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11 10 Since this is a guideline including hysteresis, not meant to be guaranteed.

SL5201 0.5 to 10 psig (0.0034 to 0.07 MPa) SL5202 0.5 to 30 psig (0.0034 to 0.2 MPa) SL5206 1 to 60 psig (0.007 to 0.4 MPa) SL5210 1 to 100 psig (0.007 to 0.7 MPa) 100 mm Hg absolute to 10 psig (-88kPa to 0.07 MPa) Select compatible materials of construction for the gas Vacuum to 150 psig (1.0 MPa) 500 psig (3.4 MPa) 1000 psig (6.9 MPa) 40 to 160C (40 to 71C) (No freezing) 1) 0.07 2 x 10-11

3 6 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 07, 08, 09, 10, 11 Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations ASD530F ASD630F 1500 1000 14 10,11 12 20 Flow rate (l/min (ANR)) Flow rate (l/min (ANR

11 Series IR1000/2000/3000 Series IR3000 Flow Characteristics Relief Characteristics Pressure Characteristics Testing methods conform to JIS B 8372.

(Product with a lead wire length of 0.5 m is not available.) 18 Prior to Use Auto Switches Common Specifications 2 Refer to the Auto Switch Precautions on pages 8 to 11 before using auto switches. Meaning Term Hysteresis A deviation amount between the ON position and OFF position caused by auto switch characteristics (difference in sensitivity between ON and OFF).

Right angle type cable connector 3 m 52 10 ARJ (33) Straight type cable connector 3 m AR425 to 935 52 12.5 ARX AMR Setting part ARM 10 M12 x 1 Cable connection thread (Plug type) 5.5 8 ARP 111 11 Digital pressure display IR-A M5 x 0.8 Solenoid valve EXH Breathing IR M4 x 0.7 depth 8 F.G.

End Plate (D side) p. 11 Dimensions p. 12 LED Display p. 15 Technical Data p. 22 Important p. 22 Safety Instructions Back Cover 6 Wireless System EX600-W Series RoHS How to Order EN W EX600 1 SI Unit Wireless compatible Output type Symbol Specifications 1 PNP 2 NPN SI unit Symbol Specifications Note EN Wireless master unit For EtherNet/IP SV Wireless slave unit Wireless master

ITVH N Bracket dimensions With auto drain Model Port size A M L K J H G F E D C B L 178 211 277 321 B 260 298 366 436 T 9 9 11 11 S 8 16 21 26 R 78 97 98 115 P 50 35 45 46.5 U (Body) V (Adapter) 1 4, 3 8 1 4, 3 8 AMR3000 AMR4000 AMR5000 AMR6000 144 166 188 230 182 215 281 325 21.5 18 16 18.5 37 37 42 42 3.2 3.2 4.5 4.5 32 40 48 56 28 37 37 44 51 61 66 81 101 121 131 161 10 10 45 70 260 302

/16" 18 68 20.3 23.1 25.9 26.5 107 116 220 230 14.4 50.3 56.2 19.8 41.9 NPT 1/8 NPT 3/8 1/2" 23 46.9 19 18.3 61.8 70.3 26.5 57.3 NPT 1/4 NPT 1/2 28.6 64.8 15/16" 11/16" Reference dimensions of NPT thread after installation. 15-10-3 4 Series ASP Construction w @0 !

When mounting is performed, make connections while confirming port indications. 11 SMC'S GLOBAL MANUFACTURING, DISTRIBUTION AND SERVICE NETWORK EUROPE SWEDEN SMC Pneumatics Sweden AB SWITZERLAND SMC Pneumatik AG. UK SMC Pneumatics (U.K.) Ltd. EUROPE AUSTRIA SMC Pneumatik GmbH. CZECH SMC Czech s.r.o.

bore depth 3.3 3 3 OUT 9 2-1.2 x 12l AW (spring pin) 1 (16) 5.6 3.2 28 0.2 28 0.2 22.7 37 35 16 6.3 5 2.1 M3 x 0.5 x 12.5l and M3 x 0.5 (hexagon bolt) (hexagon nut) 6 2-M3 x 0.5 (through) 2-M5 x 0.8 thread depth 4.5 (piping port) IN 7 2-M3 x 0.5 (through) 13 + ST 2-M5 x 0.8 thread depth 4.5 (piping port) (same on reverse side) 10 2-M3 x 0.5 thread depth 4.5 (same on reverse side) 4 8 6 11

No.EX-OMP0004CN-I SI (CC-Link ) // EX260-SMJ 2 8 9 10 10 11 LED 16 21 26 26 27 28 -1No.EX-OMP0004CN-I (ISO/IEC)(JIS) 1) 2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating

1000 1600 0.3 0.2 7 3 8 11 15 11 15 14 20 16 25 22 32 22 32 28 40 28 40 33 50 33 50 0.7 0.5 1 2 VC 3 4 1.0 0.8 VDW 1.4 1.2 1 VQ 1 4 1 2.4 2.2 VX2 5.2 5.0 32 VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1 2 1 3.8 3.6 VX3 7.0 6.8 40 JIS Symbol Valve type

N.C. 6A 8A 10A 10A 15A 20A 25A 32A 32F 40A 40F 50A 50F 1 8 1 4 3 8 3 8 1 2 3 4 7 1 15 2 20 25 3 4 1 1 1 4 32 5 11 4 B Flange 11 2 40 6 11 2 B Flange 2 7 50 2 B Flange 17-4-38 3 Series VND Steam Valve: 2 Port Valve For Steam Model Port size Flow characteristics Weight (kg) Av x 10-5 Orifice size (mm) Model Rc Flange Note) VND10D-6A VND10D-8A VND10D-10A VND20D-10A VND20D-15A VND30D-20A VND40D

Dimension in parentheses shows Q5 (M5 x 0.8). 13-4-11 11 Series ZM For Single Unit/With Valve Basic Type with Switch and Valve ZM1 -K-E H M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2-4.5 Release flow adjusting needle Release valve Supply valve

FGF3 35 58 85 90 95 100 Flow coefficient (%) 500 1000 1500 2000 2500 FGF5 These relationships between fluids and kinematic viscosity are for guideline purposes only.

0 500 1000 1500 Flow rate L/min (ANR) Flow rate L/min (ANR) AR40-A Rc1/2 AR40-06-A Rc3/4 0.6 0.6 0.5 0.5 Outlet pressure (MPa) Outlet pressure (MPa) 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 1000 2000 3000 4000 0 0 1000 2000 3000 Flow rate L/min (ANR) Flow rate L/min (ANR) 452 Regulator AR10-A to AR40-A Series Pressure Characteristics (Representative values) Conditions: Inlet pressure 0.7 MPa,

C[dm3/(s.bar)] b Cv characteristics 0.50 0.40 0.17 Lubrication Not required Min. operating pressure -100kPa Max. operating pressure 1.0MPa Ambient temperature and operating fluid temperature Note 1) -10 to 80C Allowable torque Note 2) 0.003 Nm or less 0.03 Nm or less 0.05 Nm or less 0.10 Nm or less 0.20 Nm or less Allowable rotation speed 3000 min-1 (r.p.m.)Note 3) 2000 min-1 (r.p.m.) 1500

Features 11 Series LX Dedicated Stepper Motor Driver & Positioning Driver Series LC6D/LC6C Series LC6D/LC6C Series LC6D Series LC6C Stepper Motor Driver LC6D Teaching Box Positioning Driver LC6C To power supply To power supply PLC Positioning unit (Not incl. To be provided by customer.) PLC Electric Actuator (Not incl. To be provided by customer.)

Alternately, the range input function can scale any 1-5V or 4-20mA signal from another sensor type to a display value from -1500 to 1500.  View the sensor's measured value on the main screen, while also viewing a variety of secondary data on the sub-screens, including switch set point value, level meter, character string for labeling and more.