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No.VEX-OMV0001 / / VEX1 -2, 3 / -4 -5 -5 -5 -5 -5, 6 -6 -6 -79 -1012 1 VEX-OMV0001 1) 2) (ISO/IEC) (JIS) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218-1992: Manipulating industrial

Please keep this manual handy for future reference. 2 RD+ Receive Data + 1 3 3 TDTransmit Data Bit No. 6 4 6 4 2 0 0 0 RDReceive Data 4 0 2 4 6 8 16 28 30 Output No. Solenoid on side A 2 Side D BUS IN: M12 4-pin socket D-coded (SPEEDCON) (SI unit side) 1 Output No. Solenoid on side B 1 3 5 7 9 17 29 31 No. Designation Description 1 3 5 7 1 1 5 7 Bit No.

Internal construction with auto switch Model Auto switch unit part number MDSUA1, 3 MDSUA7, 20 P211070-1 MDSUA 1 P211090-1 MDSUA 3 P211060-1 MDSUA 7 Auto switches are not included with switch units.

R Q2 B P C F(h9) D G1 G2 J K L M N Q1 E(g6) Q3 Model A 90 180 270 M5 M3 CRB1BW10-lS CRB1BW10-lSE CRB1BW15-lS CRB1BW15-lSE CRB1BW20-lS CRB1BW20-lSE CRB1BW30-lS CRB1BW30-lSE 3.4 (5.5) 5 8.5 5 11 9 14 10 15.5 25 9.5 25 10 25 13 25 14 M3 (6) 0 0.036 15 24 8 0.004 0.012 9 14 3 1 5 9 0.5 29 4 M3 M3 (5) M5 M3 3.4 (6) M3 (10) 0.004 0.012 0 0.043 20 29 9 12 18 5 4 1.5 6 10 0.5 34 M3 M4 (7.5) 4.5

Metric size Inch size Type Elbow Universal 2 3 1 8" 5 32" 23 01 3.2 4 6 8 10 12 04 06 08 10 12 03 05 07 09 11 13 3 16" 1 4" 5 16" Control type Meter-out Meter-in 0 1 3 8" 1 2" Use 1/8" tube.

4 1/4 1/4 168 183 204 12 16 16 6 6 6 9.5 12.5 15 42 42 52 16 16 16 4 5 5 12 15 15 M6 x 1.0 M8 x 1.25 M8 x 1.25 10 14 14 to 1000 to 1000 to 1000 208 228 254 39 42 52 9 Non-rotating Double Power Cylinder Series MGZ Dimensions with Mounting Brackets Transaxial foot type (L) 4-LD through LT LH LY X/2 ZZ + Stroke LS + Stroke X X Y LZ LX (mm) Stroke range Bore size (mm) LS ZZ X LD Y LH LT LX LY

SMC Corporation R&D Center Product Development Division-6 Address: 4-2-2, KINUNODAI,TSUKUBAMIRAI-CITY , IBARAKI-KEN 300-2493, JAPAN Phone:+81-297-52-6 Fax:+81-297-20-5007 E-mail:kaihatsu_6_g3@smcjpn.co.jp Notice: The content of this manual can be revised without a previous notice. ii INR-244-831 Contents Contents 1 PREPARATION FOR COMMUNICATION -1-1 2 OPTIONS OF COMMUNICATION METHOD -2-1

/O.D. mm Part no. 5/8 6/9 6.5/10 5/8 6/9 6.5/10 8/12 8.5/12.5 5/8 6/9 6.5/10 5/8 6/9 6.5/10 8/12 8.5/12.5 KK3P-50N -60N -65N KK4P-50N -60N -65N -80N -85N KKH3S-50N -60N -65N KKH4S-50N -60N -65N -80N -85N 1/8 1/8 1/4 1/4 Use Series KK plug with Series KKH socket, as there is no plug available in Series KKH.

No.VFS4000-OMY0001 / / VFS4000 . 1,2 1 . 3,4 2 1) . 5 2) . 6 3 . 7 4 . 7 5 1) DIN . 8 2) . 9 3) . 912 6 . 12 7 . 12 8 . 13 9 . 13 10 . 13 11 . 14 . 15 . 16 No.VFS4000-OMY0001 (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical

flow, Vacuum (4W) L: Plug lead L plug connector, With lead wire and light and surge suppressor V U W (1) (1) Note 1) Power saver type LO: Plug lead L plug connector, Without lead wire and light and surge suppressor Rated voltage M: Plug lead M plug connector, With lead wire and light and surge suppressor 5 6 24V DC 12V DC Note) Consult SMC for other voltages.

D L2 L3 L4 L5 L6 L7 L8 P d h T L1 Model Model ASS10 ASS100 ASS110 2 10 5 20 9 5 20 52 14 4 17 50 XT14-82-3-1 1 8 ASS30 ASS300 ASS310 3.2 12 6 30 12 6 26 73 23 5 16.5 63 XT14-105-5-1 1 4 3 8 , ASS500 ASS500 2.3 14 7 35 13 6 38 99 27 6 30.5 90 XT14-89-2-1 1 2 3 4 , ASS600 ASS600 3.2 14 7 65 14 6 46 116 31 6 26 112 XT14-85-2-1 3 4 1 , AS Meter-in Control Type Meter-out Control Type ASP Mounting

8 T1: NPTF 1/8 01: R 1/8 T1: NPTF 1/8 IF Data 16-6-13

Model g (oz) ZFA100 50 (1.75) 1/8 140 (4.94) High flow rate square type ZFA200 200 (7) 1/4 190 (6.71) ZFB10 10 to 20 (0.35 to 0.7) 4, 6, 3/16", 1/4" 22 (0.78) ZFB20 30 to 50 (1.05 to 1.75) 6, 8, 1/4" 30 (1.06) Universal type ZFB30 75 (2.63) 10, 3/8" 40 (1.41) ZFB401 100 (3.5) 1/2" 62 (2.19) ZFA100 Specifications Air, Nitrogen Fluid Negative pressure Operating pressure 0.5MPa (72.5psi) Withstand

6 5 N I K ZZ Z NN NA Stroke range 40 32 25 20 26.5 22 20 20 51 42.5 34.5 30 236 181 159 146 146 7 200 to 1000 150 to 1000 150 to 700 150 to 700 M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 M32 x 2 M26 x 1.5 M26 x 1.5 M20 x 1.5 1/4 1/8 1/8 1/8 8 8 8 46.5 37.5 33.5 5.5 5.5 5 208 195 10 56.2 867

Fieldbus interface connector layout 6 BUS OUT: M12 4-pin socket D-coded Bit: 7 0 Byte 0 Offset Byte 1 Offset 1 EX260 Series for EtherNet/IPTM No.

Description Material Note 1 Body PBT Caution 1. Quality of supply air 2 Diffuser PBT Type S: White, Type L: Black 3 Cap POM Use clean compressed air as fluid. (Air quality class 2 : 4 : 3, 2 : 5 : 3, or 2 : 6 : 3 as specified in ISO 8573-1: 2010 is recommended.)

4 byte (Default setting) 6 : : OFF OFF OFF ON ON ON 1 2 3 4 5 6 7 8 7 8 1 byte 2 byte 3 byte : : ON End plate bracket (EX600-ZMA2) OFF OFF OFF ON ON ON : : Remote Control mode *2 DHCP mode *1 192.168.1.254 192.168.0.254 192.168.1.1 192.168.0.1 IP address Diagnostic size set for the input : : 5 6 byte 4 byte 0 byte EtherNet/IPTM status Refer to the SMC website (URL http://www.smcworld.com

FGF-BT02 4 Element Polyester Element 4 Polyester 1 AL-26S AL-26S V-band 5 FGF-BA01 Stainless steel NBR Legs assembly (with bolt, nut, flat washer) AL-27S 1 AL-27S FGF-OP01 FGF-OP01 (Set) FGF1 6 1 Carbon steel O-ring 11 1 AL-23S AL-23S FGFS1 FGFL1 1 1 NBR FKM FGF-KT01 FGF-KT02 FGF-KT01 FGF-KT02 FKM O-ring 7 1 AL-24S AL-24S FGF-KT03 FGF-KT03 (Set) Polypropylene/ NBR FGFS1 1 Holder assembly

FGF-BT02 4 Element Polyester Element 4 Polyester 1 AL-26S AL-26S V-band 5 FGF-BA01 Stainless steel NBR Legs assembly (with bolt, nut, flat washer) AL-27S 1 AL-27S FGF-OP01 FGF-OP01 (Set) FGF1 6 1 Carbon steel O-ring 11 1 AL-23S AL-23S FGFS1 FGFL1 1 1 NBR FKM FGF-KT01 FGF-KT02 FGF-KT01 FGF-KT02 FKM O-ring 7 1 AL-24S AL-24S FGF-KT03 FGF-KT03 (Set) Polypropylene/ NBR FGFS1 1 Holder assembly

F-4300-2 F-4300-5 F-4300-15 F-4300-30 F-4300-60 F-4300-100 .2 .5 .5 .5 .5 1 2 5 15 30 60 100 30 30 45 60 120 120 .1 .2 .4 .6 1.5 2.0 .2 .35 .6 1.0 2.5 3.5 3A 4A 4A 4A 4A 4A Wetted materials For special deadband or current requirements, contact factory See Appendix A F-4300BARBED FITTING SPECIAL OPTIONS RANGE (PSI) MOUNTING STYLE B80 = NYLON 1/16" ID B85 = NYLON 1/8" ID P80 = POLYSULFONE 1