Body Size: 1/8 Basis, Applicable Tube OD: 3/16", Lock Nut: -
Mounting Bracket: Joint, Applicable Bore: 50mm, 63mm
Mounting Bracket: Type A, Applicable Bore: 50mm, 63mm
Mounting Bracket: Type B, Applicable Bore: 50mm, 63mm
Base Type: Plug Lead Unit U Type, Stations: 5 Stations, Port Size: -
Base Type: Plug Lead Unit, Stations: 5 Stations, Port Size: -
Type: Standard, Filtered Matter: Dust, Inlet Side Connection Type: One-Touch Pipe (Inch Size), Filtration Level: 30μm, Filter Replacement: Acceptable, Application: [Vacuum Line] Vacuum Line, Connection Tube Inlet Diameter (mm): -, Connection Tube Inlet Diameter (in): 3/16", Recommended flow rate(L/min (ANR)): 20
Type: Speed Controller, Body Material: [Resin] PBT, Format: [Straight] Straight, Environment, Applications: Standard, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Knob Type: Standard, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type: One-touch coupling one both sides, Applicable Tube O.D. mm(mm): -, Applicable Tube O.D. inch size(inch): 3/16, Body Size: M5 Standard
Type: Speed Controller, Body Material: [Resin] PBT, Format: [Straight] Straight, Environment, Applications: Standard, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Knob Type: Resin, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type: One-touch coupling one both sides, Applicable Tube O.D. mm(mm): -, Applicable Tube O.D. inch size(inch): 3/16, Body Size: 1/8 Standard
Type: Speed Controller, Body Material: [Resin] PBT, Format: [Straight] Straight, Environment, Applications: Standard, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Knob Type: Resin, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type: One-touch coupling one both sides, Applicable Tube O.D. mm(mm): -, Applicable Tube O.D. inch size(inch): 3/16, Body Size: 1/4 Standard
Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter Out / In, Format: [Straight] Straight, Environment, Applications: Standard, Thread Portion Material: [303/304 Stainless Steel] Stainless steel 303, Knob Type: Resin, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type: One-touch coupling one both sides, Applicable Tube O.D. mm(mm): -, Applicable Tube O.D. inch size(
Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter Out / In, Format: [Straight] Straight, Environment, Applications: Standard, Thread Portion Material: [303/304 Stainless Steel] Stainless steel 303, Knob Type: Resin, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type: One-touch coupling one both sides, Applicable Tube O.D. mm(mm): -, Applicable Tube O.D. inch size(
Type: [Fitting] Pipe/Plug, Fitting Type: Other shapes, Body Material: [PBT Resin] PBT, Application: Standard/Mini, Shape: [Others] Sputtering Cover, Applicable Fitting Size (mm): -, Applicable tube fitting size (inches): 3/16
HRX-OM-W069 Example 1) ASCII mode Received function code: 04(0 0100) ASCII code 30h, 34h Abnormal function code: 841000 0100 ASCII code 38h, 34h Example 2) RTU mode Receive function code: "04" (0 0100) Abnormal function code: "84" (1000 0100 2) Error Code Assign error code below. 01 : Function code of a command is outside the standard 02 : The specified address of register is outside the range. 03 :
Example 1) ASCII mode Received function code: 04(0 0100) ASCII code 30h, 34h Abnormal function code: 841000 0100 ASCII code 38h, 34h Example 2) RTU mode Receive function code: "04" (0 0100) Abnormal function code: "84" (1000 0100 2) Error Code Assign error code below. 01 : Function code of a command is outside the standard 02 : The specified address of register is outside the range. 03 :
Mounting/ Piping Equivalent tightening torque [Nm] KF 04 1.5 to 2.0 2 to 7 KF 06 1.5 to 2.0 3 to 8 KF 08 1.5 to 2.0 4 to 9 KF 10 1.5 to 2.0 6 to 9 KF 12 1.5 to 2.0 9 to 12 KF 04 1.5 2 to 4 KF 06 1.5 4 to 6 KF 08 1.5 6 to 9 KF 10 1.5 10 to 12 KF 12 1.5 10 to 12 Sleeve material Fitting size Appropriate tightening rotations Nylon 66 C2700 2.
A Y34-02-A Y54-04-A Note1) in part numbers for a round pressure gauge indicates a pipe thread type.