Outlines of Product 7 2.1 Features 7 2.2 How to Order 8 2.3 Product configuration 9 2.4 Start up procedure 10 (1) Checking the contents of the package 10 (2) Mounting the controller 10 (3) Controller Setting 10 (4) PLC set up 10 (5) Wiring and Connection 10 (6) Supply of power 11 (7) Setting parameters 11 (8) Setup of the operation parameters 12 (9) Test run 12 3.
of auto switches CG1 Nil S 3 n 2 pcs. 1 pc. 3 pcs. n pcs.
37 37 32 40 50 63 80 100 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 13 14 15.5 16.5 19 19 47 51 58 58 72 72 4 4 5 5 5 5 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 6 6 7 7 10 10 M10 x 1.25 26.5 26.5 31 31 37.5 37.5 1/8 1/4 1/4 3/8 3/8 1/2 84 84 94 94 114 114 4 4 5 9 135 139 156 156 190 190 46 52 65 75 95 114 22 30 35 35 40 40 9 6.5 Up to 500 Up
switch (3-wire, 2-wire) RE A B +1 0 Stroke tolerance mm Note) Refer to page 10-20-1 for auto switch specifications.
switch (3-wire, 2-wire) RE A B +1 0 Stroke tolerance mm Note) Refer to page 10-20-1 for auto switch specifications.
3 DIN (SY ) 3 7/8 (5 ) EX600-ED2EX600-ED3No. 1 / 2 3 DIN DIN 4 FE 5 () -27No.EX-OMS0026CN (1)EX600-ED21 24 V() 2 0 V() 3 24 V() 4 0 V() 5 FE (2)EX600-ED31 0 V() 2 0 V() 3 FE 4 24 V() 5 24 V() 2 SI IP67 -28No.EX-OMS0026CN EX600-ED2EX600-ED3M12(5 ) 7/8 (5 ) ( DC24 V 10 Class22 A DC24 V 108 A ( DC24 V +10/-5 Class22 A DC24 V +10/-58 A 1 IP67() -1050 -2060 3585RH() AC500 V1
. 2-2 2-2-4 . 2-3 2-2-5 . 2-3 2-3 . 2-5 3 / 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 () . 4-1 1 4-2-2 . 4-1 4-2-3 . 4-2 5 5-1 . 5-1 6 6-1 . 6-1 6-2 GWP . 6-2 6-3 . 6-3 6-4 . 6-4 6-5 . 6-4 7 C 7-1 . 7-1 7-2 . 7-1 8 K 8-1 . 8-1 8-2 . 8-1 9 L 9-1 . 9-1 9-2 . 9-1 9-3 . 9-2 9-4 . 9-2 10 M 10-1 . 10-1 10
I.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFH04-01 KFH04-02 KFH06-01 KFH06-02 KFH06-03 KFH08U-01 KFH08U-02 KFH08U-03 KFH08N-01 KFH08N-02 KFH08N-03 KFH10U-02 KFH10U-03 KFH10U-04 KFH10N-02 KFH10N-03 KFH10N-04 KFH12U-02 KFH12U-03 KFH12U-04 KFH12N-02 KFH12N-03 KFH12N-04 10 10 15.5 1.5 1.6 13 23 14 25 36 16 25 37 16 24 36 32 40 65 31 39 64
4H9 depth 6 (one each on three sides) 4-M3 x 0.5 (attachment mounting screw ) M5 x 0.8 Finger closing port 0 -0.1 8 0 -0.7 14.9 closed 4 7 4-M5 x 0.8 depth 8 (two on opposite side) 18.8 15 Max. 7.3 42 22.5 M5 x 0.8 Finger opening port 3-R2 3 29 15 16 10 22 8 31 18 51.5 6 40 78 Angle adjustment bolt 2-5.5 through 2-9.5 depth of counter bore 3 3-R2 11 2 10 +0.03 0 3-4H9 long groove depth 4
Metric size Inch size 1 2 3 4 5 6 7 8 9 M 1 station Elbow Straight Elbow OUT side IN side Straight 6 Elbow Straight Elbow OUT side IN side Straight 2 stations Symbol Symbol Note) 3 stations 8 10 6 8 10 4 6 4 6 1/4 5/16 3/8 1/4 5/16 3/8 5/32 1/4 5/32 1/4 4 stations 07 08 09 10 11 12 19 20 21 22 23 24 26 27 28 29 30 31 33 34 35 36 37 38 57 58 59 60 61 62 69 70 71 72 73 74 76 77 78 79 80
Metric size Inch size 1 2 3 4 5 6 7 8 9 M 1 station Elbow Straight Elbow OUT side IN side Straight 6 Elbow Straight Elbow OUT side IN side Straight 2 stations Symbol Symbol Note) 3 stations 8 10 6 8 10 4 6 4 6 1/4 5/16 3/8 1/4 5/16 3/8 5/32 1/4 5/32 1/4 4 stations 07 08 09 10 11 12 19 20 21 22 23 24 26 27 28 29 30 31 33 34 35 36 37 38 57 58 59 60 61 62 69 70 71 72 73 74 76 77 78 79 80
2-M2 x 0.4 depth 3 For magnet mounting 4.7 2.5 6-M3 x 0.5 depth 4 15 15 L (mm) N MXP10-10 MXP10-20 SMXP10#1 (#1 + #3) SMXP10#2 (#2 + #4) L K J V H S Z G M W Model 20 20 52.4 44 32 10 60 8 21 6.5 40 MXP10-10 36 36 82.4 74 50 20 90 20 39 7.5 65 MXP10-20 9 Precision Air Slide Table Series MXP Dimensions MXP10/With Shock Absorber Z 3 2-M3 x 0.5 depth 5 V K 5 N M Stroke: S Max. 19 MXP10-10B
10 4 3 5 12 "O" ring NBR 13 Piston seal NBR Replaceable parts list (Seal kit) Bore size (mm) Part no.
Y59A Y69A 3 wire (NPN) IC circuit 5V, 12V P.9 Y7P Y7PV IC circuit 3 wire (PNP) Y59B Y69B 12V 2 wire Relay, PLC Solid state switch 24V Y7NW Y7NWV 3 wire (NPN) Grommet Diagnostic indication (2 color indicator) Yes 5V , 12V IC circuit Y7PW Y7PWV P.10 3 wire (PNP) Y7BW Y7BWV 12V 2 wire Lead wire length symbols: 0.5m .
Note) Use M5 female thread when piping onto a panel. 14-11-10 10 Pressure Gauge Guide Pressure Gauge for Clean Series (10-series) O.D: 44 G49 Installation of a filter on the breathing hole (filtration 3 m) enables an unit to curb particle generation from the pressure gauge inside. Standard Specifications G49 Back side thread R Air 3% F.S.
position Types R, U Types S, Z Maximum 50 12 or less 12 or less 15 or less 2 position single 2 position single/double 10 5 5 Max. operating frequency Hz 10 or less 10 or less 13 or less 2 position double 3 position 3 3 3 15 or less 16 or less 20 or less 3 position Non-locking push type, Slotted locking type, Knob locking type SY5000 Manual override Response time ms (at 0.5MPa) Main valve/
alarm -9-2 Table 9-3 Alarm code list -9-2 Table 9-4 Troubleshooting -9-4 Table 10-1 Signal and style of connectors -10-1 Table 10-2 Power Supply Cable -10-2 Abbreviations Abbreviation (The order of ABC) Meaning AC Alternating Current AT Auto Tuning Chap.
-3No.EX-OMN0029CN-D / 1 1.5 *3) *3)1 1 -4No.EX-OMN0029CN-D () () () () -5No.EX-OMN0029CN-D / () * UL UL1310 Class2 0V -6No.EX-OMN0029CN-D * IP67 / *() SI SI () ()SI SI * IP67 M12(M8) ( ) () -7No.EX-OMN0029CN-D CE * (20 ) PLC PLC * -8No.EX-OMN0029CN-D SI 1 SI 32 10 (SI ) U SI D SI ON/OFF PNP NPN PNP NPN PNP NPN EX600 D -9No.EX-OMN0029CN-D AD 16 10 16 10 DIN
SMC Thermo-chiller Variations HECR HEC Series Temperature stability [C] Set temperature range [C] Cooling capacity [kW] Environment International standards 1.2 1.8 2.4 3 5 6 9 10 15 20 25 28 HEB HED HRSE Basic type 2.0 10 to 30 V V V Indoor use (Only 230 VAC type) HEA IDH HRS Standard type 0.1 5 to 40 V V V V V V Indoor use (Only 60 Hz) HRS090 Standard type 0.5 5 to 35 V Indoor use (400 V