48

Metric size*1 Inch size*1 Type 02 2*3 23 3.2*2 04 4 06 6 01 1/8" 03 5/32" 2 Elbow Control type*1 0 Meter-out 1 Meter-in *1 Metric size: Light gray Inch size: Orange *1 Meter-out and meter-in types can be visually identified by the color of the knob. Meter-out: Gray Meter-in: Light blue *2 Use 1/8" tubing. *3 Only polyurethane tubing is applicable for 2.

One-touch Fittings

Symbol Size Tubing connection 001 Same diameter tubing Symbol Model Oval type Round type H Male connector v v S Hexagon socket head male connector v v F Female connector v v L Male elbow v v LU Branch male elbow v V Universal male elbow v v W Extended male elbow v v T Male branch tee v v Y Male run tee v v D Male delta union v v U Branch Y v UD Double branch Y v M5 M5 x 0.8 01 R1/8, Rc1/8 02

AR20-B to AR60-B

Example) AR30K-03BE-1NR-B w e V q Body size 20 25 30 40 50 60 Symbol Description V w With backflow function Nil Without backflow function K Note 1) With backflow function + V e Pipe thread type Nil Rc N NPT F G + 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 V r Port size + a Mounting Nil Without mounting option B Note 3) With bracket H With set nut (for panel mount) + Nil Without pressure

Series GS40 Digital Pressure Sensor 1

Model GS40-M5 GS40-01 GS40-02 AV Air/Inert gas Fluid AU 3% F.S.

Thermo-con/Rack Mount Type

Tap Water (as a Circulating Fluid) Quality Standards The Japan Refrigeration and Air Conditioning Industry Association JRA GL-02-1994 Cooling water system Circulating type Make-up water Influence Item Unit Standard value Corrosion Scale generation pH (at 25C) 6.0 to 8.0 p p Electric conductivity (25C) [S/cm] 100*1 to 300*1 p p Chloride ion (Cl) [mg/L] 50 or less p Sulfuric acid ion (SO42

Peltier-type Chiller Thermo-con/ Compact Type

Tap Water (as a Circulating Fluid) Quality Standards The Japan Refrigeration and Air Conditioning Industry Association JRA GL-02-1994 Cooling water system Circulating type Make-up water Influence Item Unit Standard value Corrosion Scale generation pH (at 25C) 6.0 to 8.0 p p Electric conductivity (25C) [S/cm] 100*1 to 300*1 p p Chloride ion (Cl) [mg/L] 50 or less p Sulfuric acid ion (SO42

Series 10-, 21- AF-A Air Filter

q Body size 20 30 40 50 60 Symbol Description w Pipe thread type Nil Metric thread (M5) Rc N Note 1) NPT F Note 2) G + 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + e Port size a Mounting Nil Without mounting option B Note 3) With bracket + Option r Nil Polycarbonate bowl 2 Metal bowl 6 Nylon bowl 8 Metal bowl with level gauge C With bowl guard Note 6) Note 6) Note 6) Note 6) b Bowl 6C

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order. q Symbol Description Body size 20 30 40 50 60 25 Nil K Note 1) Without backflow function With backflow function With backflow function w + Nil N F Thread type e Rc NPT G + 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 Port size r + Nil B Note 3) H Note 2) a Without mounting option With bracket

Series 10-V100 Rubber seal 3 port direct operated solenoid valve

Indicate part numbers of valve and option beneath the manifold part no. 643 A Manifold specifications 10-V100 Common SUP / Common EXH S41 type How to Order Applicable solenoid valve Note) VV100 S41 05 10 M5 10-V11410-V114A10-V12410-V124AApplicable blanking plate assembly V100-77-1A Stations 2 stations 2 port size M5 M5 x 0.8 Clean series 02 2 1 20 20 stations 3 2 Port 1 M5 x 0.8 Port 3

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

3.8 10.9 3.5 5.5 9.1 2 x mounting hole 33.5 28.5 37 38 1(P) 1(P) 5.5 12 4-M5 x 0.8 13 L plug connector (L) (P, A, B, R port) 49 50.5 M plug connector (M) 598 4 Port Direct Operated Poppet Solenoid Valve 10-VQD1000 Manifold Specifications How to Order [Option] 10 V V 4 Q D 1 5 CE-compliant Nil None Q CE-compliant Clean series Manifold type 2 Body ported 5 Base mounted Valve stations 02

Series 10-, 21- AW-B Filter Regulator

Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order. q Symbol Description Body size 20 40 60 30 Nil K Note 1) Without backflow function With backflow function With backflow function w + Nil N Note 2) F Note 3) Thread type Rc NPT G e + 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 Port size r + Nil B Note 5) H Note 4) a Without mounting option

Auto Drain Valve Longer life & Higher resistance to foreign matter

Example) AD402-N04D-2VZ-A Thread type Semi-standard specifications Symbol Type Nil Rc F G N NPT Symbol Description 3 Bowl Nil Polycarbonate bowl 2 Metal bowl 6 Nylon bowl Semi-standard Valve Nil None4 Port size V With bleed valve Symbol Port size 02 1/4 03 3/8 04 1/2 Nil Name plate and caution plate for bowl in SI units Pressure unit Z5 Name plate and caution plate for bowl in imperial units

Series AP3100

type: 20.7 MPa and 9 MPa Designed for bulk specialty gas (BSGS) delivery LOTO standard with AP3157, optional AP3125 How to Order (Inlet) (Outlet) AP31 00 2PW MV8 MV8 S Model Ports Code Maximum operating pressure Knob Cv 0.7 1.3 1.0 1.0 1.0 Option (AP3150 only) Ports 2 ports Code 3000 psig (20.7 MPa) 1) 1300 psig (9.0 MPa) 3000 psig (20.7 MPa) 1) 1300 psig (9.0 MPa) 1300 psig (9.0 MPa) 00 02

Series AP3500

Ultra High Purity Series AP3000 Suitable for UHP gas supply line Body material: 316L SS secondary remelt Pneumatically actuated normally closed High pressure type: Max. 3000 psig (20.7 MPa) LOTO option available as an option Indicator switch available as an option How to Order (Inlet) (Outlet) AP30 00 2PW FV4 FV4 S Model Option Code Cv 0.23 0.28 Code Specification Indicator switch 3) 00 02

Compact Manifold Regulator

IN Fitting Type Inch size Metric size ARP Common supply block (S) Common supply block with pressure switch (P) Fitting type Fitting type Straight 6 8 10 8 6 10 Elbow Straight 1/4 5/16 3/8 5/16 1/4 3/8 Elbow Symbol Symbol IR-A 01 02 03 13 14 15 51 52 53 63 64 65 5 56 56 5 IR 0.4 0.2 0.6 0.5 SMC 20 MPa 24 20 17 24 56 IRV 0.3 0.1 VEX 32.5 SRH 4.

Compact manifold regulator ARM5 Series

IN Fitting Type 15 IR-A Inch size Metric size Straight IN side IN side Symbol Symbol IR Elbow Elbow Straight 1/4 5/16 5/16 1/4 6 8 8 6 IRV 51 52 63 64 01 02 13 14 VEX SRH 3. Tie-rod for Centralized Supply Block Note) SRP Symbol Description Without tie-rod Nil T O-ring SRF With tie-rod Note) The O-ring is attached to the manifold connection. Note) For details, refer to page 705.

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Example) 10-ARP30K-03BE-1RY Clean room compliant, copperfree, fluorine-free, silicon-free Clean room compliant Copper-free, fluorine-free Symbol 20 30 40 Body size Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without

Speed Controller with

Metric Size Applicable tubing 23 04 06 08 10 12 3.2 4 6 8 10 12 AS1002Fm TMH-23J TMH-04J TMH-06J AS2002Fm AS2052Fm TMH-06 TMH-08 AS3002Fm TMH-07 TMH-10 TMH-12 AS4002Fm TMH-13 Tubing size Applicable model The applicable TMH for the AS1002Fm-02 is not available.

Body Size: 30, Thread: Rc, Port Size: 02 (1/4), Mounting: B (w/Bracket), Float Type Auto Drain: D (N.O.

Body Size: 40, Back Flow: w/o Backflow, Thread: N (NPT), Port Size: 02 (1/4), Mounting Option: B (With Bracket), Float Type Auto Drain Option: C (N.C.