Clean Gas Filter

Outside diameter 1/4" = 6.35 mm Outside diameter 3/8" = 9.53 mm Filter case Nut Stainless steel tube Rear ferrule Front ferrule Regarding the TSJ fittings, after tightening the nut by hand, add another 1 1/4 to 1 1/2 turns with a wrench to seal the fitting.

ITV

Solenoid valve EXH 12 114 Rc(PT) 1/2 35.7 Exhaust port OUT 2 SUP (1) OUT (2) EXH (3) 22 8 25 Flat bracket P3020114 (optional) 2-Rc(PT) 1/4, 3/8, 1/2 m36 Port size 4-M5 X 0.8 thread depth 6mm through Mounting hole G OUT 2 30 25 22 R3.5 15 25 m36 7 (10) 30 L-bracket INI-398-0-6 (optional) 2-Rc(PT) 1/4, 3/8, 1/2 (7) 36 SUP port, OUT port 1.12-8 Series ITV2000/3000 Made to Order Specifications

C95Series

. ~ .. )1 ..._... __ I -='.1' .J.. ~ ~ _.

Angle Seat Valve /

M5, 1/8, 3.2 to 6 1, 1.6, 2.3, 3.2 N.C.

Vacuum Gripper

Vacuum gripper: 1 pc. Male elbow Plug-in reducer Different diameter straight (KQ2L04-M3G1) 1 pc. (KQ2R06-04A1) 1 pc. (KQ2H04-06A1) 1 pc. Coil tube Hexagon socket head cap (TCU0604B-1) 1 pc. screw (M6x10) 8 pcs. -6No. TQ1230001-OM105-A 2.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Applicable valve stations 1(P), 3(R) 2(A) C3 (for 3.2) C4 (for 4) C6 (for 6) M5 (M5 thread) 2 stations: 83 Addiitional station: 19 Rc(PT) 1/8 Top VQZ100 2 to 20 VQZ115 VV3QZ12-lll SY 2 stations: 68 Addiitional station: 20 C4 (for 4) C6 (for 6) M5 (M5 thread) Rc(PT) 1/8 Top VQZ200 2 to 20 SYJ VV3QZ22-lll VQZ2l2 VK C6 (for 6) C8 (for 8) C10 (for 10) Rc(PT)1/4 2 stations: 114 Addiitional station

Vacuum Saving Valve

M6 x 1 R1/8 G1/8 NPT1/8 3.4 5.9 3.1 5.1 3.2 5.5 5 6.2 8 6.9 4.5 8 6.2 8 6.9 3.4 4.5 3.1 5.1 3.2 14.7 20.1 22.6 22.5 23.3 16.6 16.2 23.5 23.4 24.2 18.1 26 25.7 27.6 26.5 20 20.7 26.6 28.5 27.4 8 12 12 13 12 8 8 12 13 12 14 14 6 18 18 23 23 7 7 19 24 20 Note) When mounting and removing the product, apply a wrench or torque wrench to the place shown in Figure.

Digital Flow Switches Series PF2A

Terminal block numbers 5 6 7 8 4 3 2 1 The applicable panel thickness is 1 to 3.2 mm.

Angle Seat Valve

M5, 1/8, 3.2 to 6 1, 1.6, 2.3, 3.2 N.C.

Booster Regulator Series VBA1110 to 4200 1

Handle operated type Air operated type VBA1110 VBA200 VBA400 Model AV Max. 2 Pressure increase ratio VBA2200-03 VBA4200-04 VBA1110-02 VBA1-02 VBA2100-03 VBA4100-04 Note) 400 60 1000 1900 1000 1900 Max. flow (l/min (ANR)) VBA1 2 to 4 AU 1/2 (IN/OUT) 1/4 (IN/OUT) Connection port size Rc 3/8 (IN/OUT) 3/8 (IN/OUT) 1/2 (IN/OUT) Fluid Compressed air 1/4 Exhaust port size Rc 3/8 1/2 1/2 3/8 VBA1110

0.01

10 6 8 4 Rc 1/4, G 1/4 NPT 1/4 Rc 1/4, G 1/4 NPT 1/4 Female thread Rc 1/4, G 1/4, NPT 1/4 Resin Case material Resin Aluminum Stainless steel Air (Nitrogen) Fluid 0.01 m (filtration efficiency: 99.99%) Note) Nominal filtration rating Initial pressure drop 0.03 MPa (at inlet pressure 0.7 MPa, maximum flow) Maximum operating pressure (at 20C) 1.0 MPa (in case of nitrogen: 0.99 MPa) 5 to

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

20 stations (1) VO317-(-Q) (3) Port location (Direction)/Port size A Exhaust port Symbol Type R P Base (Side) Base (Side) Base (Side) ( ) 1 4 3 8 1 Common (2) ( ) 1 4 3 8 1 4 Base (Side) Base (Side) Base (Side) 3 Individual 1 4 1 4 1 4 Note 1) For more than 3 stations, supply air both sides of P port.

HRS100/150

k 11 Run/stop signal input Contact input signal 1 4.7 k 3 1 k Internal circuit 10 Alarm status signal output Contact output signal 3 2 9 Remote status signal output Contact output signal 2 1 8 Operation status signal output Contact output signal 1 0 * The pin numbers and output signals can be set by user.

•

l~1 "fd" , ,01 R(PT)1IB M5 X 0.8 With One-touch fillings R{PT)1/4 Rc(PT)lIB 03 'I R(PT)318 02 Rc(PT)1/8 R(PT)1/2 Rc{PT)1/4 04 R(PT)lf4 F02 G(PF)118 f03 R(PT)3/8 G(PF)lIB F04 R(PT)112 G(PF)li4 NOI NPT1/8 lO-32UNF N02 NPTl14 NPT1/8 NPT3/8 N03 NPT1/8 NPT1/2 NPTli4 1'04 Needle Valve/Flow Rate Characteristics ASP330F ASP430F 400 6 'E o,7,08,OY; E 06 12 ~300 200 3 'E ( 0 4 % r !

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

[mm] Model L A B n C D E Without lock With lock 11-LEJS40S-200523.5 563.5 206 260 6 1 200 80 11-LEJS40S-300623.5 663.5 306 360 6 1 200 180 11-LEJS40S-400723.5 763.5 406 460 8 2 400 80 11-LEJS40S-500823.5 863.5 506 560 8 2 400 180 11-LEJS40S-600923.5 963.5 606 660 10 3 600 80 11-LEJS40S-7001023.5 1063.5 706 760 10 3 600 180 11-LEJS40S-8001123.5 1163.5 806 860 12 4 800 80 11-LEJS40S-9001223.5

ZL3-OM00801

ZL3 M 0 1 K1 5 LO Z 1 E A M G 1 ZL3 M 0 1 K1 5 LO Z 1 E A M G 1 ZL3 M 0 1 K1 5 LO Z 1 V A M W 1 1 2) 3) 4) 5) 6) 7) 8) 9) 10) 11) 12) 13) 14) 4) 2) 1) 3 300L/min(ANR) M 0.35MPa *2 P 6 600L/min(ANR) H 0.50MPa 3)P V/ *23 (V) (P) 5/ 06 Rc3/4 K1 N.C.+N.C. 8() 04 2xRc1/2 K2 N.C. *1 F06 G3/4 B1 N.0.+N.C. *1 F04 2xG1/2 B2 N.O.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

10-8 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 Note 1) Values at ambient temperatures, excluding gas permeation.

CRQ2

(mm) P = Operating pressure [MPa] T 0425 T 0604 TU 0805 T 0806 1/8B T 1075 TU 1208 T 1209 1/4B TS 1612 3/8B T 1613 1/2B 3/4B 1B 4.9 4 2.5 l = Length of piping [mm] 12.6 6 4 a = Internal cross section of piping [mm ] 19.6 8 5 QC = Air consumption required for one reciprocation of rotary actuator [l (ANR)] 28.3 8 6 33.2 6.5 44.2 10 7.5 50.3 12 8 63.6 12 9 66.5 9.2 113 12 16 127 12.7 133

Digital Flow Switch Series PFA For Air Series PFW For Water

110mA or less 100mA or less 240g (without lead wire) Weight 200g (without lead wire) Enclosure Equivalent to IP65 Port size (Rc, NPT, G) 1/8, 1/4 3/8 1/2 Note 1) The system accuracy will be adjusted to 5% F.S. or less when combined with PFA3.

Air Slide Table Series MXQ

Ma = K Mmax Work piece mounting coefficient K: Fig. 3 Allowable moment coefficient : Graph 2 Max. allowable moment Mmax: Table 4 Mar = 36 Mrmax = 36 K = 1 = 1 ' = 0.39/36 = 0.011 May = 1 x 1 x 18=18 Mymax = 18 K = 1 = 1 = 0.39/18 = 0.022 Find the load factor of the static moment.