VZS

VZS2000/3000 Caution 5.

3 Position Cylinder Series RZQ

If a moment or torque directly acts on the cylinder, it will lead to reduced service life or damage to machinery. 7 3 Position Cylinder Series RZQ Construction 13 24 21 3 2 1 6 4 8 7 10 19 22 20 12 23 11 9 5 23 18 14 16 17 15 22 Parts list No. 1 2 3 4 5 6 7 8 9 10 11 12 No. 13 14 15 16 17 18 19 20 21 22 23 24 Note Note Description Material Description Material Hard anodized Aluminum alloy

COQ2BP

M1 0Xl.5 15 50 131 20 28 22 SO.6 44 B " M l 0)(1.5 M10)(I .S 63 138. 5 18 124 .5 SO.6 44 I. 8 Ml0Xl .5 15 20 30 22 " M12xl .75 M1 2x 1.75 lB 150 27 M1 6X2.0 21 80 168 22 38 28 64 56 18 10 10 0SM:: Series CDQ2BP High Magll8lic Field Resistance ," , [).P70 ' , D-~i4,,;'; ' ; ::~::Y_iidiz!C:::i Auto SWitch No.

VCW

Proper tightening torque Nm Tightening torque for piping Connection threads 7 to 9 Rc(PT) 1/8 12 to 14 Rc(PT) 1/4 22 to 24 Rc(PT) 3/8 28 to 30 Rc(PT) 1/2 28 to 30 Rc(PT) 3/4 5.

High Vacuum Angle Valve, XL Series

G C Electrical options G XSA122-8-4 XSA1 S S L, Z XSA2 1(100V) AC XSA232-8-4 XSA3 5(24V) DC 6(12V) 32 High Vacuum Angle Valve Series XSA Specifications XSA2-32 XSA3-32 XSA3-43 Model XSA1-12 XSA1-22 XSA2-22 Normally closed direct acting 2 port solenoid valve Action Non corrosive gas for stainless steel (SUS405 equivalent) Fluid 2 3 4.5 6 Orifice diameter mm 0.17 0.33 0.6 1.05 Cv factor 0.8

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

Weights (g) Bore size (mm) 10 16 Basic 22 46 Axial piping 22 46 Double clevis (including clevis pin) 24 54 Head-side bossed 23 48 Additional weight per 15 mm of stroke 4 7 Basic weight (When the stroke is zero) Single foot 8 25 Double foot 16 50 Rod flange 5 13 Head flange 5 13 Mounting bracket weight Single knuckle joint 17 23 Double knuckle joint (including knuckle pin) 25 21 Rod end cap

Slide Tables MX Series

(5.1) 45 (5.1) 72 (8.1) Vertical Mounting (Tapped Holes) Axial Mounting (Tapped Holes) l 4.8 6 6 8 l 4.8 6 6 8 Max. fastening torque in lb (N m) 9.7 (1.1) 22 (2.5) 22 (2.5) 45 (5.1) Max. fastening torque in lb (N m) 9.7 (1.1) 22 (2.5) 22 (2.5) 45 (5.1) Model MXH6 MXH10 MXH16 MXH20 Bolts M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 Model MXH6 MXH10 MXH16 MXH20 Bolts M3 x 0.5 M4 x 0.7 M4 x 0.7

MHZ2/MHZJ2

No setting 1 4 2 5 7 2 5 3 2 2 3 5 3 1 MHZ2-16 No setting 3 2 4 1 MHZ2-20 MHZ2-25 MHZJ2-10 No setting No setting MHZJ2-16 No setting No setting 3 2 1 MHZJ2-20 MHZJ2-25 Note) "" in the table indicates a skip with no dimension.

Speed Controller with

L4 Note) Weight (g) 5 5.5 6.5 8.5 9.5 19 22 35 38 52 86 95 Model Applicable tube O.D. d AS1002F-01 AS1002F-03 AS1002F-07 AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11 AS4002F-11 AS4002F-13 MIN.

MK

5 !6 !7 !8 !

MHF2

Description Contents MHF2-16D2 MHF2-16D1 MHF2-16D 20, 21, 22 MHF16-PS MHF16-PS MHF16-PS Seal kit 3, 4, 5, 6, 14, 16,19 Mounting screw MHF-A1602-2 MHF-A1602-1 MHF-A1602 Finger assembly Kit No.

212

Applicable model LVR20 LVR40 06 6 x 4 LVR20 LVR40 07 1/4" x 5/32" 10 10 x 8 11 3/8" x 1/4" 2 Series LVR Flow-rate Characteristics (Representative Value) Inlet pressure: 44 psi (0.3 MPa) Fluid: Water LVR20 LVR40 LVR50 36 [0.25] 36 [0.25] 36 [0.25] Outlet pressure psi [MPa] Outlet pressure psi [MPa] Outlet pressure psi [MPa] 29 [0.20] 29 [0.20] 29 [0.20] 22 [0.15] 22 [0.15] 22 [0.15] 15 [0.10

Compact and Lightweight

/2" 1/2" 15.6 17 17 105.7 60.9 28.4 26.4 22 22 10 8 Refer to the standard bracket dimensions.

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

(mm) 15 27 57 86 160 224 1 1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZCUK N S NBR 40 50 40 50 Silicon rubber Urethane rubber Fluororubber Pad type U F E EPR 63 63 AMJ H Heavy duty 80 80 100 100 AMV Add NBR mass to the table on the right for other materials. 125 125 AEP Dimensions HEP ZP H 40 50 63 80 ZP H 100 125 ZP H Related Equipment 3 x 6.5 3 x 4 4 x 8 4 x 5 4 x 9.5 4

Compact Cylinder with Air Cushion Series RQ

32 L CU CW RR 18 36 7 28.5 M6 x 1.0 10 20 CX +0.4 +0.2 0.1 0.3 CZ B + Stroke CL + Stroke A + Stroke 40 18 36 7 28.5 M6 x 1.0 10 22 50 22 44 8 33.5 M8 x 1.25 14 28 Refer to page 9 for details on rod end nut and accessories.

VXA21/22

Min. 60 5 (1) 40 5 40 40 5 5 (2) Note 1) Dew point: 5C or less Note 2) 500cSt or less Note 3) "V" in the parenthesis is option symbol. Options Material Tightness of Valve(Leakage) No. Description Standard Brass (Base is aluminum.)

VQ4000

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit Model Flow characteristics Response time (ms) Port size Weight (kg) Series Configuration Model 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Standard 1 W AC Low wattage 0.5 W C [dm3/(sbar)] C [dm3/(sbar)] b CV b CV 0 5 Metal seal Single VQ41 0 0.19 20 or less 22 or less 6.2 1.5 22 or less 6.9 0.17 1.7 0.23 (0.29) 2 position 3 position 0 5 VQ41

VFS

Note 5) Based on JIS C 4003.

Electric Actuator with Integrated Guide

Dimensions (RS-232C without optional unit) Driver 5 100 40 1-5 hole 5 5 5 120 130 5 5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Driver input/output signal list (CN-1/F connector) Driver dimensions Pin no. Pin no.

NAAMS Standards Compliant

8.5 R7 22 20 R7 22 12.5 22 20 [mm] [mm] Model NAAMS code A B Weight [kg] CKZ-63A025 ACA025M 135.0 81.3 1.7 CKZ-63A026 ACA026M 165.0 111.3 1.9 CKZ-63A027 ACA027M 195.0 141.3 2.1 CKZ-63A028 ACA028M 225.0 171.3 2.3 CKZ-63A029 ACA029M 255.0 201.3 2.5 CKZ-63A030 ACA030M 285.0 231.3 2.7 Model NAAMS code A Weight [kg] CKZ-63A037 ACA037M 135.0 2.1 CKZ-63A038 ACA038M 165.0 2.3 CKZ-63A039 ACA039M