bar)]C [dm3/(s?bar)]VQ100010.50.721.0Up to ?50
less to 75 or less, Ambient and fluid temperature: metal seal -10 to 50and#176;C; rubber seal -5 to 50and#176;C, TIE ROD, VQC5000, VALVE, VV5Q51/55 NO SIZE RATING, .32407 lb
A unique guide ring on the piston rod eliminates lateral motion of the poppet, increasing seal life and reducing particle formation.Orifice diameters: ø4, ø8, ø10, ø16, ø22, Flow characteristics: 0.35 to 8 Cv, Operating pressure: 0.3 to 0.5 MPa, Fluid temperature: 0 to 100° C, Ambient temperature: 0 to 60° C, Tubing O.D.: Metric size – 6, 10, 12, 19, 25; Inch size – 1/4", 3/8", 1/2", 3/4
A unique guide ring on the piston rod eliminates lateral motion of the poppet, increasing seal life and reducing particle formation.Orifice diameters: ø4, ø8, ø10, ø16, ø22, Flow characteristics: 0.35 to 8 Cv, Operating pressure: 0.3 to 0.5 MPa, Fluid temperature: 0 to 100° C, Ambient temperature: 0 to 60° C, Tubing O.D.: Metric size – 6, 10, 12, 19, 25; Inch size – 1/4", 3/8", 1/2", 3/
A unique guide ring on the piston rod eliminates lateral motion of the poppet, increasing seal life and reducing particle formation.Orifice diameters: ø4, ø8, ø10, ø16, ø22, Flow characteristics: 0.35 to 8 Cv, Operating pressure: 0.3 to 0.5 MPa, Fluid temperature: 0 to 100° C, Ambient temperature: 0 to 60° C, Tubing O.D.: Metric size – 6, 10, 12, 19, 25; Inch size – 1/4", 3/8", 1/2", 3/4
less to 75 or less, Ambient & fluid temperature: metal seal -10 to 50°C; rubber seal -5 to 50°C, VQ VALVE, 4/5 PORT SOLENOID VALVE, J55, 0.59 lb
less to 75 or less, Ambient & fluid temperature: metal seal -10 to 50°C; rubber seal -5 to 50°C, VQ VALVE, 4/5 PORT SOLENOID VALVE, J55, 0.59 lb
less to 75 or less, Ambient & fluid temperature: metal seal -10 to 50°C; rubber seal -5 to 50°C, VQ VALVE, 4/5 PORT SOLENOID VALVE, J55, 0.67 lb
less to 75 or less, Ambient & fluid temperature: metal seal -10 to 50°C; rubber seal -5 to 50°C, VQ VALVE, 4/5 PORT SOLENOID VALVE, J55, 0.59 lb
less to 75 or less, Ambient & fluid temperature: metal seal -10 to 50°C; rubber seal -5 to 50°C, VQ VALVE, 4/5 PORT SOLENOID VALVE, J55, 0.67 lb
less to 75 or less, Ambient & fluid temperature: metal seal -10 to 50°C; rubber seal -5 to 50°C, VQ VALVE, 4/5 PORT SOLENOID VALVE, J55, 0.67 lb
(swivel elbow -5 to 150°C), Applicable tube material: FEP, PFA, modified PTFE, nylon, soft nylon, polyolefin, polyurethane, soft polyurethane, hard polyurethane, soft polyolefin, antistatic soft nylon, antistatic polyurethane, Grease-free, FITTING, SWIVEL ELBOW, INSERT FITTING, STAINLESS STEEL, 909, 25 lb
(C) Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG3Compressed air0.3 to 0.85 5 to 55 5 to 55 20312560.7252525?
10%3019Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)170UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)
air pressure (MPa)Inlet air temperature (C) Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG10Compressed air0.3 to 0.85 5 to 55 5 to 55 20125100250.72525251
less to 75 or less, Ambient & fluid temperature: metal seal -10 to 50°C; rubber seal -5 to 50°C, 5 port solenoid valve, 4/5 PORT SOLENOID VALVE, J55, 0.59 lb
less to 75 or less, Ambient & fluid temperature: metal seal -10 to 50°C; rubber seal -5 to 50°C, VQ VALVE, 4/5 PORT SOLENOID VALVE, 1.24000 lb
less to 75 or less, Ambient & fluid temperature: metal seal -10 to 50°C; rubber seal -5 to 50°C, VQ VALVE, 4/5 PORT SOLENOID VALVE, 1.22000 lb
less to 75 or less, Ambient & fluid temperature: metal seal -10 to 50°C; rubber seal -5 to 50°C, VQ VALVE, 4/5 PORT SOLENOID VALVE, 1.24000 lb
less to 75 or less, Ambient & fluid temperature: metal seal -10 to 50°C; rubber seal -5 to 50°C, VQ VALVE, 4/5 PORT SOLENOID VALVE, 1.24000 lb