High Vacuum L Type Valve

Bonnet assembly/Part indication number (1) Temperature specifications Indicator Valve size 16 25 40 50 General use Without XLA16-30-1-2 XLA25-30-1-2 XLA40-30-1-2 XLA50-30-1-2 With XLA16A-30-1-2 XLA25A-30-1-2 XLA40A-30-1-2 XLA50A-30-1-2 High temperature Without XLA16-30-1H-2 XLA25-30-1H-2 XLA40-30-1H-2 XLA50-30-1H-2 With XLA16A-30-1H-2 XLA25A-30-1H-2 XLA40A-30-1H-2 XLA50A-30-1H-2 Temperature

CE2

10 10 10 54 32 26 11 22 20 44 16 11 15 6 27 71.5 60 42 22 21 150.5 8 M8 x 1.25 25 to 800 25 to 650 50 35 12 13 10 59 40 27 11 27 21 52 20 10 17 9 32 80.5 70 46 24 28.5 162.5 11 M8 x 1.25 25 to 800 25 to 650 60 35 15 18 10 67 40 26 27 23 64 20 13 17 9 32 98.5 85 48.5 24 28.5 174 11 M10 x 1.25 13.5 25 to 750 25 to 600 70 40 17 23 14 72 52 30 32 23 78 25 15 21 11 37 117.5 102 55 26.5 36 189

Round Type Hydraulic Cylinder

13 26 19 15 25 Up to 800 19.5 M10 x 1.25 22 17 32 12 16 12 8 46 6 8 32 5.5 7 28 121 5.5 40 55 13 28 19 15 32 Up to 800 21 M14 x 1.5 24 22 38 16 19 12 8 53 8 9 40 7.5 7 30 133 6 45 60 13 36 19 15 40 Up to 800 21 M16 x 1.5 24 24 41 18 21 14 11 54 10 11 48 7.5 9 35 158 6 55 75 19 44 24 21 (mm) Foot bracket plate thickness is dimension LT + 1 mm.

Vacuum System Peripherals:

30 e Valve Model Fill in the blanks below with symbols of necessary specifications.

EXxx-OMY0006CN

Fig. 11-1 EX245-DX1 EX245-DX1 EX245-DX1-36 70 No.EX##-OMY0006CN 11.2. Table 11-1 EX245-DX1 (W x L x H) mm 54 x 120 x 61 280g , PBT 24 V DC 1.6 V 50 mA 8 x M125 A code 2 / US1 30V /1 0.5A /1 2 A 1 16 PNP ON 11 to 30 V OFF -3 to 5 V 1.5mA ON Typ. 4.5 mA 24VDC 71 No.EX##-OMY0006CN 11.3.

ZQ-OM01401

) 54 (51) 81 1) ( ) 2) ZQ05A0.35MPaZQ07AZQ10A0.43MPaZQ000A0.4MPa 3) (PD) V PD [MPa] ZQ05A ZQ07A ZQ10A ZQ000A 0.05 11 10 8 16 0.15 22 20 17 32 3.2 0.25 31 29 24 46 0.35 44 39 31 60 0.45 54 48 38 74 0.05 11 11 9 16 0.15 24 22 18 33 4 0.25 34 32 27 48 0.35 46 42 35 62 0.45 57 52 44 76 0.05 12 11 9 16 0.15 25 24 20 33 6 0.25 37 34 30 47 0.35 49 45 39 63 0.45 61 56 48 77 3 39 - No.ZQ-OM01401

XL-OMY0002

P19 6 XL-OMY0002 3. 3 5 P11 25 40 50 XLD25-30-1 XLD40-30-1 XLD50-30-1 XLD25-30-1H XLD40-30-1H XLD50-30-1H 63 80 100 160 XLD63-30-1 XLD80-30-1 XLD100-30-1 XLD160-30-1 XLD63-30-1H XLD80-30-1H XLD100-30-1H XLD160-30-1H 1) M9// XLD25-30-1-M9// 2) 3) FKM:No.1349-80XLD25-30-1-XN1 4) S / 25 40 50 AS568-030V AS568-035V AS568-039V AS568-030 ** AS568-035 ** AS568-039 ** B2401-V24V B2401

JXCx-OMT0001CN

PLC 11.

C95Series

I-B DA DB DL lou number II:, Imm) IDe OX D E DO (>"UN 'u, O S DH Z DDH9-: 32 164 10"" 36 18' 12 ' 45 202 ". . . , 46 31 21 18 5 38 26 51 6.5 6.6 11 7 41 28 54 6.5 6.6 11 9 ' 50 32 65 7.5 9 15 11 52 35 24 22 5.5 65 45 33 30 6 50 222 16' '" 52 40 67 7.5 9 15 11 66 50 86 10 11 16 12.5 ' 75 50 37 35 6.5 95 60 47 40 6,5 63 250 16 ' ." 76 60 96 10 11 18 1 3 5 71 70 20 114 70 55 50 7.5 ~, Rotating

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

, 15, 20 25, 30, 35, 40 45, 50 12, 16 20, 25 Dimensions ...10 &11 Series CQS How to Order . 1 12 16 20 25 5, 10 Construction . 12 Solid state switch D-M9N, F9NV D-M9P, F9PV D-M9B, F9BV D-F9NW, F9NWV D-F9PW, F9PWV D-F9BW, F9BWV Dimensions ...13 to 16 Series CQSK How to Order . 1 12 16 5, 10, 15, 20, 25, 30 Construction . 17 20 25 5, 10, 15, 20, 25, 30 35, 40, 45, 50 Dimensions ...18 &19 Note

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

15.5 Mounting hole for M2.5 5.5 (30) 38 (14) 46.5 8 3.5 32.2 33 Residual pressure release manual override DIN rail clamp screw 11 Residual pressure release manual override 29.5 (17.5) 38 U side D side Stations 1 2 3 n (43) 2.5 (22.5) 0.5 2n-C3, C4, C6, M5 C3: One-touch fitting ass'y for 3.2 C4: One-touch fitting ass'y for 4 2n-C3, C4, C6, M5 C3: One-touch fitting ass'y for 3.2 C4: One-touch

3

With arm Port side CK1 Rotary direction: L During unclamping (Extension end) Rotary direction: R During unclamping (Extension end) M CLK2 N With Arm Model (mm) I N O P U V 4 5 8 11 29 36 20 25 8 11 M3 x 0.5 M4 x 0.7 MKB12-Z MKB16-Z CLKG CKQ CLKQ 10 mm Clamp stroke M O I P Model Rod state CK CLK 20 mm 30 mm Retracted Extended Retracted Extended 28.5 46 31.5 49 38.5 66 41.5 69 48.5 86 51.5

Guide Cylinder Series MGG

M N C D 4-O T Q 2-P E B S K L U W AA A I AP R X AB Y + Stroke J V Z + Stroke AC AD 8-AF AE For standard stroke (mm) Bore size (mm) Stroke range (mm) AC E D AF G AE AD AB AA N M F L K B J AP C H I A 20 25 32 40 50 75, 100, 125, 150, 200 M5 x 0.8 depth 10 16.5 92 60 9.5 depth 6 30 75 11 12 45 25 5.5 80 60 55 108 M8 x 1.25 depth 14 25 24 30 99 M6 x 1 depth 12 16.5 113 65 11 depth 8 30 85 13

Auto Switch Guide

D-A90V OUT() Brown Contact protection box CD-P11 CD-P12 Reed switch OUT ( ) Blue (g) Weight D-A93V D-A96 D-A96V D-A90 D-A90V D-A93 D-A93V Model 8 8 Lead wire length: 0.5 m 6 6 6 6 LED Brown (Red) OUT (+) Brown Contact protection box CD-P11 CD-P12 41 41 Lead wire length: 3 m 30 30 30 30 Resistor Reed switch Zener diode Dimensions OUT () Blue D-A90, D-A93, D-A96 Blue (Black) D-A96V DC (+

Auto Switch Guide

D-A90V OUT() Brown Contact protection box CD-P11 CD-P12 Reed switch OUT ( ) Blue (g) Weight D-A93V D-A96 D-A96V D-A90 D-A90V D-A93 D-A93V Model 8 8 Lead wire length: 0.5 m 6 6 6 6 LED Brown (Red) OUT (+) Brown Contact protection box CD-P11 CD-P12 41 41 Lead wire length: 3 m 30 30 30 30 Resistor Reed switch Zener diode Dimensions OUT () Blue D-A90, D-A93, D-A96 Blue (Black) D-A96V DC (+

modular-press-e

-30 HNBR 136147-30 Oil-free specification 136148 NBR 136148 Standard model HNBR 136148-30 Oil-free specification 136148-30 O-ring G NBR KA01731 Standard model for digital pressure switch KA01731 KA01613 HNBR KA01613 Oil-free spec. for digital pressure switch 136149 NBR 136149 Standard model O-ring H 136149-30 HNBR 136149-30 Oil-free specification Fitting assembly J Refer to page 239.

Modular F.R.L. Pressure Control Equipment

-30 HNBR 136147-30 Oil-free specification 136148 NBR 136148 Standard model HNBR 136148-30 Oil-free specification 136148-30 O-ring G NBR KA01731 Standard model for digital pressure switch KA01731 KA01613 HNBR KA01613 Oil-free spec. for digital pressure switch 136149 NBR 136149 Standard model O-ring H 136149-30 HNBR 136149-30 Oil-free specification Fitting assembly J Refer to page 239.

Round Type Low Pressure Hydraulic Cylinder Series CH
M

19 15 15.5 25 to 800 22 17 32 12 16 12 8 46 6 8 32 5.5 7 28 121 5.5 40 55 M10 x 1.25 13 28 19 15 19.5 32 to 800 24 22 38 16 19 12 8 53 8 9 40 7.5 7 30 133 6 45 60 M14 x 1.5 13 36 19 15 21 40 to 800 24 24 41 18 21 14 11 54 10 11 48 7.5 9 35 158 6 55 75 M16 x 1.5 19 44 24 21 21 (mm) Foot bracket plate thickness is dimension LT + 1mm.

Compact and Lightweight

ZH20DA-10-12-12 112.2 62.2 Metric ZH05DA-07-07-07 11.15 11.15 11.15 1/4" 1/4" 1/4" 13.3 13.3 13.3 51.8 34.9 19.4 18.4 11 14 6 3.2 5.5 20 17 4.2 3.2 28 9.6 ZH07DA-07-07-07 55 ZH10DA-07-07-09 13.2 5/16" 14.2 61.7 ZH13DA-09-11-11 13.2 15.45 15.45 5/16" 3/8" 3/8" 14.2 15.6 15.6 71.8 43.9 22.4 24.4 17 20 9 4.3 7.8 27 22 4.2 35 12 ZH15DA-09-11-11 83.6 51.4 ZH18DA-11-13-13 15.45 19.3 19.3 3/8" 1

VQ7-6/7-8

) 44 (58) 44 (58) Indicator light 5-Rc3/8, 1/2, 3/4 (P, A, B, R1, R2) Rc1/8 Port Y (PE) SMC 108.5 (121.5) 23 (30) (ports A, B) 12 Y 50 (63) 3 5 38 (53) 38 (53) 32 (42) 1 23 (30) 2-Rc3/8, 1/2, 3/4 Ports R1, R2 Rc3/8, 1/2, 3/4 Port P Rc1/8 Port X (PE) 2-Rc3/8, 1/2, 3/4 Ports A, B 30 (42) 30 (42) 10 (11) Dimensions inside ( ) are for Rc3/4 2 position/Single : VQ7-8-FG-DSC Single (reverse pressure