Size: 1/2, Reverse Flow: Regulator, Standard, Thread: Rc(PT), Port Size: 1/2, Accessory: Round Pressure Gauge, Option 1: None, Option 2: Flow Direction: Right->Left, Made to Order: For High Pressure

Body Size: 40, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: 04 (1/2), Option: G (For Sizes 20, 25, 30, 40: Round Pressure Gauge w/Limit Indicator; For Size 10 Round Pressure Gauge w/o Limit Indicator), Semi-Standard: Y (Knob, Upward)

Body Size: 40, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: 04 (1/2), Option: G (For Sizes 20, 25, 30, 40: Round Pressure Gauge w/Limit Indicator; For Size 10 Round Pressure Gauge w/o Limit Indicator), Semi-Standard: 1N (1 + N)

Body Size: 40, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: 04 (1/2), Option: G (For Sizes 20, 25, 30, 40: Round Pressure Gauge w/Limit Indicator; For Size 10 Round Pressure Gauge w/o Limit Indicator), Semi-Standard: N (Non-Relieving Exhaust Mechanism)

Special Applications: Copper, Fluorine & Silicon-free+Low Particle Generation, Body Size: 40, Reverse Flow: No, Thread: NPT, Port Size: 04 [1/2 (Size 40)], Accessory, Not Attached: None, Option: Nameplate/Caution Plate for Bowl in Imperial Units

Special Applications: Copper, Fluorine & Silicon-free+Low Particle Generation, Body Size: 40, Reverse Flow: No, Thread: NPT, Port Size: 04 [1/2 (Size 40)], Accessory, Not Attached: BG [B+G (Size 20 to 60)], Option: Nameplate/Caution Plate for Bowl in Imperial Units

Cost effective and clean looking, series AR regulators offer various pressure range settings to accommodate most applications. The locking adjustment knob prevents accidental setting changes. The modular design of the AR series connects with other SMC air preparation equipment.Modular type regulator, Optional embedded pressure gauge , Available with built-in backflow mechanism , Knob is made

CATALOG

C Y D E D E ZPR02U 2 2.6 1.2 0.8 ZPR04U 4 4.8 1.6 0.8 20 65.5 25 70.5 ZPR06U 6 7 2.5 0.8 ZPR08U 8 9 2.5 1 A P P L I C A B L E T U B E Applicable Tube OD G H I J 4 4 20.6 15.6 10.4 6 6 21.6 16.68 12.88 F L AT T Y P E F L AT W I T H R I B I: M6X1 I: M5X0.8 Y Model A B C D E F G H H Flat Flat with rib G ZPR10 U C 10 12 12 21 29.9 46 20 67 72 3 1.7 25 ZPR13 U C 13 15 12 21 29.9 46 20 67 72 3

Table of Contents

(mm) Model D1 Port B Min. port size Weight (g) 11 14 16 22 26 D2 L1 L2 L3 P Q1 Q2 M1 M2 a b KM13-04-06-3 10.4 6 12.8 60 63.5 70.5 74.5 81.5 18 19 20 21 22.5 13 15.5 15.5 19 19 4.5 6 6 7.5 7.5 9.9 11.1 11.1 12.8 12.8 17 18.5 18.5 21 21 10.4 16 4 38.2 KM13-04-08-3 15.2 KM13-06-08-3 12.8 15.2 KM13-06-10-3 18.5 KM13-08-10-3 15.2 18.5 8 8 12.8 17 6 45.4 10 10 15.2 18.5 8 52.6 15-2-44 4 One-touch

Fluoropolymer Piping Equipment

21 52.5 50.5 48.5 45.5 29 25 7.5 LQ3E41-R2 8 6.4 LQ3E51-R1 19 12 7 14 26.5 24 24 22 32 24 64 61.5 58.5 56.5 37 29 9.5 LQ3E51-R2 10 22.5 19.5 21 61.5 53.5 50.5 25 7.5 LQ3E61-R1 25 19 8 18 30 26 26.5 24 41 32 78 74 70 67.5 49 37 16 LQ3E61-R2 12 24 22 24 74 64.5 62.5 29 9.5 M1 H1 1/4 (E1, E1) A side L1, L1 B B side Inch Size M2 C Model A side B side B C E1 E1 E2 E2 H1 H2 L1 L1 L2 L2 M1 M2 Min

Compact 5-Port Solenoid Valve

C6 C8 Stations U side D side L1 (L5) DIN rail holding screw (For DIN rail mounting) Manual override (Non-locking) 4(A) port side: Blue 2(B) port side: Yellow 63 21 18 (Light/surge voltage suppressor) Input block (DIN rail) SI unit (8) 4.6 (5.5) A B A B A B A B 97.9 A 4 A 4 A 4 A 4 83 9.9 0 1 8 66 65.5 2 (46.2) 3 B 2 B 2 B 2 B 2 (35) 2 2.2 (14.8) (14.9) 4 x M4 Mounting hole (Recommended tightening

A

Bore size A B C DA DB E F G GA GB H J K L MM ML NN P PW 12 39 39 29 6 8 0 8 29 11 7.5 58 16 13 18 M4 x 0.7 10 M4 x 0.7 M5 7 16 43 43 33 8 10 0 8 33 11 8 64 18 15 22 M5 x 0.8 13 M5 x 0.8 M5 5 20 47 47 37 10 12 0 8 36 10.5 8.5 74 19 17 26 M5 x 0.8 13 M5 x 0.8 1/8 7 S L I D E B E A R I N G 25 47.5 47.5 37.5 12 16 0 8 42 11.5 9 88 21 21 32 M6 x 1.0 15 M6 x 1.0 1/8 8 32 71.5 47.5 37.5 16 20 24

Table of Contents

1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6 1/8, 1/4 500 1.5 0 1,000 2,000 3,000

Table of Contents

A C MTS D-F9W, D-M9 D-A93 D-A90, D-A96 D-M9V, D-F9WV Bore size (mm) CXSJ15 to 32 B D A 15.5 25.5 31.5 39 40 49 D 9.5 7 0 3 5 5.5 C 9.5 19.5 25.5 33 34 43 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 A 15.5 25.5 31.5 39 40 49 A 19.5 29.5 35.5 43 44 53 C 11.5 21.5 27.5 35 36 45 D 5.5 3 4 7 9 9.5 D 8 5.5 1.5 4.5 6.5 7 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 C 13.5 23.5 29.5 37 38 47 C 11 21 27 34.5 35.5

F

17.2/10 10 14 KQS10-U02 8 17 28.5 22 21 39/26.6 10 38 KQS10-U03 8 17 26.5 20 21 39/26.6 10 12 KQS10-U04 8 21 27 19 21 39/26.6 12 14 KQS12-U02 8 19 35 25.5 22 46/44.5 12 38 KQS12-U03 9 19 28 19 22 60/44.5 12 12 KQS12-U04 9 21 27 19 22 60/44.5 P R O D U C T S E L E C T O R 45 M A L E E L B O W : KQK (KQ2K) Use to tubing toward 45 from the thread part.

Table of Contents

19 21 19 21 21 21.8 21 21.8 21 21.8 18.8 21 18.8 21 21 23 21 23 21 23 23 23.8 23 23.8 23 23.8 22 23 30 31 39 41 47 49 61 63 69 74 73 78 95 100 Dimension with cover Reference dimension of NPT thread after installation. 1/4" 5/16" 1/4" 5/16" 5/16" 3/16" 5/16" 3/16" 5/16" 3/16" 3/16" 1/2" 3/16" 1/2" 3/16" 1/2" 12.7 NPT 1/8 23.4 27.4 39.8 45.8 17.6 14.3 NPT 1/4 25.4 31.4 39.8 45.8 17.6 12.7

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

[126.4] 107.4[111.8] R P R A B A B A B A B A B 30 R P R 61.5 (DIN: 62.8) 62.3 (DIN: 63.6) 21 21 83.7[85.9] 84.5[86.7] 17 21 60 1/4 (P, R port) Manual override 1/8 (A, B port) (Pitch) P = 19 23.5 Built-in One-touch fitting (Station n) (Station 1) (Light/surge voltage suppressor) One-touch fitting (A, B port) Applicable tubing O.D.: 6, 1/4" 8, 5/16" 58.5[65.5] + + + + + 43.1 26.5 (4.9) 63 L

1

A Series MGC 20 to 50 SZ + Stroke B D port C port A, B port B port A C port A port D port A View A-A GD GD Front mounting flange SB + Stroke B SA + Stroke A ZZ + Stroke A + Stroke B Bracket mounting With R Without R Stroke A stroke Stroke A + Stroke B ( ) Bore size (mm) W1 W2 SB SA GD ZZ GC SZ availability 30 30 Up to 200 96 50 9 176 21 20 35 st or more 89 110 30 30 96 50 9 183 21 25 60 st

KJ

(mm) Model D1 Port B Min. port size Weight (g) 11 14 16 22 26 D2 L1 L2 L3 P Q1 Q2 M1 M2 a b KM13-04-06-3 10.4 6 12.8 60 63.5 70.5 74.5 81.5 18 19 20 21 22.5 13 15.5 15.5 19 19 4.5 6 6 7.5 7.5 9.9 11.1 11.1 12.8 12.8 17 18.5 18.5 21 21 10.4 16 4 38.2 KM13-04-08-3 15.2 KM13-06-08-3 12.8 15.2 KM13-06-10-3 18.5 KM13-08-10-3 15.2 18.5 8 8 12.8 17 6 45.4 10 10 15.2 18.5 8 52.6 15-2-44 4 One-touch

Air Slide Table

B Max. D A [mm] Rubber Stopper A Model A B C D E MXQ6(A) 41.5 27 22 25 20 MXQ8(A, C) MXQ6B 41.5 27 21 25 19 MXQ12(A, C) MXQ8B 46.5 28 21 27 20 MXQ16(A) MXQ12B 51.5 30 21 28 20 MXQ20(A) MXQ16B 58.5 32 22 31 21 MXQ25(A) MXQ20B 65.5 34 22 33 21 Cap bracket RJ-X2300 A cap bracket is mounted to lengthen the A dimension.