ZP3

w w q q q 7 Nut Structural steel (Trivalent chromated) M6 x 0.75 M8 x 0.75 8 Bushing 9 Fitting 161 A Basic/Compact Type Specific Product Precautions Be sure to read this before handling the products.

Aluminum High Vacuum Angle Valve

x 10-9 Nil A B C None w, e w e Seal material XSA 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) XVD Note 1) Values at normal temperature, excluding gas permeation.

Table of Contents

1 Drain q r e w t i u y o !0 !

Modular Design with Uniform Body Style

OUT q (Port size) OUT q (Port size) Port size IN OUT OUT q e OUT w 1/8 Port size IN OUT OUT q e OUT w e Standard Specifications Fluid Air Ambient and fluid temperatures 5 to 60C (No freezing) Proof pressure 1.5 MPa Max. operating pressure 1.0 MPa Dimensions Body type: Standard Body type: Front and back port selectable 2 x P1 2 x P2 2 x P1 2 x P2 B B Center of F.R.L. body C Center of F.R.L

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

0.8 1/8 M5 x 0.8 1/8 P, R port Port size M5 x 0.8 C4 (One-touch fitting for 4) M3 x 0.5 A port M3 x 0.5 Flow characteristics Flow characteristics Effective area (mm 2) Port size 12(PA) 23(AR) Manifold C [dm3/(sbar)] 1 (P), 3 (R) port 2 (A) port b Cv C [dm3/(sbar)] b Cv Body ported for internal pilot 0.9 10-SYJ32M M3 x 0.5 M5 x 0.8 Type 10-SS3YJ3-20 Type 10-SS3YJ341 S41 M3 x 0.5 M5 x 0.8 1.5

LJ1H

Particle concentration (Particles/ft3) 10 10 Speed: 500mm/s 10 Speed: 1000mm/s 200 150 100 50 25 Vacuuming flow (l/min ANR) Test environment: Nippon Airtek: VS-1603L W x L x H = 620mm x 1550mm x 730mm Fed-st class 10 Approx. 0.3m/s Grease Application Areas Test equipment: Laser particle counter Hitachi Electric Engineering

VFS

VVFS3000-5-1A VVFS3000-5-2 VVFS3000-7-1 VVFS3000-8 19.8 x 16.6 x 1.6 (End plate) 20 x 16 x 2 (Manifold block) 6.2 x 3 x 1.6 VVFS3000-6A VVFS3000-4AAZ738-22AAXT336-9 No. q w e r t y u i Material Steel plate Steel plate NBR NBR NBR NBR NBR For increasing the manifold bases, please order the manifold block assembly number of the principal part assembly !0.

C85

(mm) 4 4 6 6 8 10 Piston rod thread M4 x 0.7 M4 x 0.7 M6 x 1 M6 x 1 M8 x 1.25 M10 x 1.25 Space-saving Port size M 5 x 0.8 M 5 x 0.8 M 5 x 0.8 M 5 x 0.8 G 1/8 G 1/8 Mounting accuracy and rigidity made possible by means of faucet joint and direct mounting.

0.4

Load factor: ((Load mass x 9.8)/Theoretical force) x 100% Conditions Series Conditions CJ2 series CM2 series MB, CA2 series Tube bore x Length T0604 (O.D. 6/I.D. 4) x 1 m VQ1101 Speed controller AS3002F-06 Silencer AN15-C08 Tube bore x Length T0806 (O.D. 8/I.D. 6) x 1 m VQ2101 Speed controller AS3002F-08 Silencer AN20-C10 370 I N D E X P. 366 P. 368 P. 370 P. 372 P. 376 P. 380 Features Variations

Air Cylinder

N L Axial foot: CBM2L Bore size Stroke 4 x LD 2 x LC LH B CJ1 X Y Z Y X LT CJP ZZ + Stroke LS + Stroke LZ LX Rod flange: CBM2F Bore size Stroke * -H -R -W CJ2 N L Head flange: CBM2G Bore size Stroke -H -R -W N L JCM 4 x FD Mounting hole 2 x FD C2 CM2 CM2 Mounting hole FY CM3 B FX FZ FT Z + Stroke CG1 FT Z 20 to 32 40 CG3 Single clevis: CBM2C Bore size Stroke -H -R -W N L CD JMB MB MB1

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Bore size (mm) MM TC W NA P S TA ZZ WA WH 30 30 25 20 20 20 20 20 147 157 159 187 218 218 264 264 16 16 16 16 18 18 22 22 23 25 28.5 33 40.5 47.5 60.5 71 M8 x 1.25 M10 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 24 29 35.5 44 55 69 80 100 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 3/8 Rc 1/2 77 77 79 87 102 102 122 122 11 11 11 12 13 13 M5 x 0.8 M6 x 0.75

Tie-rod Type Hydraulic Cylinder

2 M12 x 1.75 139 38 6.5 118 19 27 34 14 118 90 35.5 16 13 35 35 80 32 27 14 231 90 125 34 80 M14 x 2 M27 x 2 170 38 6.5 140 19 27 34 16 140 112 35.5 16 15 35 35 100 32 27 16 247 112 160 43 100 M16 x 2 M33 x 2 197 42 9 174 22 28 38 18 174 140 45 18 17 40 38 110 36 36 18 275 140 (mm) Without rod boot With rod boot Bore size (mm) P R X Y S T V W H ZZ e f h ZZ l 40 7.5 8 1/4 37 27 8 66 207 55

33

Q = m x C x (T0 Tt) it = r x V x C x iT it = 1 x 20 x 4.2 x 103 x 12 900 = 1120 [J/s] 1120 [W] Q = m x C x (T0 Tt) it x 860 = c x V x 60 x C x iT it x 860 Cooling capacity = Considering a safety factor of 20%, 1120 [W] x 1.2 = 1344 [W] = 1 x 20 x 60 x 1.0 x 103 x 12 Thermo-chiller Q x t: Heat capacity [kJ] 15 x 860 1120 [W] 20C Water bath Cooling capacity = Considering a safety factor

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

-SYJ333 M5 x 0.8 M3 x 0.5 0.9 Type 10-SS5YJ3-32-M5 0.25 0.25 0.25 0.24 0.32 0.32 0.33 0.32 0.20 0.21 0.20 0.22 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 0.19 0.18 0.26 0.21 0.25 0.28 0.29 0.27 0.25 0.27 0.25 0.34 0.060 0.059 0.060 0.057 0.081 0.079 0.082 0.079 0.048 0.050 0.048 0.057 0.32 0.30 0.29 0.27 0.33 0.35 0.34 0.34 0.10 0.21 0.19 0.10 0.25 0.27 0.15

Thermo-chiller

37.6 [Height 1585 x Width 1185 x Depth 955] HRS150-A -20 481 [218] HRS100-W -20 410 [186] Height 58.5 x Width 36.4 x Depth 37.6 [Height 1485 x Width 925 x Depth 955] HRS150-W -20 417 [189] HRS100-A -20-A 509 [231] Height 67.3 x Width 46.7 x Depth 37.6 [Height 1710 x Width 1185 x Depth 955] HRS150-A -20-A 522 [237] HRS100-W -20-A 452 [205] Height 63.4 x Width 36.4 x Depth 37.6 [Height 1610

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

50l x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 125l x 150l M10 x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 130l x 155l M10 x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 140l x 165l M5 x 30l x 35l x 40l x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 110l x 135l M5 x 35l x 40l x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l x 115l x 140l M6 x 45l x 50l x 55l x 60l

Thermo-chiller

2 x 4 !3 w Parts List (170) No.

•

Entry Vertical ~ _~ Connection Male thread Female thread Vacuum ~2~8 Ms x O.8,M6 x l M4 X O.7,MS X O.8 entry Thread 11O ~16 MS X O.8,M6 x l M5 X O.8,M6 x l ,Ys dia. 120-~32 M6 X l ,M8 x l MsxO.8,M6x I ,M8 x l .2S,Y, -140'1S0 M6 X l ,M8 x l M6 Xl,M8 x 1.25, Va Mounting Use connection for vacuum entry NBR(Black!

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300