New

W U U X X U1 U1 X1 X1 z300 Q F D D z300 Q F 2 x 3.4 Mounting hole 2 x 3.4 Mounting hole R C C R E 1.2 1.2 1.2 1.2 E B1 B1 2 x P Port size 2 x P Port size B B DIN terminal Conduit terminal Y Y W W U U X X U1 U1 X1 X1 Cable 6 to 12 F Q 2 x 3.4 Mounting hole 2 x 3.4 Mounting hole D D S G1/2 Qp2 F 34 (44) 31.5 25 T C R R G1/2 E E Sp2 B1 2 x P Port size 2 x P Port size B1 B B (mm) Mounting bracket

Free Mount Cylinder

-www.stevenengineering.com 4-T counterbore W + Stroke S + Stroke Z + 2 x Stroke 16 to 32 2-M5 x 0.8 (32: Rc 1/8) Rod end nut 2-P through Auto switch Width across flats L 2-P through Width across flats L A' 4-T counterbore S + Stroke W + Stroke Z + 2 x Stroke Rod End Nut/Accessory Material: Carbon steel Part no.

SY

1.94) 6 x 1m 6 x 1m 8 x 1m AS3001F-08 (Cv = 0.56) 8 x 1m AS3001F-08 (Cv = 0.56) AS3001F-06 (Cv = 0.36) AS3001F-06 (Cv = 0.36) AN101-01 (Cv = 1.11) AN110-01 (Cv = 1.94) 10 x 1m AS4001F-10 (Cv = 0.89) 10 x 1m AS3001F-08 (Cv = 0.56) 12 x 1m AS4001F-10 (Cv = 1.17) 6 x 1m 6 x 1m AS3001F-06 (Cv = 0.36) AS3001F-06 (Cv = 0.36) AN200-02 (Cv = 1.94) AN110-01 (Cv = 1.94) 10 x 1m AS4001F-10 (Cv = 0.89

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

5 6 6 6 6 No. 1 2 2 2 2 2 2 3 3 3 3 4 4 4 4 5 5 5 5 6 6 6 6 Class Applicable tubing size (mm) 4 x 3 3 x 2 6 x 4 4 x 3 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 12 x 10 10 x 8 19 x 16 12 x 10 19 x 16 12 x 10 25 x 22 19 x 16 25 x 22 19 x 16 Tubing O.D.

LEC-OM07605CN

PA_ _ ]) [] PA01 **STY _ _ _ x 0h _ _ x _ 0: (0) 0h _ x _ _ 0h x _ _ _ MR-J4(W)-B [AL.3E ]8 0: J3 (LECSS-) 1: J4 (LECSS2-T) 1h 5 12 5. [] PA02 **REG [AL.37] _ _ x x 00: 00h 100W 200W750W 02:LEC-MR-RB-032 03:LEC-MR-RB-12 _ x _ _ 0h x _ _ _ 0h 5 13 5. [] PA03 *ABS _ _ _ x 0: () 1:() 0h _ _ x _ 0h _ x _ _ 0h x _ _ _ 0h PA04 *AOP1 A-1 _ _ _ x 0h _ _ x _ 0h _ x _ _ 0(EM2EM1) 1(

energy saving effect

HRZ x V x C x iT it m x C x (T0 Tt) it Q = = HRZD 1 x 300 x 4.186 x 103 x 12 900 = = 16744 [J/s] 16.7 [kW] m x C x (T0 Tt) it x 860 x V x 60 x C x iT it x 860 HRW Q = = Cooling capacity = Considering a safety factor of 20%, 16.7 [kW] x 1.2 = HECR 1 x 300 x 60 x 1.0 x 103 x 12 15 x 860 20 [kW] = HEC Thermo-chiller Q x t: Heat capacity [kJ] 16744 [W] = 16.7 [kW] Water bath 20C HEB Cooling

CQS

CQSKB125D 10D 15D 20D 25D 30D M3 X 30 l X 35 l X 40 l X 45 l X 50 l X 55 l M3 X 30 l X 35 l X 40 l X 45 l X 50 l X 55 l M5 X 30 l X 35 l X 40 l X 45 l X 50 l X 55 l X 60 l X 65 l X 70 l X 75 l M5 X 35 l X 40 l X 45 l X 50 l X 55 l X 60 l X 65 l X 70 l X 75 l X 80 l M3 X 25 l X 30 l X 35 l X 40 l X 45 l X 50 l M3 X 25 l X 30 l X 35 l X 40 l X 45 l X 50 l M5 X 25 l X 30 l X 35 l X 40 l X 45

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

8 1(IN), 2(OUT) port 17.5 17.5 2 x M5 x 6.5 15 15 2 x M5 x 6.5 CS: Conduit DS: DIN terminal DZ: DIN terminal with light Applicable cable 6 to 12 18 67 36 55.3 G1/2 48.9 500 18 36 NPT1/2 63 17.5 63 17.5 42.1 40.6 IN IN 8 8 28 30 30 28 2 x Rc, NPT1/8 1(IN), 2(OUT) port 2 x Rc, NPT1/8 1(IN), 2(OUT) port 2 x M5 x 6.5 15 2 x M5 x 6.5 15 15 Direct Operated 2-Port Solenoid Valve JSX Series Dimensions

MHZ

Flat Type Fingers [3] D4-MM thread depth L (Thread for mounting attachment) 20K J A A D G B D B K J F C S W O (mm) Model Open Closed Weight (g) F G MM L J K C D B A W MHZ2-63 (1) 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 +1.2 0.8 2H9 2.5H9 3H9 4H9 5H9 6H9 +0.2 0 26 55 115 235 420 4.45 5.8 7.45 8.9 14.8 17.7 M2 x 0.4 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 3 5 6 8

MHZ

D4-MM thread depth L (Thread for mounting attachment) 20K K J J B A A D G D B F C S W O (mm) Model A B C D F G Open Closed Double acting Single acting J K L Weight (g) MM W MHZL2-103 MHZL2-163 MHZL2-203 MHZL2-253 +2.2 0 2H9 2.5H9 3H9 4H9 0 0.2 0 0.2 0 0.2 0 0.2 +0.025 0 5 8 10 12 0 0.05 0 0.05 0 0.05 0 0.05 70 145 290 505 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 5 6 8 10 60 135 270 460 7 9

HRS100/150

HRZ x V x C x iT it m x C x (T0 Tt) it Q = = HRZD 1 x 150 x 4.186 x 103 x 10 900 = = 6977 [J/s] 7.0 [kW] m x C x (T0 Tt) it x 860 x V x 60 x C x iT it x 860 HRW Q = = Cooling capacity = Considering a safety factor of 20%, 7.0 [kW] x 1.2 = HECR 1 x 150 x 60 x 1.0 x 103 x 10 15 x 860 8.4 [kW] = HEC Q x t: Heat capacity [kJ] Thermo-chiller 6977 [W] = 7.0 [kW] Water bath HEB Cooling capacity

High Vacuum Angle Valve

1010 (FKM) 1.3 x 1011 (FKM) A w, e, r 1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

VFR

Material Steel Part no. q Description Connection fitting B Connection fitting A VVFS3000-5-2 VVFS3000-5-1A Steel NBR w e Gasket r NBR Gasket VVFS3000-7-1 VVFS3000-8 19.8 x 16.6 x 1.6 (for end plate) 20 x 16 x 2 (for manifold block) 6.2 x 3 x 1.6 VVFS3000-6A y NBR O-ring t NBR O-ring u NBR O-ring i Terminal assembly VVFS3000-4AStations AZ738-22AStations For 01T For 01SU Junction cover assembly

Slider Type/Ball Bushing Bearing

D 1.6 x P 0.1 x Wcos + Wsin D 5.0 x P 0.1 x W + W D 5.0 x P W W > Wv P > Pv Determination of allowable load mass & pressure Inclined operation (For vertical operation, refer to page 1515.)

SYJ3000/5000/7000

Load factor: ( (Load weight x 9.8)/Theoretical force) x 100% Conditions Series CJ2 Series CM2 6 x 1 m AS3301F-06 8 x 1 m AS3301F-08 AN110-01 Series MB/CA2 Series CJ2 Series CM2 4 x 1 m Series MB/CA2 Body ported Tubing bore x Length Speed controller Silencer Base mounted Tubing bore x Length Speed controller Silencer AS2301F-04 6 x 1 m 4 x 1 m AS1301F-04 AN120-M5 SYJ5120-M5 SYJ5140-01 AN101

Modular F.R.L. Unit

Nil A B C D q w e q w q w w q e q w The number inside indicates the combination order counted from the inlet side.

Auto Switch Guide

2.5 Auto switch Hexagon socket head cap screw (M3 x 16 l) RZQ Switch mounting screw Round head Phillips screw with spring washer M3 x 0.5 x 16 l MI W S 1.

SYJ300/500/700

P, R port thread type S 20 20 stations A A X port (External pilot type) M5 x 0.8 A port size Nil Rc X P R A port M5 x 0.8, C4 R port M5 M5 x 0.8 + + + + F G 1/8 C4 4 One-touch fitting A A P port X P R N NPT P port 1/8 N3 5/32" One-touch fitting 1/8 T NPTF X port (External pilot type) M5 x 0.8 R port A port M5 x 0.8, C4 Note) For more than 8 stations, supply/exhaust air to/from both sides

Best Pneumatics Vol. 14

1 Drain q r e w t i u y o !0 !

10

Cushion valve G 2 x Rc P W V Port G E Width across flats KA TX D E B C H1 AL MM MB MA N 2 x 4 x J N TY B C Width across flats B1 A H K F TT ZZ + Stroke S + Stroke With rod boot d e 10.2 10.2 f h l [mm] Bore size [mm] A AL B B1 C D E F G H H1 J K KA MA MB MM N P S TT TX TY V W ZZ 32 22 19.5 46 17 32.5 12 30 13 13 47 6 M6 x 1 6 10 16 4 M10 x 1.25 27 1/8 84 17 48 49 4 6.5 135 40 30 27 52 22