3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

23 or less 30 or less Exhaust center 3 position Rubber seal 12.6 (0.7) VQZ2451 25 or less 33 or less Metal seal 7.2 (0.4) VQZ2550 23 or less 30 or less Pressure center Rubber seal 9.0 (0.5) VQZ2551 25 or less 33 or less Metal seal 16.2 (0.9) VQZ3150 17 or less 22 or less Single 94 Rubber seal 21.6 (1.2) VQZ3151 25 or less 33 or less 2 position Metal seal 16.2 (0.9) VQZ3250 10 or less 13

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications Made to Order Specifications Clean room specification Dust seal specification TSUBAKI CABLEVEYOR specification Clean room specification (-X60) LJ1H 10/20/30 (Horizontal mount/Vertical mount) Page 104 Dust seal specification (-X70) LJ1H 10/20/30 (Horizontal mount/Vertical mount) 110 LJ1S 10/20/30 (Horizontal mount) 116

Plate Cylinder with Lock Series MLU

I-MU02 I-MU03 I-MU04 I-MU05 R1 3 4 5 6 NZ 18 22 26 32 NX 9 11 13 16 NO 21 24 27 39 NL 8 10 10 16 R1 8.5 10 11 16 NDH10 NL 8.5 10 11 16 NX 9 11 13 16 NO 19.5 24 26 36 U1 11 14 15 20 U1 13 14 17 23 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 Knuckle pin and snap ring are included. Clevis pin and knuckle pin Rod end nut 30 d Dd9 d D C l m m t t L H B (mm) (mm) Part no.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

150 W 35 50 50 50 60 X 19 25 30 40 40 D 16.6 21.6 26.4 33.6 41.6 ZZ 103 132 137 156 182 E 3 2 2 2 3 N 11 18 18.5 20 26 F 10 13 13 16 16 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 G 5.5 7.5 7.5 8 11 NN M10 x 1 M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 H 13 20 20.5 22 29 I 12 15 18 23 J 6 6 8 8 10 K 11 8 10 15 16 L 57 66 70 80 92 P (Piping port) Model Mounting nut/Included in the package (2 pcs

MY1

35 49 10 13 35 43 24 28 28 30 200 236 22 25 128 152 424 490 74 92 Hole Size for Centralized Piping on the Bottom (Mounting side should be machined to these dimensions.)

reduces flow setting time

thread Uni thread size Wrench tightening angle after hand-tightening [deg] Tightening torque [Nm] 1/8 30 to 45 3 to 4 1/4 15 to 30 4 to 5 3/8 15 to 30 8 to 9 1/2 15 to 30 14 to 15 By chamfering as shown in the table below, machining of threads is easier and effective for burr prevention.

IDX-OM-W023

-10 IDU Series 12-1 IDX-OM-W023 12.S 12-2 L N PE M3 6.5mm 2 1.25mm 12-3 1-1 IDU Series 12-2 IDX-OM-W023 13 T 13 T 13-1 IEC 13-2 AC200V / 2A DC24V / 2A ( 20V / 5mA) 13-3 ON 3 () 5 /1 () IDU Series 13-1 13 1 IDX-OM-W023 13 T 13-4 1 PE L N 3 2 L,N: PE: LN PE M3 (0.63Nm) 6.5mm 1.25mm 17 17 2 () () IDU Series 13-4 13 2 IDX-OM-W023 13 T 13-5 IDU8E-10-T IDU8E/11E-20-T GFCI

Thermo-chiller

40 Sensitivity of leak current mA 30 Rated operating current 50/60 Hz Note 5) A 13/14 16/19 Rated power consumption 50/60 Hz Note 5) kW 3.4/4.4 (4.4/5.0) 4.6/6.0 (5.6/6.6) Noise level (Front 1 m/Height 1 m) Note 5) dB (A) 70 70 Waterproof specication IPX4 Accessories Alarm code list stickers 2 pcs.

Rotary Table/

FU) 34.7 65h8 67h8 32H8 9 22H8 16.5 27 67 DL DK (Through) 51.7 75h8 77h8 35H8 10 26H8 17.5 30 76 (mm) AA A AU AV AW AX AY BA BB BC BD BE CA CB D DD DE DF DG FA FB FC FD H J JA JB Size 10 20 30 50 55.4 50 8.6 20 15.5 12 4 9.5 34.5 27.8 60 27 4.5 28.5 45h9 46h9 20H9 5 15H9 8 4 3 4.5 13 6.8 11 6.5 70.8 65 10.6 27.5 16 14 5 12 46 30 76 34 6 30.5 60h9 61h9 28H9 9 17H9 10 6 2.5 6.5 17 8.6 14 8.5

Miniature Fittings M3, R(PT) 1/8, M5 Series M

I.D. 40.9 40.3 27.6 27 15.5 15.2 1.5 1.6 13 17 23 22 KFH04-00 KFH06-00 KFH08U-00 KFH08N-00 KFH10U-00 KFH10N-00 KFH12U-00 KFH12N-00 2.5 4 5 6 6.5 7.5 8 9 4 6 8 10 10 12 6 11 17 21 30 35 45 3 4 5 5.5 6.5 7 8 8 16.2 41.3 28 12 14 36 10 18.8 17 17 44.6 30 42 41 12 19.3 17 19 45.5 32 Male elbow: KFL Applicable tube (mm) Thread R(PT) Part No. H1 (Hex.) H2 (Hex.)

IDX-OM-W014

.S 12-2 L N PE M3 6.5mm 2 1.25mm 12-3 1-1 IDU Series 12-2 12-2 IDX-OM-W014 13 T 13 T 13-1 IEC 13-2 AC200V / 2A DC24V / 2A ( 20V / 5mA) 13-3 ON 3 () 5 /1 () IDU Series 13-1 13 1 IDX-OM-W014 13 T 13-4 PE 1 2 3 LN PE PE: LN: M3 6.5mm 1.25mm 2 () () IDU Series 13-4 13 2 IDX-OM-W014 13 T 13-5 IDU3E/4E-10-T IDU3E/4E/6E-20/23-T AC200 / 200,220V (50,60Hz) AC100/100,110V

CL

CLG-020-24 CLG-025-24 CLG-032-24 CLG-040-24 20 25 32 40 13 15 17 21 3.2 3.2 4.5 4.5 21.2 21.3 25.6 26.3 47.8 54.8 57.4 65.4 42 42 48 56 26 28 28 36 28 28 28 30 50 57 61.4 71.4 CG-020-24A CG-025-24A CG-032-24A CG-040-24A 20 25 32 40 13 15 17 21 3.2 3.2 4.5 4.5 18.1 20.7 23.6 27.3 35.8 39.8 49.4 58.4 42 42 48 56 16 20 22 30 28 28 28 30 38.3 42.1 53.8 64.6 Rod End Nut Clevis Pin Knuckle Pin

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

M2 M3 m1 m2 m3 16 25 40 16 25 40 7 6 7 15 13 13 MY2H 28 26 26 32 30 30 60 50 60 62 62 62 46 55 46 20 18 18 100 120 100 38 35 35 MY2HT 200 220 200 80 80 80 The above values are the maximum allowable values for moment and load. Refer to each graph regarding the maximum allowable moment and maximum allowable load for a particular piston speed.

MXW Series Long Stroke Slide Table

) 5H9 +0.03 depth 4.5 0 6 38 5 22 12 Y Y 25 40 84 L 10 13 13 K A 30 24 15.8 A Z NN-M4 x 0.7 thread depth 8 Bottom through hole 3.3 (N-1) x H G N-M4 x 0.7 thread depth GG HH H 6 depth 4.5 5H9 +0.03 Bottom through hole 3.3 0 5H9 +0.03depth 4.5 0 F E G F E Model HH H GG J Z N L K NN 64 106 71 MXW875 30 19 92 228 5 45 31 1 98 112 106 MXW8100 32 34 115 278 5 70 56 1 121 144 129 MXW8125 32 32

Secondary Batteries

, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50,7 5, 100, 125, 150 *90and 91-series MXQ6 products do not have shock absorbers.

VZ100/300/500

Material Aluminum die-casted Note Platinum silver Black Black Description Sub-plate Material Aluminum die-casted Epoxy/Stainless steel NBR Description No. q w e r t y DXT200-13-1P Piston plate Body DXT170-C13 x 11 x 1 Solenoid assembly O-ring Resin Aluminum die-casted Common with VZ100 End cover Piston Spool valve assembly Spool spring Thread type Resin Sub-plate part no.: DXT200-13-1P Nil

Booster Regulator/Air Tank

PVQ VY1 VBA VBAT VBA VBAT AP100 Booster Regulator/VBA Series Air Tank/VBAT Series 1007 Booster Regulator VBA Series Reduced by 13 dB (A) compared with the current model compared with the current model Reduced by 13 dB (A) Improved service life that of the current model Doubled that of the current model Doubled Reduced noise Floating piston structure Grease retaining groove Metal noise

CXS

Bore size/Stroke (mm) Bore size (mm) 6 10 15 20 25 32 Standard stroke 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

CXS

Bore size/Stroke (mm) Bore size (mm) 6 10 15 20 25 32 Standard stroke 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

MXW

13 K A 30 24 15.8 A 3 Z NN-M4 x 0.7 thread depth 8 Bottom through-hole 3.3 (N 1) x H G H 6 Bottom through-hole 3.3 N-M4 x 0.7 thread depth 8 GG HH depth 4.5 5H9 +0.030 0 5H9 +0.030 depth 4.5 0 F E (mm) F G Model E J GG H HH NN K L N Z MXW8-75 106 64 71 92 19 30 1 31 45 5 228 MXW8-100 112 98 106 115 34 32 1 56 70 5 278 MXW8-125 144 121 129 138 25 32 32 2 81 95 6 328 MXW8-150 176 141 149