AU

AU200/300 Effective thread depth 6.5 4-M5 x 0.8 AU200, 300 Float type auto-drain Port size H G F E D C B A Model Port size 1 4 / 3 8 AU200 / 50 70 61 30 40.5 31.5 164 165 AU300 50 70 61 30 40.5 31.5 188.5 165 14-3-12

Slit Valve

The product should be operated after thoroughly reading the manual and understanding its contents. 530 Slit Valve XGT Series Construction i u w q !2 t !0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

Stations: 02 (2 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: F (G), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 20 (2 to 16 L/min), Return Unit Components: Flow Adj.

Stations: 04 (4 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: F (G), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 20 (2 to 16 L/min), Return Unit Components: Flow Adj.

Valve; w/Stop Valve), Supply/Return Port Size: 04 (1/2), Return Unit Flow Switch Output Specifications: BT (Out 1: PNP; Out 2: Flow Rate: PNP; Temp.: PNP; Temperature Sensor: Yes), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Return Unit Flow Switch Unit Specifications: F (Integrated Display: gal/min; Accumulated Flow: gal; Temp.: °F)

Valve; w/Stop Valve), Supply/Return Port Size: 04 (1/2), Return Unit Flow Switch Output Specifications: BT (Out 1: PNP; Out 2: Flow Rate: PNP; Temp.: PNP; Temperature Sensor: Yes), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Return Unit Flow Switch Unit Specifications: F (Integrated Display: gal/min; Accumulated Flow: gal; Temp.: °F)

Valve; w/Stop Valve), Supply/Return Port Size: 03 (3/8), Return Unit Flow Switch Output Specifications: BT (Out 1: PNP; Out 2: Flow Rate: PNP; Temp.: PNP; Temperature Sensor: Yes), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Return Unit Flow Switch Unit Specifications: F (Integrated Display: gal/min; Accumulated Flow: gal; Temp.: °F)

Valve; w/Stop Valve), Supply/Return Port Size: 03 (3/8), Return Unit Flow Switch Output Specifications: BT (Out 1: PNP; Out 2: Flow Rate: PNP; Temp.: PNP; Temperature Sensor: Yes), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Return Unit Flow Switch Unit Specifications: F (Integrated Display: gal/min; Accumulated Flow: gal; Temp.: °F)

Valve; w/Stop Valve), Supply/Return Port Size: 04 (1/2), Return Unit Flow Switch Output Specifications: DT (Out 1: NPN; Out 2: Flow Rate: Analog 4 to 20 mA ⇔ Analog 4 to 20 mA; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Return Unit Flow Switch Unit Specifications: F (Integrated Display: gal/min; Accumulated Flow: gal; Temp.: °F)

Valve; w/Stop Valve), Supply/Return Port Size: 04 (1/2), Return Unit Flow Switch Output Specifications: DT (Out 1: NPN; Out 2: Flow Rate: Analog 4 to 20 mA ⇔ Analog 4 to 20 mA; Temperature Sensor: Yes), Lead Wire: N (w/o Lead Wire and M8 Connector), Return Unit Flow Switch Unit Specifications: F (Integrated Display: gal/min; Accumulated Flow: gal; Temp.: °F)

Valve; w/Stop Valve), Supply/Return Port Size: 06 (3/4), Return Unit Flow Switch Output Specifications: BT (Out 1: PNP; Out 2: Flow Rate: PNP; Temp.: PNP; Temperature Sensor: Yes), Lead Wire: N (w/o Lead Wire and M8 Connector), Return Unit Flow Switch Unit Specifications: F (Integrated Display: gal/min; Accumulated Flow: gal; Temp.: °F)

Valve; w/Stop Valve), Supply/Return Port Size: 04 (1/2), Return Unit Flow Switch Output Specifications: DT (Out 1: NPN; Out 2: Flow Rate: Analog 4 to 20 mA ⇔ Analog 4 to 20 mA; Temperature Sensor: Yes), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Return Unit Flow Switch Unit Specifications: F (Integrated Display: gal/min; Accumulated Flow: gal; Temp.: °F)

Valve; w/Stop Valve), Supply/Return Port Size: 03 (3/8), Return Unit Flow Switch Output Specifications: FT (Out 1: PNP; Out 2: Flow Rate: Analog 4 to 20 mA ⇔ Analog 4 to 20 mA; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Return Unit Flow Switch Unit Specifications: F (Integrated Display: gal/min; Accumulated Flow: gal; Temp.: °F)

Valve; w/Stop Valve), Supply/Return Port Size: 06 (3/4), Return Unit Flow Switch Output Specifications: A (Out 1: NPN; Out 2: Flow Rate: NPN; Temp.: None; Temperature Sensor: None), Lead Wire: N (w/o Lead Wire and M8 Connector), Return Unit Flow Switch Unit Specifications: F (Integrated Display: gal/min; Accumulated Flow: gal; Temp.: °F)

Valve; w/Stop Valve), Supply/Return Port Size: 06 (3/4), Return Unit Flow Switch Output Specifications: BT (Out 1: PNP; Out 2: Flow Rate: PNP; Temp.: PNP; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Return Unit Flow Switch Unit Specifications: F (Integrated Display: gal/min; Accumulated Flow: gal; Temp.: °F)

Valve; w/Stop Valve), Supply/Return Port Size: 04 (1/2), Return Unit Flow Switch Output Specifications: DT (Out 1: NPN; Out 2: Flow Rate: Analog 4 to 20 mA ⇔ Analog 4 to 20 mA; Temperature Sensor: Yes), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Return Unit Flow Switch Unit Specifications: F (Integrated Display: gal/min; Accumulated Flow: gal; Temp.: °F)

Valve; w/Stop Valve), Supply/Return Port Size: 04 (1/2), Return Unit Flow Switch Output Specifications: DT (Out 1: NPN; Out 2: Flow Rate: Analog 4 to 20 mA ⇔ Analog 4 to 20 mA; Temperature Sensor: Yes), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Return Unit Flow Switch Unit Specifications: F (Integrated Display: gal/min; Accumulated Flow: gal; Temp.: °F)

Valve; w/Stop Valve), Supply/Return Port Size: 04 (1/2), Return Unit Flow Switch Output Specifications: DT (Out 1: NPN; Out 2: Flow Rate: Analog 4 to 20 mA ⇔ Analog 4 to 20 mA; Temperature Sensor: Yes), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Return Unit Flow Switch Unit Specifications: F (Integrated Display: gal/min; Accumulated Flow: gal; Temp.: °F)

Valve; w/Stop Valve), Supply/Return Port Size: 04 (1/2), Return Unit Flow Switch Output Specifications: FT (Out 1: PNP; Out 2: Flow Rate: Analog 4 to 20 mA ⇔ Analog 4 to 20 mA; Temperature Sensor: Yes), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Return Unit Flow Switch Unit Specifications: F (Integrated Display: gal/min; Accumulated Flow: gal; Temp.: °F)

Valve; Stop Valve: None), Supply/Return Port Size: 03 (3/8), Return Unit Flow Switch Output Specifications: B (Out 1: PNP; Out 2: Flow Rate: PNP; Temp.: None; Temperature Sensor: None), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Return Unit Flow Switch Unit Specifications: F (Integrated Display: gal/min; Accumulated Flow: gal; Temp.: °F)