ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

27 60 22 96 1/4 1/4 44 16 32 10 85 15 26 54 10 10 8 M8 x 1.25 50 Up to 600 20 to 600 35 32 70 27 108 1/4 1/4 52 20 40 10 95 17 27 59 13 12 11 M8 x 1.25 63 Up to 600 20 to 600 35 32 86 27 115 1/4 1/4 64 20 40 10 102 17 26 67 18 15 11 M10 x 1.25 80 Up to 750 20 to 750 40 37 102 32 129 1/4 1/4 78 25 52 14 113 21 30 72 23 17 13 M12 x 1.75 100 Up to 750 20 to 750 40 37 116 41 140 1/4 1/4 92 30

Micro Mechanical Valve Series VM1000

x M20 x 1 Lock nut Thickness 6, Width across flats 27 OFF ON Max. 10 Symbol 2 port 60.8 (A) 2 23 R port (3 port only) 33.5 12 10 112.8 1 (P) 3 port (A) 2 52 22 13 12 10 32 1 (P) 3 (R) 16 2 x 1/4 2 x 5.5 mounting hole 25 30 40 * 0.5 MPa supply F .O.F .* 12 N T.T. 60 Push button (Mushroom) VM220-02-30 (R, B, G, Y) A VM230-02-30 (R, B, G, Y) A Panel mounting hole 40 T.T. 29.5 22.1 Max. 6 3

REA/REB

Model selected 10-2-16 16 Series REAR Model Selection 2 Caution on Design 1 Selection Method RE A B 20 10 32 REC 200 400 300 200 50 100 CX 40 Allowable driving force Fn (N) Allowable driving force Fn (N) Allowable driving force Fn (N) 100 50 30 CY 20 30 40 50 20 30 MQQ M 10 Usable range 10 RHC 10 5 Usable range 5 5

REA/REB

ST) 3 10 (1.5 1.3 x 103 x ST) 10 (1.71 1.3 x 103 x ST) = Max. load weight (kg) 3 7 12 20 30 50 7 12 Stroke (Max.)

Slider Type Ball Screw Drive/11-LEFS Series

0 4 8 12 16 20 24 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] L6 [mm] 600 600 600 600 Z 400 400 400 400 200 200 200 200 0 0 4 8 12 16 20 24 0 0 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg]

CM2

14 18 9 10 5 9 15.5 13 25 5 28 M8 x 1.25 15 24 M20 x 1.5 1/8 20 0 0.033 25 45 8 13 10 30 19 30 14 22 9 10 5.5 9 19.5 17 25 6 33.5 M10 x 1.25 15 30 M26 x 1.5 1/8 26 0 0.033 32 45 8 13 12 30 19 30 14 22 9 10 5.5 9 19.5 17 25 6 37.5 M10 x 1.25 15 34.5 M26 x 1.5 1/8 26 0 0.039 40 50 11 16 14 38 30 39 18 24 10 15 7 11 21 22 41.2 8 46.5 M14 x 1.5 21.5 42.5 M32 x 2 1/4 32 Dimensions by Stroke Built-in

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

11 37 31 3/8 39 130 11 13 88 40 109 30 52 21.5 15 25 to 1400 1/3.5 stroke 40 M10 x 1.25 65 69 45 10 21 15 11 36 30 3/8 42 130 11 13 95 46 118 30 52 12 15 25 to 1400 50 M10 x 1.25 76 85 52 10 27 19 11 43 35 1/2 46 142 14 18 115 58 145 30 55 15 15 25 to 1400 63 M12 x 1.5 90 98 63 10 27 19 14 43 35 1/2 52 148 18 20 132 65 165 35 65 15 20 25 to 1500 1/4 stroke 80 M16 x 1.5 110 118 80 11 22 22

MHZ

14 22 30 4 4 6 10 14 22 30 4 4 6 10 14 22 30 6 10 16 20 25 32 40 6 10 16 20 25 32 40 6 10 16 20 25 32 40 32, 40 Double acting Normally closed Normally open Single acting 3.7 13 38 57 83 161 267 JIS Symbol Double acting Note 1) Values based on pressure of 0.5 MPa, gripping point L = 20 mm, at center of stroke.

MHZ

0.4 MPa 0.3 MPa 0.2 MPa MHW 5 L MRHQ 0 10 20 30 40 50 Misc.

JIS Standard Hydraulic Cylinder

With rod boot Stroke range (mm) Bore size (mm) e FD J B BB C F GA GB M NA NB P R S FT FX FY FZ SS l f Q B-rod C-rod B-rod C-rod 32 27 15 52 M10 x 1.25 58 62 38 14 21 15 11 37 31 3/8 39 130 11 13 88 40 109 30 25 to 1400 40 23 15 52 52 M10 x 1.25 65 69 45 10 21 15 11 36 30 3/8 42 130 11 13 95 46 118 30 25 to 1400 1/3.5 stroke 50 28 15 52 55 M10 x 1.25 76 85 52 10 27 19 11 43 35 1/2 46 142

CL

14 0.070 0 20 25 32 40 11 13 15 18 3.2 3.2 4.5 4.5 28 28 28 30 44 52.5 57.5 66 29 33 40 49 14 16 20 22 10 10 10 10 5.5 5.5 6.6 6.6 25 30 35 40 35.8 39.8 49.4 58.4 42 42 48 56 16 20 22 30 43.4 48 59.4 71.4 Clevis pin and snap ring are attached.

Rotary Table/

Note 10 P523020-5 30 A set of above numbers r, !2, !3, !7, !

C85

30 36 43 d6 18 18 20 20 24 28 b3 b1 l 10 10 12 12 16 20 d7 11 11 13 13 16 19 l3 10 10 10 10 12 14 Bore Model Thread e M4 x 0.7 M4 x 0.7 M6 x 1 M6 x 1 M8 x 1.25 M10 x 1.25 b d 16 16 24 24 32 40 0 8 10 12 16 20 25 8 10 12 16 20 25 KJ4D KJ4D KJ6D KJ6D KJ8D KJ10D GKM4-8 GKM4-8 GKM6-12 GKM6-12 GKM8-16 GKM10-20 8 8 12 12 16 20 6 6 8 8 10 12 8 8 12 12 16 20 8 8 10 10 12 18 5 5 6 6 8 10 4 4 6 6

C95

200 10 125 15 15 + 55(n-2)/2 n = 2, 4, 6, 8 20 20 + 55(n-2)/2 n = 2, 4, 6, 8 20 20 20 + 55(n-2)/2 n = 2, 4, 6, 8 25 25 + 55(n-2)/2 n = 2, 4, 6, 8 10 100 35 100 + 100(n-2) n = 2, 3, 4, 5 35 + 30(n-2) n = 2, 3, 4, 5 10 55 35 55 + 55(n-2) n = 2, 3, 4, 5 35 + 30(n-2) n = 2, 3, 4, 5 10 10 + 40(n-2)/2 n = 2, 4, 6, 8 10 10 + 40(n-2)/2 n = 2, 4, 6, 8 10 10 + 30(n-2)/2 n = 2, 4, 6, 8 15 10 + 45(n

CHKD/CHKG

CHKGB50 CHKGB20 -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -125 (M) -150 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M

Air Fittings & Tubing

KQ2W23-M5 30 8 31 10 M5 X 0.8 8 9.6 37 43 10 17.5 15.5 38 42 19 2.8 2.4 41 3.2 1 8 KQ2W23-01S KQ2W23-02S 10 14 1 4 8 32 38.5 18 30 37.5 KQ2W04-M5 KQ2W04-01S M5 X 0.8 11 3.0 3.0 8 10.4 16 4 1 8 4.0 4.0 23 14 10 10 1 4 KQ2W04-02S 43.5 42.5 38 11 26 33.5 42.5 30.5 40 KQ2W06-M5 KQ2W06-01S 3 3 8 M5 X 0.8 8 1 8 10 6 17 12.8 20 10 1 4 46 46.5 17 14 KQ2W06-02S 10.9 8.6 41 3 8 KQ2W06-03S 48

2 Phase Stepper Motor/Without Motor Brake Series LXP

Positioning Time Guide (for Horizontal Mount) For transfer load of 0kg For transfer load of 6kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) 200 100 50 10 1 Positioning distance (mm) 100 200 50 10 1 10 20.1 10.1 5.1 1.1 0.2 10 10.1 20.1 5.1 1.1 0.2 Speed (mm/s) Speed (mm/s) 20 10.1 5.1 2.6 0.6 0.1 20 5.1 10.1 2.6 0.6 0.1 30 6.7 3.4 1.7 0.4 0.1 30 3.4 6.7 1.7 0.4

HRX-OM-W002

20 30 40 0 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 0 10 20 30 40 [] Circulating fluid temperature[] Circulating fluid temperature[] Circulating fluid temperature[] Circulating fluid temperature[] Circulating fluid temperature[] [] Circulating fluid temperature[] Circula Circulating fluid temperature[] 50Hz 60Hz 60Hz 50Hz 50Hz

Applicable Auto Switch Model

(Tolerance 30%) 9 10 11 11 10 10 10 10 11 10 10 10 10 9 10 9 10 5.3-12 Reed Switch/Band Mounting D-A33A/D-A34A/D-A44A Applicable Actuator Series Terminal conduit: D-A3lA DIN terminal: D-A44A Series Bore size (mm) CDM2, CDBM2, CDLM2 20, 25, 32, 40 Specifications PLC: Programmable Logic Controller D-A3lA (With indicator light) Terminal conduit Relay/PLC D-A34A D-A33A Auto switch model number

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

-L) 50 L/min 40 30 25 20 15 10 5 00 5 10 15 20 25 30 kPa Pressure loss [kPa] Pressure loss [kPa] 750 kPa 50 kPa 30 0 kPa 0 kPa 20 30 kPa 50 kPa 70 kPa 750 kPa 350 kPa 10 70 kPa 350 kPa 00 10 20 30 40 50 Flow [L/min] Flow [L/min] PF2M711(-L) 100 L/min PF2M721(-L) 200 L/min 40 90 80 70 60 50 40 30 20 10 00 50 100 150 200 Pressure loss [kPa] Pressure loss [kPa] 750 kPa 30 30 kPa 0 kPa 0 kPa