Electric Actuator Triple Axis P&P Unit

4-6.5 20 20 12.5 C 31 63.5 13.5 E-100 4H10depth5 5 (26) (44) 110 100 Stroke69 (Stroke+131) 10 92 85 (For 100 to 150 strokes) 208 (For 200 to 1000 strokes) C section detail (S=2/1) 12 3 500 12 3 450 10 2 400 10 2 350 8 1 300 8 1 250 6 0 200 6 0 150 6 0 100 Stroke F E Stroke F E Dimension table 1) The motor mounting plate and coupling are attached but no motor, controller, driver, motor cable

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Min.operating pressure (1) (1) 10 to 50C 10 to 50C Ambient and fluid temp.

High Power Cylinder Series RHC

-LD LY LH LT NF E 10 E JD N 10 JC N NA S + Stroke X Y X Y LX LZ LS + Stroke ZZ + Stroke (mm) Bore size (mm) Stroke range (mm) Effective thread length A D E F GA GB H I JC JD K LD LH H1 H2 10 15.5 8 5 25 7 5 30.5 43 26 44 47.5 53.5 16 14.5 18 200 to 700 20 19.5 8 6 28 7 5.5 25.5 39 31 48 49.5 56.5 16 18 22 12 200 to 700 25 19.5 9 6 30 7 5.5 28.5 36 38 51 51.5 55 19 18 22 12 200 to 1000 32

Auto Switch Guide

D-A73H LED Brown OUT (+) Brown Contact protection box CD-P11 CD-P12 Resistor Reed switch Zener diode Weight OUT () Blue Blue (g) D-A72H D-A73H D-A76H D-A80H Auto switch model D-A76H 10 10 11 10 0.5 Lead wire length (m) 47 47 52 47 3 DC (+) Brown 77 5 LED (+) Resistor Load Reed switch DC power supply OUT Black Reverse current prevention diode Dimensions () DC () Blue D-A7H, D-A80H D-A80H

CC

E101. 10-17-16

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

mm Graph (8) l: 201 to 300 mm 300 100 200 100 100 Load weight m (kg) Load weight m (kg) Load weight m (kg) 80 80 80 10 10 10 63 63 63 50 50 50 40 1 1 1 25 20 25 20 40 32 40 32 32 [Example w] 25 20 0.3 0.3 0.1 70 100 1000 70 100 1000 70 100 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

pressure 0.7MPa (High pressure style: 1.0MPa) 0.1MPa 0.15MPa Min.operating pressure (1) (1) 10 to 50C 10 to 50C Ambient and fluid temp.

LEKF-OMZ0035

C2 LECSC2-T 200 to 230 2 2 S2 LECSS2-T 200 to 240 5 5 N2 LECSN2-T 200 to 240 A 10 E2 LECSN2-T-E 200 to 240 92 LECSN2-T-9 200 to 240 I/O cable length P2 LECSN2-T-P 200 to 240 Nil Without cable H Without cable Connector only 1 1.5 [m] Applicable Stroke Table Stroke Size 50 100 150 200 250 300 350 400 450 500 600 700 800 900 1000 1100 1200 25 32 40 -9- AC servo motor LECY* series L E K F S

Guide Cylinder Series MGG

M N C D 4-O T Q 2-P S U W E B K L AA A R X AB I AP Y + Stroke Z + Stroke J V 8-AF AC AD AE 100 piston rod end connection For standard strokes (mm) Bore size (mm) Stroke range (mm) AC G H AB AF AA AE AD F N M D L C K B J AP I A E 63 80 100 75, 100 125, 150 200, 250 300 15 20 depth 14.5 M16 x 2 depth 28 25 25 50 170 13.5 100 66 140 180 30 135 M12 x 1.75 depth 24 228 117 60 65 200 200 15 20

PF2A/PF2W

rate measuring range Minimum set unit PF2 0.5 to 10.5 l/min 0.5 to 10.5l /min 1 to 10 l/min 0.1 l/min 0.1 l/pulse 2.5 to 52.5 l/min 2.5 to 52.5 l/min 5 to 50 l/min 0.5 l/min 0.5 l/pulse 5 to 105 l/min 5 to 105 l/min 10 to 100 l/min 1 l/min 1 l/pulse 10 to 210 l/min 10 to 210 l/min 20 to 200 l/min 2 l/min 2 l/pulse 25 to 525 l/min 25 to 525 l/min 50 to 500 l/min 5 l/min 5 l/pulse IF Data

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 10 10 14 18 18 22 26 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 84 90 98 116 126 146 159 170 204 215 RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-4-17

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 10 10 14 18 18 22 26 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 84 90 98 116 126 146 159 170 204 215 RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-4-17

MXW Series Long Stroke Slide Table

moment 70 MXW25 70 100 50 30 40 N m 50 MXW20 Pitch moment Yaw moment Roll moment 25 30 40 MXW20 Model 20 Moment N m Moment N m Mp/Mep My/Mey Mr 15 MXW16 20 MXW16 12 5 5 3 MXW 8 10 15 7 10 MXW12 MXW12 10 10 6 MXW12 4 5 7 5 4 3 20 20 12 MXW16 MXW8 MXW8 3 2.5 40 40 25 MXW20 2 110 110 65 2 1.5 MXW25 50 100 200 300 500 700 50 100 200 300 500 Piston speed mm/s Piston speed mm/s (Graph3) (Graph2

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Page 603-10 JXC-CD-T JXC-CD-S Straight type JXC-CL-S Straight type T-branch type (Accessory) To SI To ENC To SI To MOT Provided by customer (3 m) Communication cable To PWR Page 603-10 Power supply for controller 24 VDC Power supply plug (Accessory) Page 603-10 Options Teaching box Controller setting kit Conversion cable Note) Page 603-10 P5062-5 (0.3 m) Page 603-10 (With 3 m cable) LEC-T1

100

. 0.5 MPa) 100 0.35 MPa 300 80 60 200 0.2 MPa ZL3M/ZL6M (SUP. 0.35 MPa) 40 100 20 0 0 Number of needle rotations 2 4 6 8 10 12 0 Needle opening [Number of rotations] 2 4 6 8 10 11 1 3 5 7 9 12 0 * The flow rate is not the flow rate output from the vacuum port.

High Power Cylinder:

Basic Rc(PT)P Rc(PT)P GA H2 NN NN GB H1 MM I ND D NB NE C Effective Thread E E NF N JC 10 10 N JD A K F NA S+Stroke F H B WH ZZ+Stroke (mm) Stroke range (mm) 200 to 700 200 to 700 200 to 1000 200 to 1000 Bore (mm) 20 25 32 40 Eff. thread length 15.5 19.5 19.5 21 H1 5 6 6 8 H 44 48 51 54.5 GB 47.5 49.5 51.5 51.5 GA 53.5 56.5 55 56 F 16 16 19 21 E 14.5 18 18 20.5 D 10 12 12 16 C 40.5 45.5 51.5

10

F F 1 2 1 2 MHL2-10DZ MHL2-16DZ MHL2-16D Z MHL2-10D Z 60 60 25 25 Pressure 0.6 MPa Gripping force [N] Gripping force [N] Gripping force [N] Gripping force [N] Pressure 0.6 MPa 50 50 20 20 Pressure 0.6 MPa 0.5 MPa Pressure 0.6 MPa 0.5 MPa 40 40 15 15 0.4 MPa 0.5 MPa 0.5 MPa 0.4 MPa 0.4 MPa 30 30 0.4 MPa 10 10 0.3 MPa 20 20 0.3 MPa 0.3 MPa 0.3 MPa 0.2 MPa 5 5 10 10 0.2 MPa 0.2 MPa 0.2 MPa 10

Refrigerated Air dryer Series IDU/IDF

(C) 55 50 60 70 80 IDU3D to 6D 45 50 55 65 75 IDU8D to 15C 45 50 55 65 70 IDU22C1, 37C1 40 45 50 55 60 IDU55C, 75C Ambient temperature (C) Outlet air pressure dew point (C) 15 10 5 15 10 5 15 10 5 15 5 10 5 15 10 1.35 1.35 0.60 1.35 1.35 0.60 1.35 1.35 0.60 1.35 0.60 1.35 0.60 1.35 1.35 25 1.35 1.05 0.50 1.35 1.05 0.50 1.35 1.10 0.50 1.35 0.60 1.20 0.55 1.35 1.25 30 1.25 0.95 0.45 1.25 0.95

HRX-OM-Y098

A-20 CH1 35 Ambient temperature 32oC 30 Cooling capacity [kW] 25 20 45oC 15 10 This is the cooling capacity of the 5 CH1 side when 1 kW heat load is applied to the CH2 side. 0 5 10 15 20 25 30 35 Circulating fluid temperature [oC] Fig. 8-7 Cooling Capacity (HRL300-A-20) 8.4.4 HRL100/200/300-A-20 CH2 3.0 2.5 Cooling capacity [kW] Ambienttemperature 45oC or less 2.0 (Max. 1.5 kW)*2 1.5 Rated

17

Maximum Allowable Moment MY1B/M1 MY1B/M2 MY1B/M3 200 300 400 500 40 50 100 30 200 20 50 40 30 100 10 20 40 50 3 4 5 30 10 20 Moment Nm Moment Nm Moment Nm 2 5 4 3 10 1 MY1B40 MY1B40 5 4 3 2 MY1B40 MY1B40 MY1B40 MY1B40 0.3 0.4 0.5 MY1B32 1 2 MY1B32 MY1B32 MY1B25 0.2 1 0.5 0.4 0.3 MY1B25 MY1B25 0.1 0.4 0.5 0.2 0.3 0.05 0.04 0.03 0.2 0.1 0.02 0.06 0.1 100 200 300 400 500 1000 1500 100 200 300