Compact

400 400 400 m LEM LEM 200 200 200 200 LEY 0 0 0 5 10 15 20 0 0 5 10 15 20 0 0 2 4 6 8 10 0 2 4 6 8 10 Work load [kg] Work load [kg] Work load [kg] Work load [kg] Horizontal/Bottom mounting LES 500 500 500 500 LEPY LEPS 400 400 400 400 L2 L2 [mm] L2 [mm] L2 [mm] L2 [mm] 300 300 300 300 LER m Y 200 200 200 200 LEH 100 100 100 100 0 0 5 10 15 20 0 0 2 4 6 8 10 0 0 5 10 15 20 0 0 2 4 6 8 10

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

F R L T B 1 R Axial entry Right entry 200/230VAC (50/60Hz) 2 Y 0 Without motor Bottom entry Specifications Intermediate strokes 100 5.1 200 5.9 300 6.7 400 7.4 500 8.2 5 to 40 (with no condensation) 10 225 400 mm kg C kg N mm/s mm Standard stroke Strokes other than the standard strokes on the left are available by special order. Consult P/A.

LG1H

260 400 250 1200 1050 1200 1060 500 360 500 350 600 460 600 450 Dimensions inside ( ) are for a 100 mm stroke.

TABLE OF CONTENTS

TYPE FLOW CONFIGURATION MODEL 151 2-Way Normally Open 400 200 125 40 400 200 125 40 .020 .048 .075 .130 151G2XGM 151H2XGM 151J2XGM 151K2XGM 151G2XEM 151H2XEM 151J2XEM 151K2XEM 151G2XCM 151H2XCM 151J2XCM 151K2XCM DE-ENERGIZED ENERGIZED ** MODEL 152 2-Way Normally Closed .022 .055 .075 .130 500 400 200 150 500 400 200 100 152G2DGM 152H2DGM 152J2DGM 152K2DGM 152G2DEM 152H2DEM 152J2DEM 152K2DEM

Series KV2 Fittings

100/400 100/400 100/400 100/400 100/400 100/400 100/400 100/100 100/100 100/200 100/200 100/200 100/200 100/200 100/200 100/100 100/100 100/100 ** Non-Standard Product, consult factory for lead time. * Dimension A reference after installation.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

400 500 500 200 200 LEY 0 0 0 0 0 10 5 15 20 0 10 5 15 20 30 25 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 LES Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 LEPY LEPS 1000 1000 800 800 1500 1500 Horizontal L2 [mm] L2 [mm] L2 [mm] L2 [mm] LER L2 600 600 1000 1000 Y m Me 400 400 LEH 500 500 200 200 LEY -X5 0 0 0 0 0 10 5 15 20 0 10 5 15 20 30 25 0 10 40 50 20 30 0 10

NCA1

9 Carbon steel @0 How to Order Seal Kit NCA1 W 150 PS Option Option -XB5 Oversized rod -XB6 High temperature -XB7 Low temperature -XC11 Dual operation/Single rod Bore W K Single rod Double rod Non-rotating 150 200 250 325 400 Available for 150, 200 and 250 bores only. Use single rod designation when ordering XC11 kit. Note: XC10 seal kit order 2 single rod kits.

NCA1

9 Carbon steel @0 How to Order Seal Kit NCA1 W 150 PS Option Option -XB5 Oversized rod -XB6 High temperature -XB7 Low temperature -XC11 Dual operation/Single rod Bore W K Single rod Double rod Non-rotating 150 200 250 325 400 Available for 150, 200 and 250 bores only. Use single rod designation when ordering XC11 kit. Note: XC10 seal kit order 2 single rod kits.

NCQ8

175 200 250 300 350 400 NCQ8B200-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B250-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 #4-40UNC3/4 7/8 1 1-1/8 1-1/4 1-3/8 1-1/2 1-5/8 1-7/8 2-1/8 2-3/8 2-5/8 3-1/8 3-5/8 4-1/8 4-5/8 #6-32UNC3/4 7/8 1 1-1/8 1-1/4 1-3/8 1-1/2 1-5/8 1-7/8 2-1/8 2-3/8 2-5/8 3-1/8 3-5/8 4-1/8 4-5/8 #6-32UNC1-1/8 1-1/4 1-3/8 1-

e

200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 Speed (mm/s) Speed (mm/s) Speed (mm/s) Load Mass: E-MY2C E-MY2C/m1 E-MY2C/m2 E-MY2C/m3 60 60 60 50 50 50 30 30 30 20 20 20 Load mass (kg) Load mass (kg) Load mass (kg) E-MY2C25 E-MY2C25 10 10 10 E-MY2C25 E-MY2C16 5 5 5 E-MY2C16 E-MY2C16 4 4 4 3 3 3 2 2 2 1 1 1 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

LTF6PF-100LTF6PF-200LTF6PF-300LTF6PF-400LTF6PF-500LTF6PF-600100 200 300 400 500 600 2 3 4 5 6 7 Positioning Time Guide Positioning time A: Acceleration time B: Constant velocity time C: Deceleration time D: Resting time (0.4 sec.) Maximum acceleration: 3000 mm/s2 Positioning time (sec.)

Air Slide Table

: 300 mm L3: Overhang Allowable range: 400 mm Allowable overhang L [mm] Allowable overhang L [mm] 167 Model Selection MXQ Series Determine the overhang.

LEF-OM002xx

H 8 W(kg) 15 30 6 10 20 4 5 2 10 0 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 V (mm/s) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 LECPA Horizontal Transfer 50 12 B B 20 B 10 A A 40 W(kg) A W(kg) H H W(kg) 15 8 30 6 10 20 4 10 5 2 0 0 0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 0 100 200 300 400 500 600 V(mm/s) V (mm/s)

LG1H

Refer to pages starting with 181 for mounting. 30 95 B 100 95 8(4)-6.2 (160) () () 110 95 20 95 A (140) () () A B Stroke Model LG1H202PA-100-F LG1H202PA-200-F LG1H202PA-300-F LG1H202PA-400-F 100 200 300 400 50 150 250 70 170 270 Dimenstions inside ( ) are for a 100 mm stroke. Positioning Time Guide Positioning time Positioning time (sec.)

0.5

600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 0 0 0 0 Installation distance [mm] 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Installation distance [mm] 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Installation distance [mm] Installation distance [mm] Installation distance [mm] Installation distance [mm] IZF10R

LEF-OM006xx

500 600 V(mm/s) 0 100 200 300 400 500 600 V(mm/s) 0 0 100 200 300 400 500 600 V (mm/s) LEFS 16 LEFS 25 LEFS 32 50 12 20 W(kg) W(kg) 10 W(kg) W(kg) W(kg) W(kg) 6 40 6 15 8 30 8 6 8 10 5 5 20 4 5 12 10 16 10 12 16 10 2 0 0 0 0 100 200 300 400 500 600 V (mm/s) 0 100 200 300 400 500 600 V(mm/s) 0 100 200 300 400 500 600 V(mm/s) -9- (1)(DC24V) LEFS40 (mm) 1) 200, 300, (400), 500

Compact Cylinder Series NCQ8

175 200 250 300 350 400 NCQ8B200-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B250-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 #4-40UNC3/4 7/8 1 1-1/8 1-1/4 1-3/8 1-1/2 1-5/8 1-7/8 2-1/8 2-3/8 2-5/8 3-1/8 3-5/8 4-1/8 4-5/8 #6-32UNC3/4 7/8 1 1-1/8 1-1/4 1-3/8 1-1/2 1-5/8 1-7/8 2-1/8 2-3/8 2-5/8 3-1/8 3-5/8 4-1/8 4-5/8 #6-32UNC1-1/8 1-1/4 1-3/8 1-

Series AP500

FV6 MV6 TW6 FV8 MV8 TW8 FV12 MV12 TW12 50 0.34 2.00 (50.8) 40 0.28 5.22 (132.6) 30 0.21 4.00 (101.6) 20 0.14 5.22 (132.6) 2.50 (63.5) 4.34 (110.2) 10 0.07 6.26 (159.0) 0 0.00 0 200 400 600 800 1000120014001600 1800 2000 Flow rate (slpm, N2) 5.00 (127.0) Hastelloy is a registered trademark of Haynes International.

LEC-OM071xx

Pn081 Pn100 2 Speed Loop Gain 10 to 20 0.1 Hz 400 Immediately Tuning 2 Speed Loop Integral Time Constant Pn101 15 to 51200 0.01 ms 2000 Immediately Tuning Pn102 2 Position Loop Gain 10 to 20 0.1/s 400 Immediately Tuning Pn103 2 Moment of Inertia Ratio 0 to 20 1% 100 Immediately Tuning 5.8.1 Pn104 2 2nd Speed Loop Gain 10 to 20 0.1 Hz 400 Immediately Tuning 2 2nd Speed Loop Integral Time

ISO Cylinder

401 to 500 20 20 8 36 22 6 M8 x 1.25 71 84 96 109 134 159 25 22 10 36 22 8 M10 x 1.25 74 87 99 112 137 162 187 Auto Switch Made to Order Bore size Stroke Item Reference (Wh) 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 20 12.5 25 37.5 50 75 100 23.5 10.5 51 64 76 89 114 139 25 12.5 25