 x Rc1/8 n = Rc 1/8 LMD2 n: Stations L1 25.5 44.5 63.5 82.5 101.5 120.5 L 38 57 76 95 114 133 Model LMD2-1 LMD2-2 LMD2-3 LMD2-4 LMD2-5 LMD2-6 n 2 4 6 8 10 12 2 x 6.5 n

2.0

Length 3 3 x 1 6 600 mm 10 1000 mm 3A 1/8" x 1/16" 4 4 x 2 4A 5/32" x 1/32" 6 6 x 4 6A 1/4" x 1/8" 100 mm Specifications Model LPV21 LPV22 Valve type N.C. N.O.

Dedicated Controller

to 40C 5 to 50C 5 to 40C 5 to 50C Operating temperature range Electric power 640VA 300VA 640VA 300VA Control system AC software servo/PTP control Position detection system Incremental encoder Home position return direction Maximum positioning point setting Can be selected between the motor side and the side opposite the motor. 1008 points (when step designation is actuated) Movement command

EXxx-OMV0018_ENG

Solenoid on side B 1 3 5 7 9 17 29 31 No. Designation Description 1 3 5 7 1 1 5 7 Bit No.

VN-OMJ0001

4042 Rc1 1/2 4850 Rc2 4850 ( ( ( ( 5, 6, 7 5, 6, 7 5, 6, 7 5, 6, 7 ) ) ) ) G1/2 M3 0.50.6 Nm 1) 2) 3) 30 1 1) 2)1 1 0.1MPa M3 0.5 0.6 Nm 0.50.6N A-A () 5 VN*-OMJ0001-B VNB VNB VNB VNB Series Series Series Series 1 DC AC VT307 12(P1) 12(P1) 12(P1) 12(P1) 10(P2) 10(P2) 10(P2) 10(P2) 12(P1)10(P2) 2 4 4 VNB0 VNB02 VNB03 VNB1 12 () (P1) (P2) () 10 ()12(P1) 10(P2) 2 VNB01V VNB02V

CM2x-OM0230Q

AF AR 4 - 1) 5 2) 3) 5 4) 1 ISO VG-32 2-2. 1) 2) 3) 4) 5) 6 7) 5 - 8 9) , 10) 11) 3 1) P10 [2-6.] 2) 3) 4) 5) 6) 7) (40) 6 - 2-3. 1) 1 P10 [2-6.] fR Ft N () mm 1. (MPa)=(MPa)+{(kg) 2)} X /(mm ,, 2) 3) 4) 7 - 5) 6) 7) 8) 9) 24. 1) 2) 3) 8 - 1) 2) 1.52 2 2. 2-5. ,AS 9 - 2-6. P7.1. 1.

RS2H-OM0045P

AF ,AR , , , ,1 ISO VG32. 5 , 5 8 - 3-2. 1 B 1 3 3-3. 3-4. 9 - () 3-5. ,, (-)90 , 5.2 Nm A 10 - 3-6. ,,, RS2H5079Nm RS2H63801214Nm -5 3-7. M4 M41.5Nm -6 11 - 4. A GR-S-010(10g) -7 5. -8-9 -8 -9 12 - , 3 6. 6-1. 1) 2) 3) 4) 5) 6) 7) 8) 9) 10) 11) 12) 13 - / 6-2.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

M3 ,M5 ,U10/32 R NPT Nil ASN N AQ Model 4 6 8 10 12 5/32"1/4" 5/16"3/8" 1/2" Applicable tubing O.D. (mm) Effective area (mm 2) IN OUT OUT EXH.

AN

to 60C 5 to 60C It can operate in temperatures between 10 to 60C if there is no risk of the moisture in the air freezing.

A

24 28 2 43 48 36 112 100 76 3/8 50.5 27.5 68.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 85.5 16 70.5 3.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 87.5 20.5 M6 x 1 Depth 6 32 42 3 57 52 47 127 98 115 1/2 62.5 37 80.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 97.5 6 82.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 99.5 10.5 06 10 M6 x 1 Depth 7.5

VP3145/3165/3185

(Refer to the figure below.) 4) Remove the cable gland (5) and plain washer (6) and rubber seal (7) . 2. Wiring 1) Pass them through the cable (8) in the order of cable ground (5), washer (6), rubber seal (7), and then insert into the housing (4). 2) Dimensions of the cable (8) are the figure as below.

VHS20/30/40/50

VR VH VHS Construction VHS20/30 VHS40/40-06/50 6 8 7 2 2 5 5 1 4 IN OUT OUT IN 1 9 3 EXH. EXH. Component Parts No.

I

Vottago 1..t 00vAc 5%oHz ? 200VAC 5%oHz C-110V4C5%oHz tl 220VAC 6%oHr 5 24VDC 612VDC 9'OtherB ' Spcial ordr How To Order Pilot Valve sF4 50 _ _Non_tccking push type BSlotted locking type CKnob locking type t'100V C'%oHz t _ 2ou,,h$.oaoHz 3-t10vAcr%oHz a22O,D.C'%otta 5 2itVDC Gt2v0c I -Olher!

Parallel Type Air Gripper Series MHZ

port) 4-M2 x 0.4 (attachment mounting thread) 0 -0.05 2.6 4 2.5 5 4.3 12.1 For single action, the port on one side is a breathing hole. 6 Series MHZA2-6 Parallel Type/Compact Series Finger Options Side Tapped Mounting [1] 4-M2 x 0.4 Attachment mounting thread 2 2 5 2.5 Specifications and dimensions other than the above are the same as the basic type.

Low Maintenance Filter Series FN1

Contact P/A regarding the valves 3 to 5.

Multistage Ejector (N)ZL Series

) Refer to pages 5 and 6 for vacuum pressure gauge and digital vacuum pressure switch specifications.

Compact Cylinder with Air Cushion Series RQ

When tightening the auto switch mounting screw, use a watchmakers screw driver with a handle about 5 to 6mm in diameter. Tighten with a torque of 0.10 to 0.20Nm.

Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM

N.C. 3 2 1 11 11 IN port 3 x M6 x 1,1/4-28UNF OUT port (LVM13R,14R) 6 Plug (2) 5 11 6 2 (COM) port (LVM115) Plug (LVM16R) 10 1 (N.C) port 3 (N.O) port 13 For LVM115 2 x M3 Thread length 5 The broken lines indicate the bracket type. For direct mounting 6