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Valve manifold Accessories Side D NOTE (SI unit side) Replacement of the SI unit Remove the M3 hexagon screws from the SI unit and release the SI unit from the valve manifold. Replace the SI unit.

Refer to 4.3.2 Setting and checking,5.3.2 Setting and checking. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers.

Refer to 4.3.2 Setting and checking,5.3.2 Setting and checking. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig 3.3-2 RS-232C connector connection 3.3 Connected explanation HRSH Series 3-2 HRX-OM-R028 Chapter 4 MODBUS communication function Chapter 4 MODBUS communication function MODBUS protocol is a communication protocol developed by Modicon.

Table 3-6 RTU mode message frame a) Start b) Device Address c) Function d) Data e) Checksum (CRC) f) End T1-T2-T3-T4 XX XX XX XX XX XX T1-T2-T3-T4 a) Start In Modbus RTU mode, message frames are separated by a silent interval (non-communication time).

AL4 at 1 sec. and Cooling Output is 100 70%, the output will be 0.7 sec. ON and 0.3 sec.

D-M9-5 () D-M9N-5 D-M9P-5 3 NPN PNP IC PLC DC51224V(4.528V) 10mA DC28V 40mA 10mA 0.8V (40mA 2V ) DC24V 100A ON CE RoHS D-M9-5 M2.54L 16 - 5. 5-1. 1. () 2. 3. 4. 1. 5-2. 1. 2. 3. 4. Nm JMHZ2-16D M3x0.5 0.59 17 - MOTOMAN-HC10 M6x12 6.3Nm 18 - M6x23 6.3 Nm M4x10 1.0Nm 19 - M8 M8 M8-MOLEX S1 S2 M4x8 1.0Nm 20 - (M4x6) (M4x6) 1.0Nm P175-2.

Envi ronm ent Low er t han 5 D o not use under f ol l ow i ng envi ronm ent . D o not use under f ol l ow i ng condi t i ons. W ARN I N G /H I N TS O N CO RRECT U SE Vi brat i on, I m pact Envi ronm ent H i gher t han /M ERI TS 60

4 1 4 VND50D-32F VND60D-40F VND70D-50F 130 150 180 211.5 227 251 135 140 155 135 147 163.5 20 24 24 100 105 120 36 42 54 12 12 14 17-4-41 6 Series VND Precautions Be sure to read before handling.

D-R Note 3) Options for 2, 6, and 8 can not be specified at the same time. (Ex.) 68 Note 4) Symbols 9, D, J can not be specified at the same time. (Ex.) 9-D-J Note 5) For products with auto drain, either symbol D or J cannot be specified at the same time. 1 Indicate the required filtration rate after the symbol 1. Ex.)

TQ1230001-OM102-B ModelZPG(B25,B30)J-7A-X2 ModelZPG16J-7A-X2 (Suction cup formMultistage bellows type 3.5-Stage) (Suction cup formMultistage bellows type 2.5-Stage) Dimensions Model A B D E F G H ZPGB25J-7A-X2 25 26 27 10.2 32.5 48 52.5 ZPGB30J-7A-X2 30 33 32 13.8 38 54.5 59 Note1) D and (st) indicate the reference value during gripping at vacuum pressure: -85[kPa]. -23No.

at 40 mA) Current leakage 100 A or less at 24 VDC Indicator LED Red LED illuminates when turned ON.

Tube deformation ratio at the minimum bending radius D L 1 Mandrel 100 2d Here, : Deformation ratio (%) d: Tubing diameter (mm) L: Measured length (mm) D: Mandrel diameter (mm) (Twice against the minimum bending radius) Test temperature: 205oC Relative humidity: 655 (%) 4 - (4) Use clean air. 2.

.=514[V] (1%F.S.40.010.04[V]) F.S. ( 25[]ON-OFF (1 k 1 M A/D 5 V A/D 5(V)1(M)/(1(k)+1(M))4.995(V)0.005V ) Ripple -8No.PS-OME0003CN-F 1 (DC+) 2 3 (DC-) 4 (IN15 V) A A PSE200/PSE300 (ZS-28-C) M() 37104-3101-000FL Tyco Electronics() 3-1473562-4 () XN2A-1430 () -9No.PS-OME0003CN-F PSE200 PSE300 15V 1 k () -10No.PS-OME0003CN-F (A/D ) () 20 2030 -11No.PS-OME0003CN-F PSE530 PSE531 PSE532

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 , , ISO 15407-1 Interface Large capacity Size 01 (EVS1-01) and Size 02 (EVS1-02) Interface conforms to ISO 15407-1 Flow rate Cylinder driving size EVS1-01 (Size: 01) EVS1-02 (Size: 02) 100 80 1000L/min (ANR) 400L/min (ANR) Accommodates enclosure IP65 Dust/Splashproof type Light weight Size 01 (3-position): 0.26kg Size 02 (3-position

A Flow Rate Type (NVEfl which controls air flow by varying current through the solenoid. fi#fr $.E#E ,q Ff i l F l E K f:-J r r l tr-t NVEF2l2c) vEF2isO a t{YEF2l4O Flow Rate (NVEF:I) B -P{ Reasure ryp (l{vEP3t d | | vEP3r20 F'---r-. .l t EBrrO Index 2. 3 Port Electro-Pneumatic Proportional Valve NVEF, NVEP Specifications P O H o w t o O r d e r . . . . . . . .

Refer to 4.3.2 Setting and checking,5.3.2 Setting and checking. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers.

J Bracket (Option) AR20(K)-B to AR40(K)-06-B 2 x P1 Panel fitting dimensions A (Port size) Y W C B Q V K OUT OUT IN IN Z Plate thickness AR20(K)-B to AR30(K)-B: Max. 3.5 AR40(K)-B : Max. 5 R F P2 S (Pressure gauge port size) Bracket (Option) U M J D T N AR50(K)-B/AR60(K)-B 2 x P1 A (Port size) B Q C K OUT IN R F P2 S (Pressure gauge port size) Bracket (Option) T N J M D U 73 Regulator Series

of needle rotations ASN Dimensions AQ (Hexagon width across flats) (Hexagon width across flats) Applicable tubing O.D. d ASV Applicable tubing O.D. d AK VCHC ASR ASQ A (2) L4 (1) Max.