Residual Pressure Release Valve temperature Nylon, Soft nylon, Polyurethane, FEP, PFA Air 0 to 1 MPa 5 to 60C (No freezing) 5 1 3 1 2 2 1 4 2 3 2 1 AS 2 1 3 1 2 Nylon Polyurethane AS-FE 13.1 mm2 26.1 mm2 18.0 mm2 41.5 mm2 29.5 mm2 58.3 mm2 13.1 mm2 Effective area AB 46.1 mm2 12 Residual pressure release effective area 1.8 mm2 KE KE Easy operation with a push button.
0 Exhaust portr Adjusting springe Upper diaphragmw Upper diaphragm chamberq SIG Lower diaphragmy Lower diaphragm chambert OUT IN1 Springo Valvei Pistonu IN2 171 A IL201/211/220 Series Construction 2 12 IL211 IL201 1 r r e t e !2 !2 u t u w w i !9 i !9 q q !7 !7 IN OUT IN1 OUT1 !0 !6 !3 o !3 q !8 !6 IN2 OUT2 !8 !7 !6 o IL220 !3 r e !2 w u y i !9 !5 @1 OUT IN1 !1 q @2 @0 IN2 !
Note 1) Take note of hysteresis with 2 color indication type switches.
0 1 1 1 1 b6 0 0 1 1 0 0 1 1 b5 0 1 0 1 0 1 0 1 b8 b5 b4 b3 b2 b1 C 0 1 2 3 4 5 6 7 R 0 0 0 0 0 NUL DLE Space 0 P 0 0 0 1 1 SOH DC1 1 A Q 0 0 1 0 2 STX DC2 2 B R 0 0 1 1 3 ETX DC3 3 C S 0 1 0 0 4 4 D T 0 1 0 1 5 5 E U 0 1 1 0 6 6 F V 0 1 1 1 7 7 G W 1 0 0 0 8 ( 2 H 1 0 0 1 9 ) 9 I Y i 1 0 1 0 10 J 1 0 1 1 11 + 1 1 0 0 12 L 1 1 0 1 13 = M m 1 1 1 0 14 N 1
Series Nil CD1 Note 1) 5 VQ5000 Cylinder port size 3/8 NPTF 1/2 NPTF Bottom ported 1/2 NPTF Rc3/8 Rc1/2 Bottom ported Rc1/2 Mixed sizes Note) CD2 Note 1) 03T 04T BT 03 04 B CM Manifold type CU1 Note 1) 1 Plug-in unit CU2 Note 1) SB SD Note 1) Stations SU Note 1) 1 1 station D U D U Note 1) Combination of [C ] and [S ] is not possible.
(A contact) 1 1 1 1 1 1 N.O. (A contact) N.C. (B contact) Standard stroke mm kg C kg 50 2.1 75 2.3 100 2.5 125 2.7 150 2.9 N.C. (B contact) N.O. (A contact) N.C. (B contact) Body weight Operating temperature range Work load Speed 5 to 40 (with no condensation) 3 (3) horizontal/1 (1) vertical Note 1) Refer to page 318 for detailed specifications of proximity switches.
(VJA314) ZX1-VJ114K1, J1 q Misc. 1 2 M3 M5 M3 x 0.5 Pilot port/ External release port M5 x 0.8 ZX1-VJ3 4w K3, J2 1 2 e ZX1-VJA3 4 K8 Table (4) How to Order Ejector Assembly Air operated N.C. (ZX1A) ZX1AK6 r 05 ZX1 1 D W Table (2) How to Order Solenoid Valves Assembly no.
Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !
Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 Material Rolled steel plate Rolled steel plate Carbon steel Rolled steel plate Carbon steel Steel wire Urethane Cast iron Lead-bronze casted Carbon steel Carbon steel Rolled steel No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !
size (Rc, NPT, G) 3/8 1/2 1/8, 1/4 Note 1) The system accuracy when combined with PF2A3.
Direct mount type End lock Standard 1 3 3 1 2 Double rod Air Cylinder Direct mount type 10-/1121-/221 3 3 1 2 CA2 Air Cylinder Standard 10113 1 2 CUJ Mini-free Mount Cylinder 10-/1121-/221 3 3 1 2 CDU Free Mount Cylinder 10-/1121-/221 2 3 1 2 CQS Compact Cylinder 10-/1121-/221 2 3 1 2 CQ2 10113 1 2 REC Sine Cylinder Note) 11-/1221-/221 3 1 2 CXSJ 3, 4 Dual Rod Cylinder Note) 10-/11-/1221
SYJA 2(A) 2(A) Standard VZA (P)1 3(R) (P)1 3(R) i VFA 2(A) 2(A) 2(A) 3(R) VFRA o For vacuum (P)1 3(R) (P)1 3(R) VPA4 SYJA X VZA 1(P) VTA For vacuum u y t r e w q VGA VPA VPA VPA3 i 2(A) 3(R) o X Component Parts No.
B.o'd. 1 1 vallo Eodyla" NPTF "'NPTF 2 qpdng Sat xT!1&4 I Spdng-spooltuln xTmtl0 4 Orlng -Slv ARRt6A{14 sltw a3lambt-congEt3 ot spoot end st.v (metchd s6t) end (4) detjt4 6 XT@4 7 Q!!e, axT01&5 I P[ot cotr asrmDty with oprator.
4 Diaphragm (C) e OUT (2) SUP (1) OUT (2) OUT (2) SUP (1) IRV SUP (1) @3 !8 Exhaust valve !6 @1 @1 !8 e VEX Main valve e @1 Exhaust tValve guide tValve guide tValve guide SRH IR2120 IR3120 SRP @0 !1 SRF @5 !1 ITV @0 @6 !9 @0 @6 IC SUP side passage OUT side passage SUP side passage OUT side passage ITVH o o !0 ITVX !0 PVQ y q q IN !1 VY1 w IN !1 Bleed Bleed VBA VBAT y !
Direct mount type End lock Standard 1 3 3 1 2 Double rod Air Cylinder Direct mount type 10-/1121-/221 3 3 1 2 CA2 Air Cylinder Standard 10113 1 2 CUJ Mini-free Mount Cylinder 10-/1121-/221 3 3 1 2 CDU Free Mount Cylinder 10-/1121-/221 2 3 1 2 CQS Compact Cylinder 10-/1121-/221 2 3 1 2 CQ2 10113 1 2 REC Sine Cylinder Note) 11-/1221-/221 3 1 2 CXSJ 3, 4 Dual Rod Cylinder Note) 10-/11-/1221
center (A) 4 (B) 2 SX q t r w 5 (R) 3 (R) 1 (P) (B) 2 (A) 4 3 position exhaust center (A) 4 (B) 2 5 (R) 3 (R) 1 (P) 3 position pressure center u (A) 4 (B) 2 3 (R) 1 (P) 5 (R) (This figure shows a closed center type.) 5 (R) 3 (R) 1 (P) Component Parts Replacement Parts Note Zinc die-casted Part no.
/m3) Standard product 105 105 105 Standard product 104 104 104 12-CY1B Standard product 103 103 103 12-CXSL 102 102 102 10-CM2 11-CXSL 11-CM2 10 10 10 1 0.1 0.5 1 0.1 0.5 1 1 1 0.1 0.5 1 Particle diameter (m) Particle diameter (m) Particle diameter (m) Front matter 23 Comparison of Cleanliness Standards ISO 14644-1 ISO Cass 1 to 9 Intermediate classes available U descriptor: Particles smaller
-04 FH54 -06 FH54 -08 FH54 -10 FH54 -12 FH541-16 FH640-03 FH64 -04 FH64 -06 FH64 -08 FH64 -10 FH64 -12 FH641-16 3/8 1/2 3/4 1 1 1/4 1 1/2 3/8 1/2 3/4 1 1 1/4 1 1/2 3/8 1/2 3/4 1 1 1/4 1 1/2 3/8 1/2 3/4 1 1 1/4 1 1/2 5 213 57 275 156 80 50 1.8 96 105 2 x M8 x 1.25 19 0 236 61 340 175 60 65 2.5 120 136 2 x M10 x 1.5 15 0 1 0 1 32 (1 1/4B) 32 36 46 16 20 25 32 36 46 60 70 16 20 25 32 36
3 o q q o !0 !1 !0 !1 !2 w !2 w !3 !4 !5 With reducer Tube extensions e t y r i u q o !1 !0 !2 w Component parts No.
I l 50i 70 , iiFl.r* 0 q . . , . 50 6o ' 3 0 3o , , , . 3 0 , : LXPB5SA 40 40 '" .,1 Slide i Screw \ I i LXPB5SB 2D 2A LXSH2BC 100 50 220 High rigidity linear guide Ball LXSH2BD 100 50 90 Screw LXSH5BC 1 0 0 50 1 6 0 LXSH5BD 1 0 0 50 70 LXSH2SA 90 40 60 Slide LXSH2SB 45 20 30 Screw LXSHSSA 60 20 40 LXSH5SB 30 1 0 20 , \ | '-t 'oo"ot| I PLc I ll'i;!:-,?