MGP

MGP 5 4 3 10 MGQ 5 10 100 200 20 30 40 50 1 100 10 200 20 30 40 50 2 3 4 5 MGG Eccentric distance l (mm) Eccentric distance l (mm) MGC Over 75 stroke Over 125 stroke MGF 100 100 63 200 P=0.5MPa P=0.5MPa CY1 80 100 50 Load weight m (kg) Load weight m (kg) MY1 50 40 40 50 30 40 30 32 20 20 10 10 100 10 10 100 200 20 30 40 50 20 30 40 50 200 Eccentric distance l (mm) Eccentric distance l (mm

High Vacuum Angle Valve

-10 (FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

10

125 40 56 41 23 12.5 25 37.5 50 75 100 125 50 64 51 25 12.5 25 37.5 50 75 100 125 150 63 64 51 25 12.5 25 37.5 50 75 100 125 150 80 68 56 29 12.5 25 37.5 50 75 100 125 150 175 200 100 76 61 29 12.5 25 37.5 50 75 100 125 150 175 200 125 82 75 27 10 20 30 40 60 80 100 120 140 160 180 200 [mm] Rubber Bumper Bore size [mm] h 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401

Table of Contents

: 0.4 MPa Supply pressure: 0.4 MPa 100 90 100 90 ZQ Vacuum pressure (kPa) Vacuum pressure (kPa) 80 80 70 70 ZF 60 60 50 50 ZP 40 40 30 30 ZCU 20 20 10 10 AMJ 0 0 10 20 30 40 50 60 70 80 90 100 110 120 20 60 100 140 180 220 260 300 130 Suction flow rate (/min(ANR)) Suction flow rate (/min(ANR)) Misc.

Proposals for Energy Saving

10 10 10 10 12 12 12 16 16 20 20 10 10 12 12 12 14 14 14 14 14 14 14 17 17 17 22 22 26 26 10 10 12 12 12 14 14 17 17 17 17 17 19 19 19 24 24 27 27 27 27.7 30.1 30.8 31.5 33.8 34.6 35.6 36.3 37.1 29.5 27.7 40.4 41.3 31.2 40.1 38.4 45.6 43.9 15 15 16 16 16 16 16 17 17 17 17 17 17 17 17 17 17 17 17 KN-04-100 KN-04-150 KN-06-100 KN-06-150 KN-06-200 KN-08-150 KN-08-200 KN-10-250 KN

CJ2

10 16 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Bore size 10 16 10 mm 16 mm CJ2 Intermediate strokes are available by the 1 mm interval with no stroke adjustment by spacer.

LG1H

LG1H/ Aluminum body LG1TH/ Stainless steel body LJ1 LG1 LC1 LX LC6D/LC6C Switches 50 10 10 50 Horizontal load 100% Horizontal load 50% 20 10 20 10 Horizontal load 100% Horizontal load 50% Amount of deflection m Amount of deflection m 500 1000 1000 500 200 100 200 100 50 20 50 20 10 10 5 5 Lateral load 100% Lateral load 100% 0.5 1 2 0.5 1 2 Lateral load 50% Lateral load 50% Horizontal empty

2 Phase Stepper Motor/Without Motor Brake Series LXP

Positioning Time Guide (for Horizontal Mount) For transfer load of 0kg For transfer load of 6kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) 200 100 50 10 1 Positioning distance (mm) 100 200 50 10 1 10 20.1 10.1 5.1 1.1 0.2 10 10.1 20.1 5.1 1.1 0.1 Speed (mm/s) Speed (mm/s) 50 4.1 2.1 1.1 0.3 0.1 50 2.1 4.1 1.1 0.3 0.1 100 2.1 1.1 0.6 0.2 0.1 100 1.1 2.1 0.6 0.2

Integrated Controller

W [kg] Work load: W [kg] 3000 mm/s2 20 15 3000 mm/s2 10 5000 mm/s2 5 10 mm/s2 0 50 100 150 200 250 300 350 450 400 0 0 Speed: V [mm/s] Speed: V [mm/s] EQFS32HC/Ball Screw Drive Horizontal/Lead 4 Vertical/Lead 4 100 90 80 70 60 50 40 30 20 10 0 20 40 60 80 100 120 50 45 40 35 30 25 20 15 10 5 0 140 20 40 60 80 100 120 3000 mm/s2 Work load: W [kg] Work load: W [kg] 3000 mm/s2 10 mm/s2 5000

Stability of suction position,

Stroke 32 40 50 63 80 100 125 32 40 50 63 80 100 125 ZP3EU-(T/Y)F1JB10 10 V V V V ZP3EU-(T/Y)F1JB30 30 ZP3EU-(T/Y)F1JB50 50 ZP3EU-(T/Y)F2JB10 10 V V ZP3EU-(T/Y)F2JB30 30 ZP3EU-(T/Y)F2JB50 50 ZP3EU-(T/Y)F3JB10 10 V V V ZP3EU-(T/Y)F3JB30 30 ZP3EU-(T/Y)F3JB50 50 ZP3EU-(T/Y)F4JB10 10 V V ZP3EU-(T/Y)F4JB30 30 ZP3EU-(T/Y)F4JB50 50 ZP3EU-(T/Y)F5JB10 10 V V ZP3EU-(T/Y)F5JB30 30 ZP3EU-(T/Y)F5JB50

C95

10 125 15 15 + 55(n-2)/2 n = 2, 4, 6, 8 20 20 + 55(n-2)/2 n = 2, 4, 6, 8 20 20 20 + 55(n-2)/2 n = 2, 4, 6, 8 25 25 + 55(n-2)/2 n = 2, 4, 6, 8 10 100 35 100 + 100(n-2) n = 2, 3, 4, 5 35 + 30(n-2) n = 2, 3, 4, 5 10 55 35 55 + 55(n-2) n = 2, 3, 4, 5 35 + 30(n-2) n = 2, 3, 4, 5 10 10 + 40(n-2)/2 n = 2, 4, 6, 8 10 10 + 40(n-2)/2 n = 2, 4, 6, 8 10 10 + 30(n-2)/2 n = 2, 4, 6, 8 15 10 + 45(n-2)/

MB

to 750 to 750 50 55 70 80 100 120 7 9 9 9 12 14 10 10 12 12 16 16 64 72 90 100 126 150 32 36 45 50 63 75 79 90 110 120 153 178 141 145 164 164 202 202 MB1 FT FX CA2 FZ ZZ + Stroke CS1 C76 Single clevis: (C) C85 Port Single Clevis CD H10 (mm) C95 Bore size (mm) Stroke range H10 CX 0.1 CD L RR Z U ZZ 0.3 32 40 50 63 80 100 to 500 to 500 to 600 to 600 to 750 to 750 10 10 14 14 22 22 164.5 169

CXS

Stroke (mm) up to 10 up to 30 up to 75 up to 100 up to 50 up to 100 up to 300 up to 400 More than 400 up to 100 up to 300 up to 400 More than 400 up to 100 up to 300 up to 400 More than 400 up to 100 up to 300 up to 400 More than 400 up to 100 up to 300 up to 400 More than 400 Max. speed (mm/s) 7 8 9 6 10 15 Selection graph 10 11 12 13 14 15 17 16 20 25 32 The maximum speeds for 10 to 32

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

For type W, only DC voltage is available. 58 Base Mounted 10-SY3000/5000/7000/9000 Specifications 10-SY3000 10-SY5000 10-SY7000 Air 10-SY9000 Series Fluid Internal pilot operating pressure range (MPa) 0.15 to 0.7 2 position single 2 position double 3 position Operating pressure range 0.1 to 0.7 0.2 to 0.7 100 kPa to 0.7 0.25 to 0.7 0.25 to 0.7 0.25 to 0.7 10 to 50 (No freezing.) 10 3 5 3

MLGP

m (kg) 25 20 20 0.1 10 50 50 100 200 1 10 100 200 Eccentric distance l (mm) Eccentric distance l (mm) MLGPL32 to 100 23 50mm stroke or less V = 400mm/s 24 Over 50mm stroke V = 400mm/s 100 100 100 80 100 80 63 63 10 Load weight m (kg) 50 50 10 40 40 32 1 32 2 10 100 200 0.3 10 50 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) Features 10 Series MLGP Horizontal Mounting Slide

MLGP

m (kg) 25 20 20 0.1 10 50 50 100 200 1 10 100 200 Eccentric distance l (mm) Eccentric distance l (mm) MLGPL32 to 100 23 50mm stroke or less V = 400mm/s 24 Over 50mm stroke V = 400mm/s 100 100 100 80 100 80 63 63 10 Load weight m (kg) 50 50 10 40 40 32 1 32 2 10 100 200 0.3 10 50 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) Features 10 Series MLGP Horizontal Mounting Slide

Auto Switch Guide

Applicable bore size (mm) Cylinder series 32 40 50 63 80 100 MDB1 BMP1-032 10-20-78

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

(Different surfaces) 90 + 100 (n 2) n = 2, 4, 6, 8 95 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 4, 6, 8 105 + 100 (n 2) n = 2, 4, 6, 8 110 + 100 (n 2) n = 2, 4, 6, 8 125 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 3, 4 With n pcs. (Same surface) 60 65 75 80 85 90 10 With 1 pc. With 2 pcs. (Different surfaces) 70 75 80 85 90 35 With 2 pcs.

Single Axis Electric Actuator Series LJ1H

8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard Motor Mounting

Tie-rod Type Hydraulic Cylinder

25 92 233 106 11 50 10 9 3/8 43 30 10 73 225 60 28 99 251 112 11 1/4 stroke 63 12 10 3/8 47 37 10 80 243 65 30 106 269 116 11 80 16 13 1/2 57 40 13 90 270 80 32 116 296 127 11 100 20 16 1/2 66 47 13 100 297 100 35 123 322 137 12 1/5 stroke 125 20 16 1/2 77 55 15 100 307 100 35 123 328 137 12 160 24 20 3/4 94 60 20 108 343 120 38 131 366 155 12 401 CHA Series Dimensions Rod flange type: CHAF