VDW

2 3 4 5 n U side VDW23-GVDW23-GVDW23-GVDW23-G70 31.5 21 18.5 (OUT port) n-1/8 n-M5 x 0.8 11 P = 22 11 4.5 1.5 54 6 32 6 (19.5) 9.5 11 9.5 11 4-M4 x 0.7 46 10 24 10 When w/o bracket, M3 threads at both ends (4 positions) can be used for other purposes.

Table of Contents - Tubing

200 LX5 + 200 LX3 + 200 LX5 + 200 LX3 + 200 1 2 3 1 2 3 1 2 1 2 1 2 3 to 90 3 to 90 3 to 63 3 to 90 3 to 66 3 to 44 3 to 90 3 to 40 3 to 45 3 to 35 3 to 35 3 to 30 4 2.5 6 4 8 5 10 6.5 12 8 B (Black), W (White), R (Red), BU (Blue), Y (Yellow), G (Green), C (Transparent), YR (Orange) L* is calculated by the number of coils (N) x O.D. 10Clean Series (Example) 10-TCU0425B-1 TUB-11 Polyurethane

Sine Rodless Cylinder Series REBR Direct Mount Type

range Usable range 5 5 5 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 7 8 9 10 11 7 8 9 10 1112 13 14 15 Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) B: Maximum speed Load weight chart > 100 REBR32 REBR25 10 REBR15 1 0.1 100 200 300 400 600 500 Maximum speed U (mm/s) 62 Series

CE

phase J 24-M3 x 0.5 A B C D t A COM COM COM B DC12V GND F.G.

Sine Rodless Cylinder Series REA

SN-032B SN-040B Applicable bore size (mm) 25, 32 40 8 M26 x 1.5 32 37 11 M32 x 2.0 41 47.3 H B 6

Series CQ2

8.63 9.20 300 180 200 180 200 3.73 4.20 5.17 5.74 Single rod Mounting (for Double Rod End) Caution Double rod 1.

2/3 Port Valve

Class B H B Class H DIN connector or DC not available.

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

B' B C Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Drain cock Drain guide R, NPT, G Operating Pressure: 0.5 (MPa) Operating pressure: 0.5 (MPa) Mounting bracket Port size Model E M3 x 0.5 Depth 8 Drain piping D C B A F G H J K B' 3 8 AMC310 75 140.5 138.5 150.5

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

C D Side support B MY-SB 2-J 2-H C D A B J M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 C 15 25 35 45 E 4.9 6.4 8 11.7 F 3 4 5 6 H 3.4 4.5 5.5 6.6 G 6.5 8 9.5 11 A 61 67 81 100 120 142 172 D 26 38 50 64 B 71.6 79.6 95 118 142 164 202 Applicable cylinder MY1W16 MY1W20 MY1W25 MY1W32 MY1W40 MY1W50 MY1W63 Model MY-S16A B MY-S20A B MY-S25A B MY-S32A B M10 x 1.5 55 14.8 8.5 9 14 80 MY-S40A B M12 x 1.75 70

CE

phase J A B C D A COM COM COM B 12 VDC GND F.G.

CE

phase J B C D A A COM COM COM B 12 VDC GND F.G.

ISA2

6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Throttle ZSP 2 port solenoid valve ISA2 Spacer Regulator Y20 IS ZSM Terminal block box ISA-11-L (Centralized wiring/Supply port left) ISA-11-R (Centralized wiring/Supply port right) PF2 IF IN Data Spacer Y20 Seal for additional station ISA-7-B End plate L ISA-6-A End plate R ISA-6-B ISA-7-A When

LEF-OM006xx

.38 5.3 <> NPNPNP LEFS16A-100 NPN -14- 2.4. 16/25/32 40 22 21 1 12 2 13 3 14 4 15 5 16 NBR 6 17 7 18 8 A 19 9 B 20 10 21 11 22 1 12 2 13 3 14 4 15 5 16 NBR 6 17 7 18 8 A 19 9 B 20 10 21 11 22 -15- 1 14 2 15 3 16 4 17 5 18 6 19 NBR 7 20 8 21 9 A 22 10 23 11 24 12 25 13 -16- 3. 3.1. 1 I/O LEC-CN5-* / PLC 1 2 DC24V

Stability of suction position,

492 490 502 ZP3E-YF80UMJB ZP3E-YF100UMJB Width across flats 17 Bushing Bushing Width across flats 17 8 8 50 8 8 50 Bushing Bushing Width across flats 30 M22 x 1.5 Width across flats 30 M22 x 1.5 24 33 A B 21.5 30.5 A B Rc1/8 Rc1/8 D D D D 32 32 61 50 53.5 22.61) 5 56 25.11) 7 4 4 30 (Rotating angle) 30 (Rotating angle) 83 80 103 100 D-D D-D 22 22 26 26 11 11 Dimensions Dimensions Model A

CC

When selecting a converter by its nominal diameter, the converters oil level speed should be 0.2 m/s or less. 25 600 500 400 100 CRA1H100-180 200 20 CRA1H100-90 300 300 100 CRA1H80-180 200 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 200 150 CRA1H80-90 50 CRA1H63

MGC

View A-A Bore size (mm) Stroke range (mm) AF AE AD AC AB AA A G F E D C B AP H 20 25 32 40 50 75, 100, 125, 150, 200 25 62 15.5 13 11 84 5.6 90 45 24 106 M5 x 0.8 depth 10 9.5 depth 6 22 M6 x 1 depth 10 30 65 16.5 13 15 89 6.8 103 45 26.5 120 11 depth 8 M6 x 1 depth 12 M8 x 1.25 depth 14 27 75, 100 125, 150 200, 250 300 35 70 16.5 13 15 94 6.8 118 50 26.5 135 11 depth 8 M6 x 1 depth 12 M8

17

Side support B MY-SB 2 x J MY1B MY1B MY1H E A B MY1B C D MY1M (mm) MY1C A 61 70 87 B C D E F G H J Part no.

25

Install the product according to the dimensions shown in the following figure, keeping away from structures or conductive items. 200 200 150 60 150 Unit: mm 435 IZS40/41/42 Series Specific Product Precautions 2 Be sure to read this before handling the products. Mounting Wiring/Piping Caution Warning 11.

NAAMS Standards Compliant

] CKZ-63A037 ACA037M 135.0 2.1 CKZ-63A038 ACA038M 165.0 2.3 CKZ-63A039 ACA039M 195.0 2.5 CKZ-63A040 ACA040M 225.0 2.7 CKZ-63A041 ACA041M 255.0 2.9 CKZ-63A042 ACA042M 285.0 3.1 70 mm offset: Machined 120 mm offset: Machined A B C D A B C D E F E F H G H G I J K L M N O I J K L M N O 11 through 8F7 through +0.028 +0.013 +0.028 +0.013 8F7 through 11 through 300.025 300.025 300.025 300.025 300.025

Vacuum Unit

Do not let the gasket get caught. 11) Mount the end plate U and D with the appropriate length of tension bolts for the number of stations required. (Tightening torque: 0.75 Nm.) 12) Mount the connector for all stations to the junction box B. (Refer to ) (Engage the recess of the connector and the protrusion of the junction box B.