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5 15A FMW-4200-100 1 100 120 5.5 7.5 15A 1 Wetted materials. 2 For special deadband or current requirements, contact factory.

Metric size Inch size Type Elbow Universal 2 3 1 8" 5 32" 23 01 3.2 4 6 8 10 12 04 06 08 10 12 03 05 07 09 11 13 3 16" 1 4" 5 16" Control type Meter-out Meter-in 0 1 3 8" 1 2" Use 1/8" tube.

Part Number Description: SCREW 8-32X2-1/4 SHCS   Product Line: V   Product Line Description: VALVE   Family Code: 273   Family Description: VS4 (CLASS 1) SOL 4/5 PORT   Class Code: 21   Part Code: 2   Reference Code:  K   Click here to report information errorImage shown may not match exact part number

Bonnet assembly/construction part number:1 Valve size Temperature specifications 16 25 40 50 General use XLC16-30-1 XLC25-30-1 XLC40-30-1 XLC50-30-1-1 High temperature XLC16-30-1H XLC25-30-1H XLC40-30-1H XLC50-30-1H-1 Valve size Temperature specifications 63 80 General use XLC63-30-1-1 XLC80-30-1-1 High temperature XLC63-30-1H-1 XLC80-30-1H-1 Note1) The magnet for auto switch is not provided

34 55 107 1 8 1 4 3 8 1 2 Specifications 1.5 MPa 0 to 1 MPa 5 to 60C (No freezing) 10 turns (8 turns Note)) Proof pressure Operating pressure range Ambient and fluid temperature Number of needle rotations AS ASP Note) ( ) is the case of ASN2-M5 and ASN2-U10/32.

5 phase to 200 2 phase to 200 5 phase to 100 2 phase to 100 5 phase to 30 2 phase to 30 5 phase to 80 2 phase to 80 Sanyo Denki Co., Ltd. 5 phase to 200 2 phase to 200 5 phase to 100 2 phase to 100 5 phase to 30 2 phase to 30 5 phase to 80 2 phase to 80 Standard stroke (mm) and 25 50 75 100 125 150 175 200 Model Motor Manufacturer Maximum speed (mm/s) Capacity LXFHABC LXFHABD to 50 to 100

Warning Warning Recommended Tightening Torpue Unit: Nm Connection thread M5 1/8 1/4 3/8 1/2 3/4 1 1 1/4 1 1/2 2 Torpue 1to1.5*1 3 to 5 8to12 15to20 20to25 28to30 36to38 40to42 48to50 48to50 *1 After tightening by hand, use a tightening tool to tighten an additional 1/6 to 1/4 turn as a guideline. Caution Caution Mounting 1.

1/2 62.5 37 80.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 97.5 6 82.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 99.5 10.5 06 10 M6 x 1 Depth 7.5 39 50 0 77 74 59 155 128 143 3/4, 1 74 46 06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 5 Soft Start-up Valve AV2000

P36 5 T 5-1 INOUT DRAIN V V O ((1)(2)) O O FGE-KT001(NBR) FGE-KT002(FKM) (2) (1) V 5-2 () () (P7 1 ) ) 10/12 FGX-OM-L009-B 5-3 (P7 1) ) 2~3 3 3 () FGESAFGELA FGESBFGELB FGESCFGELC 6570L250 6570 L500 6570 L250 6570 L750 6570 L250 (mm) 2630 4045 3338 5155 2744 11/12 FGX-OM-L009-B 5-4 O O ((1)(2)) (1) (2) 5-5 V V O a V b V V (ab) V T (c) () ()V (P7,1) V V V CY

Typical circuit By-pass 5. Maintenance and check 1) During operation During operation of pump, it is necessary to check leakage of fluid and air and operating condition periodically. If any abnormality or concern is seen, stop the pump immediately and contact local supplier or SMC.

Port lype t f f i XCl6l Airlon:NP a N||mhar ^l cwitihac a Number of switches --a:T 1 p" With auto switch . Mounting ends tal ioh hole Both J r,rr.rt o, n ,r o*nnt tnoit -.r, ,.rt*lt r Type ol auto switch (Rail mounled) @ Bore size . Reed switch isee P.11 lor detaits.) Cylinder stroke (mm) 1 0 , 1 5 , 2 0 1 0 , 1 5 , 2 0 Solid state switch (see P.ll tordetails.)

Max. 1.0 MPa Input pressure Max. 0.7 MPa 0.7 Supply pressure: 0.7 MPa Output pressure Max. 0.7 MPa 0.6 Pressure ratio 1 : 1 Air consumption 3 L/min (ANR) or less (OUT = 0.5 MPa) 0.5 Output pressure MPa Linearity Within 1% Hysteresis Within 1% 0.4 Ambient and fluid temperature 5 to 60C Port size 1/4, 3/8 0.3 Weight 0.56 kg 0.2 0.1 0 0 200 400 600 800 1000 1200 1400 Flow rate L/min (ANR) 53

SMC VVQ1000-P-1-C6 ind supply spacer, VQ1000/VQ20/VQ30 VALVE*** $59.55 + Add to Quote Add To Cart Add to Cart SMC VVQ1000-P-1-N7 ind supply spacer, VV5Q* MANIFOLD VQ 4/5 PORT

SMC VVQ1000-P-1-C6 ind supply spacer, VQ1000/VQ20/VQ30 VALVE*** $59.55 + Add to Quote Add To Cart Add to Cart SMC VVQ1000-P-1-N7 ind supply spacer, VV5Q* MANIFOLD VQ 4/5 PORT

ZXP7-PFL1 (1) (2) (3) (4) (5) -X1 Applicable cups Cup part numbers Cup with adapter Adapter unit Vacuum inlet: Cup unit Male thread M6x1 (5) (1) (3) (4) (2) Cup Cup Cup Cup Attachment Weight by cup material (g/cup) series form material diameter Part number N U F S/SF NBR (Urethane (FKM (Silicone ZP 08 U ZPT08U-A6 4 4 4 4 ZP08U ZP 08 B ZPT08B-A6 4 4 4 4 ZP08B ZPT1-A6 ZP 10 UT ZPT10UT-A6

Note 16-9-5 16-10-1 Page 16-9-1 16-9-3 16-1-6 16-1-7 5 Pressure Switch Application Example Pressure Switch Application Example When selecting a model, please thoroughly review and confirm beforehand, that the model will meet the necessary specification.

GV*-OMH0003-C PRODUCT NAME High Vacuum Slit Valve MODEL / Series / Product Number XGT312-50336-** XGT313-50336-** B Contents Safety Instructions 2 to 3 1. Specifications 4 2. How to order 5 3. Construction/Operation 6 to 8 4. Precautions 9 to 10 5. Replacement Part List 11 6. Maintenance 12 7.

2 3/4 1 11/4 11/2 1/4 OUT ARX20 VCH41(N.C.)

Manual override P L 5 24 VDC 02 Rc 1/4 (8A) Rc 3/8 (10A) 9 Other 03 3-9-1 2 Series VS410 Accessory (Option) Apparent Power (Power Consumption) 1.

How to Calculate the Flow Rate For obtaining the flow rate, refer to page 4-1-6. 4-16-1 Series VS3115/3110 How to Order VS311 D L 5 01 5 Thread type Accessory (Option) Nil Rc Mounting With indicator light L P With manual override N NPT T NPTF E Nil Without bracket Port size Piping Electrical entry B With bracket G 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Without sub-plate Rc 01 02 02 03 00 Body ported Bracket