MXH

Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 18 21.5 46 47 20 23 5 20 6.5 6.5 5 NS 12.5 13 11 7.5 35 + Stroke 46.5 + Stroke 11.5 20 4-M4 x 0.7 Depth 6 5 + Stroke 12 (mm) Stroke (mm) NS LT J LA LB 5 14 10 49 4 10 49 14 10 4 15 59 24 4 20 20 24 59 4 20 25 30 30 69 4 30 69 30 30 4 40 79 45 20 6 20 50 55

10-cns-e

.: GR-S-010 (10 g), GR-S-020 (20 g) Piston seal NBR 47, 50 to 52, 55 and 56 are non-replaceable parts, so they are not included in the seal kit.

Please contact us for the latest version.sales@ocaire.com VV5Q51/55 MANIFOLD. MFLD, PLUG-IN, VQ5000. VALVE. VV5Q51/55 BASE MT 1/2. 15.70184 lb. RM.

Please contact us for the latest version.sales@ocaire.com VV5Q51/55 MANIFOLD. MFLD, PLUG-IN, VQ5000. VALVE. VV5Q51/55 BASE MT 3/8. 11.50077 lb. QM.

Base mounted plug-in manifold for VQ5*0* valve, Individual terminal block connection, Maximum 12 stations available as standard, 6 port sizes available, Several options offered VV5Q51/55 MANIFOLD. MFLD, PLUG-IN, VQ5000. VALVE. VV5Q51/55 BASE MT 1/2. 13.44819 lb. RM.

Please contact us for the latest version.sales@ocaire.com VV5Q51/55 MANIFOLD. MFLD, PLUG-IN, VQ5000. VALVE. VV5Q51/55 BASE MT 1/2. 6.91245 lb. RM.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

2.4) (94) (73.5) 5H9 (+0.030 +0 ) depth 8 (Depth of counterbore 3) C-C Lock cable Cable length 400 65 Body mounting reference plane Cable length 250 4 x M6 x 1 thread depth 12.5 (Depth of counterbore 3) (8.5) (B dimension range)1 (137) (2.4) (116.5) 44 (8.5) 5H9 ( +0.030 C C 5.5 +0 ) depth 8 60 (Depth of counterbore 3) Motor cable 42 70 (122) L (62) A (Table traveling distance)2 10 62 55

Compact

Application Example Application Example Mounting direction w (to minimize the installation width) Mounting direction q (to minimize the installation height) LEF Workpiece Workpiece LEJ Guide Guide LEL Floating bracket LEMB series LEM LEM LEMB series Floating bracket Mounting Example Mounting Example LEY 55 40 55 24 Za1 Za2 1 1 1 1 1 1 1 1 LES 40 LEPY LEPS 45 80 92 112 90 Detail drawing of

240

Rated voltage [V] 24 VDC 10% Power consumption [W] Note 9) Basic 12 28 Compact 22 Model LEPY6 Electric specifications Stroke [mm] 25 50 75 Product weight [kg] Basic 0.24 0.29 0.34 Model LEPY10 Standby power consumption when operating [W] Note 10) Basic 11 22 Compact 16 Stroke [mm] 25 50 75 Product weight [kg] Basic 0.47 0.55 0.65 Max. instantaneous power consumption [W] Note 11) Basic 22 55

Digital Gap Checker

Lead wire color Description 1 Brown DC (+) 30.8 2 White N.C. 3 Blue DC () 4 Black OUT1 15 ISA-19-m (Centralized lead wire) 19 6 5 4 30.8 MADE IN JAPAN 3 2 1 15 23.5 33 70 108 43.5 146 5000 55 184 10 222 Unit: mm 260 10 Stations Part no. L L 2 ISA-19-2 139 3 ISA-19-3 177 4 ISA-19-4 215 5 ISA-19-5 253 6 ISA-19-6 291 M12 connector no. Pin no.

Integrated Controller

Options Specific Product Precautions EQFS32HH/Ball Screw Drive Horizontal/Lead 24 Vertical/Lead 24 5 4.5 4 3.5 3 2.5 2 1.5 1 0.5 0 45 40 35 30 25 20 15 10 5 0 200 400 600 800 1000 1200 3000 mm/s2 3000 mm/s2 Work load: W [kg] Work load: W [kg] 5000 mm/s2 10 mm/s2 0 0 Speed: V [mm/s] 200 400 600 800 1000 1200 Speed: V [mm/s] EQFS32HA/Ball Screw Drive Horizontal/Lead 16 Vertical/Lead 16 60 55

HRL

water, Deionized water1 Set temperature range [C] CH1: 15 to 25/CH2: 20 to 40 Cooling capacity2 [kW] 9 18 19 18 26 18 Heating capacity3 [kW] 1.5 1 4.5 1 6.5 1 Temperature stability4 [C] CH1: 0.1/CH2: 0.5 Rated flow (Outlet) [L/min] 45 (0.43 MPa) 10 (0.45 MPa) 45 (0.45 MPa) 10 (0.45 MPa) 125 (0.45 MPa) 10 (0.45 MPa) Maximum flow rate [L/min] 120 16 130 16 180 16 Maximum pump head [m] 50 49 55

Lightweight and Compact

method PID control Ambient temperature1 C 5 to 45 HRW HECR HEC Circulating fluid2 Tap water, 15% ethylene glycol aqueous solution, Deionized water Set temperature range1 C 5 to 35 Cooling capacity 50/60 Hz3 kW 9.0/10.5 Heating capacity 50/60 Hz4 kW 1.7/2.2 Temperature stability5 C 0.5 HEB Circulating fluid system HED Rated flow 50/60 Hz (Outlet)6 L/min 29/45 Maximum flow rate 50/60 Hz L/min 55

energy saving effect

temperature C 5 to 35 Automatic fluid fill port Rc1/2 (Symbol F: G1/2, Symbol N: NPT1/2) Overflow port Rc1 (Symbol F: G1, Symbol N: NPT1) Fluid contact material Metal Stainless steel, Copper (Heat exchanger brazing), Bronze, Brass Resin PTFE, PU, FKM, EPDM, PVC, NBR, POM, PE, NR Supply side pressure range MPa 0.3 to 0.5 Supply side temperature range C 5 to 40 Required flow L/min 25 30 50 55

53

Conditions DC inverter Inverter fan pump Low High Motor rotation rate (For air-cooled type) Inverter pump Power reducing effect of the inverter pump Inverter pump Current model HRSH090 35 L/min 55 L/min Inverter Power consumption (Pump only) Power consumption (Pump only) pump 0.6 kW 1.1 kW Tank Tank 55 L/min 35 L/min 35 L/min 0.3 MPa 35 L/min 0.3 MPa Users equipment Users equipment The motor

Slider Type Ball Screw Drive/11-LEFS Series

Measuring Conditions Description Laser dust monitor (Automatic particle counter by lightscattering method) Measuring instrument Minimum measurable particle diameter 0.1 m Suction flow rate 28.3 L/min (ANR) Sampling time 5 min Setting conditions Interval time 55 min Sampling air flow 141.5 L (ANR) Clean bench (ISO Class 5 equivalent) Vacuum suction from vacuum port Laser dust monitor Particle

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

supply voltage [V] 100 to 120 VAC (50/60 Hz), 200 to 230 VAC (50/60 Hz) Reference page Page 607 533 11-LEJS Series AC Servo Motor Clean Room Specication Specifications 11-LEJS40, 63 AC Servo Motor Model 11-LEJS40S2 6 11-LEJS63S3 7 Stroke [mm] Note 1) 200, 300, 400, 500, 600, 700, 800 900, 1000, 1200 300, 400, 500, 600, 700, 800, 900 1000, 1200, 1500 Work load [kg] Note 2) Horizontal 30 55

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

L 16 44 8 L (7.5) 8 2514 131 (35) (25) 5.5 47.04 SMC 55 Approx. 10 Multi-core vinyl cable 0.3 mm 2 x 25C 2 x M2.6 x 0.45 Socket side Terminal no. Rail mounting hole pitch 12.5 0 1 2 3 4 5 6 7 8 9 No.

Series 11-MXJ Air Slide Table

J I 12 Z ZZ H G 3 +0.03 0 depth 2 GA A 19 3.3 3.5 A 5.8 4 x M4 x 0.7 3 4 3 +0.05 0 depth 2.5 A-A Model G GA H I J K M Z ZZ 11-MXJ8-5 11-MXJ8-10 11-MXJ8-15 11-MXJ8-20 12 18 17 6 17 28.5 44.5 38 45 12 18 17 6 17 28.5 44.5 38 45 19 28 20 8 25 39.5 54.5 48 55 Other dimensions are the same as standard model (Series MXJ). 19 28 20 8 25 39.5 54.5 48 55 829 Air Slide Table 11-MXJ Made to Order Air

Process Gas Diaphragm Valve

Construction Diaphragm Seat Body 1112 B Diaphragm Valve for Ultra High Purity Manually operated type Series AZ3652 & 4652 inch (mm) Dimensions AZ3652 & 4652 Ports: 2PW (Welded) Ports: 2P (Machined) 1.5 (38) 1.5 (38) BAR STOCK BODY Note) FORGED BODY 0.44 (11.2) 2.17 (55) 2.17 (55) 0.44 (11.2) A A B A A Connections: MV, FV Connections: MV B A A A A Connections: TW Connections: TW 1.0 (25.4)