Series 11-CRA1-Z Rack & Pinion Type Rotary Actuator Size: 30, 50

Suction Flow Rate of Vacuum Suction Type (Reference values) Specifications Size Fluid 30 50 Size Suction flow rate L/min (ANR) 30 50 1 5 Air (Non-lube) Maximum operating pressure Minimum operating pressure Ambient and fluid temperature Cushion 0 to 60C 0.1 MPa 1 MPa With air cushion Without air cushion With air cushion Without air cushion, With air cushion 0.05 0.98 35 0.2 to 2 s/90 Rc1/8

Series MHR2 11- 2 Finger Rotary Actuated Air Gripper 22- Size: 10, 15, 20, 30

MDHR2-10E port location 112233.4 B 32 36 120 120 D A 32 +0.02 2 x 3 0 depth 6 9.5 Finger closing port Finger opening port M3 x 0.5 M3 x 0.5 25 25 Finger closing port M3 x 0.5 M3 x 0.5 (A, B common view) Finger opening port M3 x 0.5 thread depth 4 4 x M3 x 0.5 thread depth 6 (A, B common view) Vacuum suction port 31 Auto switch mounting groove 2 x 4.2 0 9h9-0.036 4.7 1 9.6 2-3 4.7 3 10 19 (35

Information

40 25 28 35 40 100 100 4 4 5 5 4 4 5 5 12 16 20 25 12 16 20 25 45.5 49 54 57.5 39.5 40.5 52 57.5 CQ2 80 90 10 5 5 8 CQ-C012 CQ-C016 CQ-C020 CQ-C025 100 100 CQS 80 90 10 The double clevis pin and retaining ring are not included.

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

) HA 6 Note 2) (Max EB) Note 3) 5 9 2.4 25 (Max EA) 1.4 32 5.5 (mm) Size EA EB HA 6.6 CRJU05 CRJU1 5.6 33.8 6.5 3.1 5.6 35.8 7.5 (mm) Size Rotating angle 90 A BA BB BC BD BE BF BG BH BI CA CB D DD J JA JB JC JD H N Q S SD UU W 21.5 32.4 43 CRJB05 19.5 30 9.5 11 6.5 3.5 17.1 20 7 5.5 5g6 10h9 M4 x 0.7 5.8 3.5 M4 x 0.7 5 14.5 12.5 13.5 3.4 28 4.5 180 27 43.4 54 90 24 37.4 48 CRJB 1 23.5 35

VK300

Grommet: G DIN terminal: D 2 x 4.5 (Mounting hole) Manual override (Non-locking) Applicable cable O.D: 3.5 to 7 68.8 Max.10 78.4 70.9 (A port) n1 x Rc 1/8 300 Pg7 4 x Rc 1/8 (P, R port) (Lead wire length) 2 x 4.5 4 x Rc1/8 8 (P, R port) (Mounting hole) 2A 2A 2A 34 2.3 20 7 (Pitch) 7 44.5 (Station 1) (Station n) 4 x M3 x 0.5 depth 6 (Bracket mounting screw) L Dimension n L n: Stations 1 35

Process Valve

H (Conduit terminal: T) I (DIN terminal: D) Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U Model VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 63 144.5 55 125.5 52 42 26 29 4.5 14 24.3 72.5 2.3 80.5 25 75 34 80 84.5 124 135.5 151.5 137 153 156 172 60.5 73 1 80 90 62 72 50 60 31 36 35 40 5.5 6.5 17.5 20 28.3 33.3 84 100 2.3 2.3 92 108 30 35 84 90 43 49 89 95 93.5 99.5 Port

Coolant Valve

size: 10A, 15A, 20A, 25A K L Pg9 N P Applicable cable O.D. 6 to 8 F (Air operated) J (External pilot solenoid) Pilot port 12(P1) 2 x (Back side 10(P2)) 4 x M 8 1 Light/surge voltage suppressor (For DZ) Manual override (Non-locking push type) P1 D S Q E Bracket 15 H A R B C Main port 1(A) [Back side 2(B)] Port size: refer to table below A 63 63 80 90 B 42 42 50 60 K L 52 52 62 72 C 29 29 35

Steam Valve

44 17.5 22 85 101 93 109 5 6 62 72 31 36 5.5 6.5 28.3 33.3 2.3 2.3 30 35 43 49 61.5 74 637 A VND Series Port size: 32A, 40A, 50A H (Valve open) Indicator (Option) Pilot port 12(P1), 10(P2) Port size: refer to table below P1 P2 F G E A 32 B D J Main port 1(A) (Back side 2(B)) C A B Port size: refer to table below Main port 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H J Model VND50D

Plug-in Unit

AB1-X1 MJ1 DeviceNet PROFIBUS-DP Remote I/O (RIO) CC-LINK Number of input/ output branches 4 branches (16 inputs/16 outputs per branch) 8 core heavy duty cable Branch cable 5 m or less (total extension 10 m or less) Branch cable length M12 connector (8 pins, socket) Communication connector M12 connector (5 pins, plug) Power connector Ambient operating temperature/humidity +5 to +45C at 35%

High Vacuum Angle Valve

A XLAV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLAV-16-2 41 18.5 8.5 2.7 3 XLAV-25-2 45.5 22.5 8.5 2.7 3 XLAV-40-2 54.5 35 8.5 2.7 3 XLAV-50-2 61 39.5 8.5 2.7 3 XLAV-63-2 80.5 44 12 4 2 XLAV-80-2 90.5 60 12 4 2 6 Aluminum High Vacuum Angle Valve Double Acting, Bellows Seal RoHS XLC Series How to Order q w e r t y u XLC 2 M9N 16

Large blow and

.: P Without bracket Air pressure supply (P) port Thread size: Q R J K Note 1) 4 x Sa Thread depth Sb 2 x L O H I N G A M Vacuum flow Dust bag When dust bag is mounted T F E D Suction air Discharge air Suction air U C C B Hose band V (mm) A 73 B 34 C 19 D 10 E 13.2 F 16.2 G 69.8 H 31 I J 35 K 27 L 4.5 M 35 N 18 O P 13 Q Rc1/8 R 28 Sa M3 x 0.5 Sb 5 T 300 U 150 V 190 Model ZH10--X185 ZH20--

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

VHS400-02 VHS401-02 VHS400-03 VHS401-03 VHS400-04 VHS401-04 VHS500-06 VHS501-06 Pipipng direction Port size 3 4 1 2 3 8 1 4 1(P) 2(A) 21 105 76 54 35 35 57 93 Effective area (mm2) Mass (kg) 2(A) 3(R) 0.25 0.34 The front face of the handle is the reference position. Easy to Operate The direction of air flow can be verified at a glance by the orientation of the handle.

NCA1

: M14 x 1.5 piston rod diameter) 28 : 3/4-16 61 : M3 x 0.5 89 : M20 x 1.5 01 : 2-56 29 : 7/8-9 62 : M4 x 0.5 90 : M12 x 1.25 02 : 2-64 30 : 7/8-14 63 : M4 x 0.7 91 : M42 x 1.5 03 : 4-40 31 : 1-8 64 : M5 x 0.5 92 : M24 x 3.0 04 : 4-48 32 : 1-12 65 : M5 x 0.8 93 : M30 x 3.5 05 : 5-40 33 : 1 1/8-7 66 : M6 x 0.75 94 : M36 x 4.0 06 : 5-44 34 : 1 1/8-12 67 : M6 x 1.0 95 : M16 x 1.25 07 : 6-32 35

AMH

M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G S 6.0 , 2 1 H 463.5 I 180 J 30 K 15 L 24 N 120 O 184 P 220 Q 110 R 18 460.5 AMH850 1 2 13 42 348 220 57.5 220 10 Please refer to Made to Order Specifications of Series AMH on pages 14-20-55 to 14-20-57. 14-20-35

Air Cooled Aftercooler Series HAA 1

Model A B C A B C A B C A B C 500 1000 1500 1000 2200 3000 2000 3300 4000 4000 5700 7000 34.5 38 40 33 36.5 38 34 36 37 34 35 36 35 40 44 35.5 40 42 37 40 41.5 38 40 42 35.5 42.5 47.5 36 42.5 44 38.5 42.5 45 39 43 45 HAA7 HAA15 HAA22 Maintenance HAA37 Caution 1. Inspect the cooler at least once a week and clean it to prevent it from becoming obstructed. 2.

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

) HA 6 Note 2) (Max EB) Note 3) 5 9 2.4 25 (Max EA) 1.4 32 5.5 (mm) Size EA EB HA 6.6 CRJU05 CRJU1 5.6 33.8 6.5 3.1 5.6 35.8 7.5 (mm) Size Rotating angle 90 A BA BB BC BD BE BF BG BH BI CA CB D DD J JA JB JC JD H N Q S SD UU W 21.5 32.4 43 CRJB05 19.5 30 9.5 11 6.5 3.5 17.1 20 7 5.5 5g6 10h9 M4 x 0.7 5.8 3.5 M4 x 0.7 5 14.5 12.5 13.5 3.4 28 4.5 180 27 43.4 54 90 24 37.4 48 CRJB 1 23.5 35

REC

symbol and figure REC MPa REC25 30 Load weight M (kg) 25 32 40 20 RSH REC20 20 Front flange: F Rear flange: G 39 50 56 61 0.3 Foot: L L CE1 10 30 38 43 47 0.5 W W W CE2 F 5 24 31 36 39 0.7 11 17 19 21 0.3 ML2B 7 11 13 13 G 0.5 ML1C 1 10 50 100 200 300400 Max. speed u (mm/s) (Initial cushioning speed) 4 7 9 9 0.7 500 REA Front trunnion: U Rear trunnion: T 32 42 48 52 0.3 Clevis: C, D C 22 30 35

High Power Cylinder:

WH NN I MM H1 NE D LY ND NB 4-LD LH LT NF E 10 E JD N 10 JC N NA X Y X Y S+Stroke LX LZ LS+Stroke ZZ+Stroke (mm) Bore (mm) 20 25 32 40 Stroke range (mm) 200 to 700 200 to 700 200 to 1000 200 to 1000 I 26 31 38 47 F 16 16 19 21 A 18 22 22 24 E 14.5 18 18 20.5 D 10 12 12 16 GB 47.5 49.5 51.5 51.5 GA 53.5 56.5 55 56 Eff. thread length 15.5 19.5 19.5 21 JC 43 39 36 32 H1 5 6 6 8 LH 25 28 30 35

RSH/RS1H

limit position CD T R Stroke H B 2-P D QA FT A GA Rear pressure port Front pressure port QB 2-Plug WB GB E W (Width across corners I) (mm) Width across corners I 85 103 132 GA 16 24 24 H 128 144.5 171.5 FT 20 25 25 FX 73 90 110 FZ 93 114 138 A 221 243.5 299.5 CD 20 20 25 CT 8 10 10 CZ 36 45 45 D 32 40 50 E 64 77 98 L 45 54 56 N 9 11 13 O QB 7 8.5 10 B 93 99 128 QA 10 12.5 12.5 GB 16 24 35

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

188 225 272 70 80 100 14 14.5 17.5 Rc1/4 Rc3/8 Rc3/8 9 8 8 14 17.5 20 124 156 188 148 198 236 39 41 51 52 52 72 63 80 100 50 54 47 38 42 35 128 128 148 28 28 48 110 140 166 142 180 210 28 25.5 32.5 88 92 85 (mm) Bore size (mm) X XA XB XC XL YY YL Z 24 28 11 63 80 100 8 10 10 6 7 7 5 6 6 80 100 124 4 5 5 20 24 28 M10 X 1.5 M12 X 1.75 M14 X 2.0 (mm) MGTM (Slide bearing) MGTL (Ball bushing