MLU

2-DR CZ 2-CR DH CH DI CI DE DF CE CF DL CL DA DB CA CB CDH10 (mm) DDH10 (mm) CJ 7 10 10 14 CI 17 22 27 32 CH 11 13 13 17 CF 4 7 10 12 CE 3.5 3.5 3.5 5.5 CB 23 27 31 37 CA 53 67 85 103 DJ 7 10 10 14 DI 17 22 27 32 DH 11 13 13 17 DF 4 7 10 12 DE 3.5 3.5 3.5 5.5 DB 23 27 31 37 DA 53 67 85 103 Size 25 32 40 50 Size 25 32 40 50 Part no.

Cylinder with Lock Series MNB

14 28 12 13 13 13 to 500 19.5 54 10 83 45.5 40 1/8 12 35 10 30 22 8 52 104 38 10 14 28 16 13 14 16.5 to 500 27 63 14 91 52.5 50 1/4 15 40 12.5 35 27 11 65 120.5 46.5 14 20 40 20 14 15.5 19 to 600 32 75 18 104.5 58.5 63 1/4 12 45 17.5 35 27 11 75 134.5 56.5 14 20 40 20 14 16.5 23 to 600 32 90 18 119.5 68 80 1/4 18 45 22 40 32 13 95 169 72 22 30 60 25 20 19 33 to 750 37 102 22 150 81 100 1

C76

20 30 b3 b1 14 16 l 20 22 d7 19 22 Bore 32 40 Model KJ10DA KJ12DA Bore 32 40 dH71 10 12 10.5 12 13 13 CA2 CS1 C76 C85 Floating joint/Series JA JA25/40 C95 CP95 NCM NCA D-X (mm) 20M Max. operating tension and compression power (kN) Maximum screwed depth P Allowable eccentricity U A B D E F G H Bore Model Pitch Data Nominal thread dia. 32 40 JA25-10-150 JA40-12-175 10 12 1.5 1.75 49.5 60 19.5

C76

Bore 32 40 dH71 10 12 10.5 12 13 13 CA2 CS1 C76 C85 Floating joint/Series JA JA25/40 C95 CP95 NCM NCA D-X (mm) 20M Max. operating tension and compression power (kN) Maximum screwed depth P Allowable eccentricity U A B D E F G H Bore Model Pitch Data Nominal thread dia. 32 40 JA25-10-150 JA40-12-175 10 12 1.5 1.75 49.5 60 19.5 20 24 31 5 6 8 11 8 11 17 22 9 13 0.5 0.75 2.5 4.4 6-10-17 6-10

Vacuum Equipment

NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber ZP02 ZP04 ZP06 ZP08 ZP10 ZP13 ZP16 ZP20 ZP25 ZP32 ZP40 ZP50 ZP63 ZP80 ZP100 ZP125 5 7 8 2 2 4 4 7 9 11 2 4 5 7 10 4 6 8 10 5 5 10 10 7 9 9 10 13 10 8 13 11 13 11 10 11 16 20 25 32 12 14 9 9 13 15 19 25 33 13 15 20 26 35 14 17 20 24 30 15 18 21 26 33 14 14 13 20 18 12 13 11 17

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

200 176.5 17 7 210.5 200 187 12 8 223 212.5 197.5 13 9 235.5 225 208 14 L1 L2 L3 L4 L1 L2 L3 L4 L n 12 260.5 250 229 16 L n 12 273 262.5 239.5 17 10 235.5 225 208 14 11 248 237.5 218.5 15 13 273 262.5 239.5 17 14 285.5 275 250 18 15 285.5 275 260.5 12.5 16 298 287.5 271 13.5 10 248 237.5 218.5 15 11 260.5 250 229 16 13 285.5 275 250 18 14 285.5 275 260.5 12.5 15 298 287.5 271 13.5 16 310.5

KR

(mm) Model N L1 L2 Port B Min. bore Weight (g) L3 L4 L5 L6 P Q1 Q2 MA MB FA FB KRM11-06-10-10 KRM11-06-10-6 76 10 6 6 10 29 47 19.5 31.5 21.5 31 13 13.5 17 21 7.5 10 102 6 85 10 116 41 39 55 73 KRM11-08-12-10 KRM11-08-12-6 8 12 11.5 22.5 35.5 24 34.5 15.5 14.7 18.5 22 9 57 86 Dimensions: KRM12 2-connection thread 2-4.5 mounting hole N-applicable tubing O.D.

5 Port Solenoid Valve, Series VQC

The total number of solenoids (points) must not exceed 24. 19 20 19 20 17 18 17 18 15 16 15 16 13 14 13 14 11 12 11 12 9 10 9 10 7 8 7 8 5 6 5 6 3 4 3 4 1 2 1 2 (For 26P) (For 20P) 15 Base-Mounted Type Plug-in Unit Series VQC1000/2000 1in = 25.4mm VV5QC11 (L3) (L4) L2 65 51 L1 28 P = 10.5 1.5 (12) 13 Indicator light 1.5 Manual override (5.5) 93.5 Approx. 2 (35) 66 75 37.5 Mounting hole for

JXCx-OMU0004

CPU CPU E 68 No.JXC-OMU0004-A 13. / 50mm ( ) 5m 5m 10% 15m 20% 69 No.JXC-OMU0004-A 14. / 14.1.

VQ7-6/7-8

AXT500-13 VQ7060-13-2 VQ7060-13-1 VQ7060-13-3 37 x 1.6 Gasket Gasket A Gasket B Gasket C O-ring Mini Y seal Pilot valve assembly Double check spacer DIN terminal q w e r t y u i o MYN-11 MYN-16 VQZ110QVV71-FPG UKL-S1 3-10-10 11 Series VQ7-6 Manifold Specifications How to Order Manifold VV71 6 02D 02R VK Air release valve coil rating Stations 1 1 station VZ Silencer box Nil 1 2 3 4 9 None

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Applicable shaft type: W (mm) L2 Y Size (mm) 10 X L1 3 to 8 5 ( 8 Y) to (Y 1) Size 10 15 3 to 14 9 (14 X) to (X 1) 3 to 9 6 ( 9 Y) to (Y 1.5) Y = L1 = 15 20 5.5 to 18 10 (18 X) to (X 1.5) 3 to 10 7 (10 Y) to (Y 1.5) L2 = 20 30 7 to 20 10 (20 X) to (X 1.5) 5 to 13 8 ( 13 Y) to ( Y 2) X = 30 40 7 to 22 10 (22 X) to (X 1.5) 7 to 15 9 (15 Y) to (Y 4.5) Symbol: A11 The long shaft can be further

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

holes) 2.5 (Mounting holes) 2.5 A 11 A 17.5 11 17.5 44.9 300 48.9 [50.2] 58.5 (Lead wire length) (Lead wire length) 300 52.6 [59.1] 41.5 [48] 41.5 [48] 33.5 28.5 33.5 28.5 22.5 29.1 R P 22.5 R P 13 13 5 5 10 8.6 3-M5 X 0.8 10 8.6 3-M5 X 0.8 (Piping port) 23 (Piping port) 23 [ ] for AC Other dimensions are the same as the grommet

HRX-OM-X037

HRL100/200-W-40 . 9-9 9.3 Flow Diagram . 9-10 9.3.1 HRL-A-40. 9-10 9.3.1 HRL-W-40. 9-11 9.4 Cooling Capacity . 9-12 9.4.1 HRL100A40 CH1 . 9-12 9.4.2 HRL200A40 CH1 . 9-12 9.4.3 HRL300-A-40 CH1 . 9-13 9.4.4 HRL100/200/300-A-40 CH2 . 9-13 9.4.5 HRL100-A-40-T2 CH1 . 9-14 9.4.6 HRL200-A-40-T2 CH2 . 9-14 9.4.7 HRL300-A-40-T2 CH1 . 9-15 9.4.8 HRL100/200/300-A-40-T2 CH2 . 9-15 9.4.9 HRL300-A-40-

CG1

2 3 10 (12) 26.7 112 (13) 10 (12) 30.2 114 (13) (25) 10 (12) 13 13 34.6 132 (13) (25) 11.5 14.5 40.6 155 47.1 155 The minimum stroke for rod boot equipped style is 20mm.

SZ3000

Weight (g) 17.6 19.9 24.4 28.9 33.4 37.9 22.1 26.6 31.1 35.6 10 11 12 13 14 15 16 17 18 19 No. Terminal no.

42

SOL.A VQC 4/5 10 (+) () White Black 10 stations SOL.B 23 (+) () Gray Red SOL.A 11 (+) () White Red VQZ 11 stations SOL.B 24 (+) () Black White SOL.A 12 (+) () Yellow Red 12 stations SQ SOL.B 25 (+) () White None COM. Note) 13 13 () (+) Orange Red VFS Negative common specifications Positive common specifications Note) There is no polarity. It can also be used as a negative common.

NCA1

Please See Below for How to Order Piston Rod Assembly 7 Rod Bushing Bronze casting Available only as an Assembly Please See Rod/Head Cover NC1A400-10-124 NC1A200-10-124 NC1A250-10-124 NC1A325-10-124 8 Cushion Valve Carbon steel NC1A150-10-124 9 Tie Rod Carbon steel Please See Below for How to Order Tie Rod NCA325-13-Q6311 5008-131 NCA325-31-Q6311 NCA200-13-Q6309 5008-93 NCA250-13-Q6309 5008

CJ2

CJ-CF006 CJ-CR006 M3 x 0.5 6 6 8 11 8 5 6 10 CJ-T010B CJ-CF010 CJ-CR010 3.3 M4 x 0.7 10 8 10 13 10 6 8 29 2 9 4.5 3.1 18 40 22 32 12 8 +0.048 0 16 CJ-T016B CJ-CF016 CJ-CR016 5 M5 x 0.8 16 10 12 15 7 12 10 35 14 5.5 6.4 2.3 20 48 28 38 16 10 +0.048 0 6-3-11 12 12 Series CJ2 Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height Auto switch Solid state switch

CG5-S

16.5 25 8 18 12 35 5 31 M4 x 0.7 5 6 14 3 M8 x 1.25 29 1/8 9 83 13 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 25 8 16 to 300 22 19.5 17 18.5 27 10 18 12 40 6 33 M5 x 0.8 5.5 8 14 3.5 M10 x 1.25 29 1/8 9 83 13 32 10 24 to 300 22 19.5 17 20 32 12 18 12 40 6 38 M5 x 0.8 5.5 10 16 3.5 M10 x 1.25 35.5 1/8 11 85 15 40 10 24 to 500 30 27 19 26 40 16 19 13 50 8 47 M6 x 1.0 6

REC

0 -0.039 20 M8 X 1.25 18 15.5 13 9 10 8 20 13 10 41 5 33.5 5 30 20 30 150 to 700 M10 X 1.25 25 22 19.5 17 9 10 10 26 13 10 45 6 37.5 5.5 30 20 34.5 150 to 700 M10 X 1.25 32 22 19.5 17 9 10 12 26 13 11 45 6 46.5 5.5 30 22 42.5 150 to 1000 M14 X 1.5 40 24 21 22 10 15 14 32 16 12.5 50 8 56.2 7 39 26.5 51 200 to 1000 ZZ NN P RR S U Z Bore size Stroke range 1 8 1 8 1 8 1 4 20 M20 X 1.5 9 146