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D-F9WV D-F8 Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E 18.5 31 6.5 20.5 41 8.5 20.5 33 4.5 17 20.5 31 4.5 15 20.5 41 4.5 15 20.5 51 4.5 35 22.5 43 6.5 27 22.5 33 6.5 17 22.5 43 6.5 27 22.5 53 6.5 37 MIW12-12D MIW20-20D 6 4 4 2 18.5 29 6.5 20.5 31 8.5 MIS12-10D MIS20-10D 4 2 6 4 2.5 4 18.5 39 6.5 20.5 41 8.5 MIS12-20D MIS20-20D 6 4

industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: (1 ) JIS B 8433-1993: 2) 1. 2. 3. 1. 2. 3. 4. 4/12 FGX-OM-L009-B 1 1.5 3) 3)1 1 () 5/12 FGX-OM-L009-B FGESL Series FGESL O (P) 0.02MPa () FGE S L A:179mm FGE S V V (P11) L B:419mm FGE S L C:669mm V (V )V 50mm O .

(Part1:General requirements) ISO 10218-1992:Manipulating industrial robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1:-((1 :) JIS B 8433-1993: 2) : : : 1 2. 3. 1. 2. 3. 4.

2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil R Metal seal Double FJG Rubber seal 1 (P) 5 (R1) 3 (R2) Rated coil voltage (A) 4 (B) 2 Option 3 4 24VDC FIG 12VDC Nil None 1 (P) 5 (R1) 3 (R2) Voltage other

2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil R Metal seal Double FJG Rubber seal 1 (P) 5 (R1) 3 (R2) Rated coil voltage (A) 4 (B) 2 Option 3 4 24VDC FIG 12VDC Nil None 1 (P) 5 (R1) 3 (R2) Voltage other

2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil R Metal seal Double FJG Rubber seal 1 (P) 5 (R1) 3 (R2) Rated coil voltage (A) 4 (B) 2 Option 3 4 24VDC FIG 12VDC Nil None 1 (P) 5 (R1) 3 (R2) Voltage other

-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Rc 1/8 Pilot air port size RHC MK(2) Oil port size Rc RS Q G Throttle valve locking screw RS H A RZQ Oil port size Converter side Oil port size Cylinder side 2-S Wall mounting screw Unit port U1, U2 MI W S CEP1 CE1 CE2 (mm) Model Oil port size Rc A B CA CL GB GL KA KB KL L QA M NB NL QB QL R T GA 18

B Released SET Work 1 Work 2 Work n Atmosphere Max. A: Maximum pressure value when workpiece is adsorbed. A B 4 ON = A A B 4 SET OFF = B + Min. B: Minimum pressure value when workpiece is not adsorbed. OUT1 auto preset For adsorption verification: In this mode, repeat the adsorption and release of the workpiece for a few times. The optimum values will be set automatically.

/4 A OFF B+(A-B)/4 B -23No.PS-OMH0005CN-D CH1CH4 5R.D. 2 FSt FSt FSt (5R.D.)

Secure either Body (A) or Body (B) and push out Vane Shaft , then separate Body (A) from Body (B). Remove Vane Shaft , Stoppers and . [How To Assemble] Mount O-ring and Vane Shaft to Body (B) . Mount Stopper Packing to Stopper . Mount Stoppers and to Body (B) . (Note: Be careful of stopper position) Insert Body (A) into Vane Shaft .

Port size (A, B port) Body type 01 02 1 8 1 4 For 60, 61 type manifold 6 R port of VFA370 is 1/4. For 70, 71 type manifold 7 How to Order Manifold Base Use the same manifold bases as the VF3000. VV5FA3 Specify the same manifold part number as VV5F3.

(B),2 (C),(B)(A), () (B)(C) (A) BLEED (B) (C) OUT SUP SUP. 1 1 M Pa/ m ( B) m 2 N / m m m M Pa M Pa/ m m M Pa B m /N (A) ) ( N N m / N ( C) m 2 N ( A) m 2 N -5- 3. 1 SUP OUT 2 %F.S 3 4 R B(P36202028) G 2 3 Rc,F N IR2000G43-2-01 G43-P2-N01-X30 IR2010G43-4-01 G43-P4-N01-X30 IR2020G43-10-01 G43-P10-N01-X30 021/44 Rc NNPT FG 00.0050.2MPa 1: 0.010.4MPa 20.010.8MPa

) The IN air passes the check valve to pressure boosting chambers A and B.

Length per roll (m) Tubing material Symbol T Material Nylon Symbol TI Material Nylon Symbol 20 20 m (Standard) Length Metric size Inch size TS Soft nylon TU Polyurethane TIS Soft nylon TIU Polyurethane Color Symbol B Color Black Symbol B Color Black Nylon Soft nylon Inch size Tubing size W White BU Blue W White Metric size Size Size R Red Symbol Symbol 0425 O.D. 4 6 8 8 10 10 A05 Size O.D

[ ]: Value of the D-M9A ( ): Value of the D-A90/A93 D-M9V D-M9WV D-M9AV D-A9V A 20 (22) W B ( ): Value of the D-M9AV/A9V (mm) D-A9, D-A9V D-M9W, D-M9 D-M9WV, D-M9V A 16.5 15.0 22.0 30.0 D-M9A A 16.5 15.0 22.0 30.0 D-M9AV A 16.5 15.0 22.0 30.0 Bore size (mm) 6 10 16 20 B 2.5 7.5 8.0 10.5 B 2.5 7.5 8.0 10.5 W 5.5 0 0 2.5 W 7.5 2.0 2.0 0.5 B 2.5 7.5 8.0 10.5 B 2.5 7.5 8.0 10.5 A 16.5 15.0 22.0

Refer to front matters 58 and 59 for Safety Instructions and pages 3 to 7 for 3/4/5 Port Solenoid Valve Precautions. 3 position pressure center Operating pressure (MPa) SYA SYJA Flow Characteristics/Mass VZA Flow characteristics 14/2(PA/B) 4/25/3(A/BEA/EB) Function Port size Pilot port size Mass (kg) b Cv b Cv Valve model VFA 2 position single 2 position single 2 position double 3 position