Modular F.R.L. Units

-l03-A 3/8 Y610-l03-A 3/8 22 81 57 53 30 AC50-B, AC55-B, AC60-B, E Octagon Port size C B Center of F.R.L. body D A AC50B-B, AC55B-B, AC60B-B Y610-l04-A 1/2 T-spacer 1 l in model numbers indicates a pipe thread type.

MGQ

Bore size Standard stroke (mm) MM YY L X K W J V H GA GB TA TB U G T F S DA R C Z NN Q B ML P PW YL (mm) 12 16 20 25 18 50 13 5 16 40 58 5 7.5 5 36 29 56 8 22 6 48 29 12 14 39 7 10, 20, 30, 40, 50, 75, 100 M4 x 0.7 10 M4 x 0.7 M5 x 0.8 7 M4 x 0.7 11 22 54 15 7 18 42 64 2.5 8 5.5 38 33 62 8 25 8 52 33 13 16 43 8 10, 20, 30, 40, 50, 75, 100 M5 x 0.8 13 M5 x 0.8 M5 x 0.8 5 M5 x 0.8 11 20, 30

Electric Actuator with Integrated Guide

a=1000 a=2000 a=3000 L2 (mm) Mer Rolling Yawing 100 m L2 Mer 0 30 20 10 m Transfer load m (kg) 200 a=1000 a=2000 a=3000 L3 (mm) 100 L3 m Mey a 0 30 20 10 Transfer load m (kg) Refer to page 71 for deflection data. 34 38 Non-standard Motor/Horizontal Mount Specification Series LTF6 Dimensions/LTF6EPF(X10) Scale: 20% Photo micro sensor 50 30 thread depth 8 4-M5 x 0.8 E D Proximity sensor (2

MHZ2/MHZJ2

0.6MPa, 0.7MPa 30 0.3MPa Gripping point 0.3MPa 0.4MPa L 20 0.4MPa 0.5MPa 0.5MPa 20 0.6MPa, 0.7MPa 10 10 MHZJ2/With dust cover 0 10 20 30 40 50 0 10 20 30 40 50 Gripping point L mm Gripping point L mm H MHZ 2-16 MHZ 2-16 60 60 Pressure 0.2MPa 50 50 Gripping point Pressure 0.2MPa L Overhang H mm Overhang H mm 40 40 0.3MPa 30 30 0.4MPa 0.3MPa Internal gripping 0.5MPa 0.4MPa 0.5MPa 0.6MPa, 0.7MPa

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

For detailed specifications, refer to page 8-30-1.

MK

30 37 48 14 14 17 17 20 24 30 35 7 7 8 9 4.5 5 7 7 6.5 6.5 7.5 7.5 14 14 19 19 16 16 20 20 3 3 3.5 3.5 M10 x 1.5 M10 x 1.5 M6 x 1.0 M6 x 1.0 17 17 22 28.5 101.5 76 70 81.5 85 37 29.5 34 35 7.5 8 10.5 10.5 0.15 0.15 Data 102.5 0.15 0.15 M12 x 1.75 M8 x 1.25 122 0.15 0.15 14 depth 10.5 M12 x 1.75 M10 x 1.5 125 0.15 0.15 Note 1) This cylinder rod is retracted.

VQ7-6/7-8

) 32(42) 23(30) 1 1 2-3/8, 1/2, 3/4 2-3/8, 1/2, 3/4 3/8, 1/2, 3/4 R1, R2 port X(PE) port 1/8 3/8, 1/2, 3/4 R1, R2 port X(PE) port 1/8 30(42) 30(42) 30(42) 30(42) P port P port ( ): 3/4 Dimensions inside are for rubber seals. ( ): 3/4 3-10-24 25 ISO Standard Solenoid Valve: Size 2 Metal Seal/Rubber Seal Series VQ7-8 Prewired Connector Type 2 position single : VQ7-8-FG-S-SC single (Reverse

SFOD-OMT0009CN

No. 1 11 21 31 2 12 22 32 3 13 23 33 4 14 24 34 5 15 25 35 6 16 26 36 7 17 27 37 8 18 28 38 9 19 29 39 10 20 30 40 I/O1 I/O2 38 No.SFOD-OMT0009CN-B (1) I/O1 No. 1 +COM1 DC24V24V IN0IN10SETUPHOLDDRIVERESETSVON OUT0OUT8BUSYAREASETONINPSVRE*ESTOP*ALARM 21 +COM2 2 IN0 22 IN1 Bit No. ( 512) 3 IN2 23 IN3 Bit No.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

55 25 30 99 75, 100, 125, 150, 200 M5 x 0.8 depth 10 M8 x 1.25 depth 14 9.5 depth 6 25 30 85 16.5 13 16 6.6 54 113 35 65 100 26.5 70 130 65 30 35 109 M10 x 1.5 depth 18 M6 x 1 depth 12 11 depth 8 75, 100 125, 150 200, 250 300 32 35 100 19 16 16 6.6 60 118 35 80 106 29 80 135 73 35 40 129 M10 x 1.5 depth 18 M6 x 1 depth 12 11 depth 8 40 40 120 22 19 19 9 75 150 50 100 134 32 95 170 93 45

SL5200

40 V15 V3 L 1 H V2 2 4 10 30 40 -30 in.Hg to 15 psig -30 in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig -30 in.Hg to 160 psig -30 in.Hg to 200 psig 0 to 200 psig 0 to 400 psig 0 to 1000 psig 0 to 3000 psig 0 to 4000 psig -0.1 to 0.1 MPa -0.1 to 0.2 MPa -0.1 to 0.4 MPa -0.1 to 0.7 MPa -0.1 to 1.1 MPa -0.1 to 1.4 MPa 0 to 1.5 MPa 0 to 3 MPa 0 to 7 MPa 0 to 21 MPa 0 to 28 MPa 00

RLQ

A A1 E1 L1 MM RR1 U1 NZ L CNS 42 56 16 20 22 28 30 40 M14 x 1.5 M18 x 1.5 12 16 14 20 I-G04 I-G05 Y-G04 Y-G05 +0.5 +0.3 42 56 14 18 22 28 30 40 M14 x 1.5 M18 x 1.5 12 16 14 20 36 41.6 +0.058 0 -0.3 -0.5 +0.058 0 +0.5 +0.3 44 50.6 +0.070 0 Knuckle pin and snap ring are included. -0.3 -0.5 +0.070 0 CLS CLQ MLGP Knuckle Pin (Common with double clevis pin) Rod End Nut RLQ MLU d d Dd9 ML1C C m

KA

1 4 10 KAT06-U02 13.9 13.9 16 24.5 25 17 12 1 8 1 4 22.5 24.5 KAT08-U01 KAT08-U02 14 19 26 14 15.2 12 8 23 18.5 18.2 18.2 3 8 25.5 27 KAT08-U03 17 27 1 8 KAT10-U01 29.5 27 26.5 25 31 27 30 1 4 3 8 30 30.5 17 KAT10-U02 KAT10-U03 26.5 18.5 17 10 21 29.0 29.0 1 2 KAT10-U04 30 31.5 51 31 34 22 1 4 3 8 27 28 31.5 32.5 KAT12-U02 KAT12-U03 17 20.9 17 12 28.5 22 45.2 45.2

Antistatic One-touch Fittings Series KA

-U02 10 13.9 13.9 17 Uni thread Uni thread 24.5 26 17 12 1 8 1 4 KAT08-U01 KAT08-U02 22.5 24.5 15 20 26 14 15.2 8 12 23 18.2 18.2 18.5 3 8 KAT08-U03 17 25.5 27 28 1 8 KAT10-U01 29.5 27 26.5 25 31 27 30 1 4 3 8 KAT10-U02 KAT10-U03 30 30.5 17 10 26.5 18.5 17 21 29.0 29.0 1 2 KAT10-U04 30 31.5 51 31 34 22 1 4 3 8 KAT12-U02 KAT12-U03 27 28 31.5 32.5 17 12 20.9 17 28.5 22 45.2 45.2 1 2 KAT12-U04

CL

49.4 58.4 42 42 48 56 16 20 22 30 28 28 28 30 43.4 48 59.4 71.4 Clevis pin and snap ring are attached.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

L 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 EXH port silencer 63 Silencer is installed in the EXH port. 38 22 Dimensions 13 Silencer P/N Type VQZ100 VQZ200 VQZ300 NAN110-N01 NAN200-N02 NAN200-N02 NAN200-N02 NAN110-N01 16 Q Q Q Body Ported Q Q Series VQZ100200300 Q Q Q

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

2, 3/4-2 port 3, 5 port 30 (42) 30 (42) 1/8 14 port 3/8, 1/2, 3/4-2 port 3, 5 port 30 (42) 30 (42) 3/8, 1/2, 3/4 1 port 3/8, 1/2, 3/4 1 port Dimension inside is for rubber seal.

ZX

Ordering example) Lead wire length 5A 10 ZS ZCU Lead wire length (For DC) Nil 6 10 15 20 25 30 0.3 m (Standard) 4A 20 VJ10 6 AMJ 0.6 m 1 m 1.5 m 2 m 2.5 m 3 m Note) If ordering a vacuum switch with 3 m lead wire, specify both the vacuum unit switch and the 3 m lead wire connector part numbers. Nil 30 50 0.6 m 3 m 5 m (For 100 VAC) 1A 36 VJ10 6 Misc. ZX1051-K15LOZ-EC 1 pc.

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

30 20 2-M3 x 0.5 depth 4 8.45 20 Piping port M5 x 0.8 depth 5 6.4 Piping port R, NPT 1/4 18.35 3.5 12.4 7 7.8 25.1 2.5 10.7 2.6 8.45 10.1 12.4 30 15.2 14.5 22 Piping port G 1/4 Piping port G 7 For General Fluids High Precision Digital Pressure Switch Series ZSE50F/ISE50 Dimensions Bracket A A 30 20 20 45 55 4.5 11.5 40 15 4.5 6.5 1.6 20 41.5 ZS-24-A Bracket A View A Bracket D A 30 20 20

F/ISE

30 20 2-M3 x 0.5 depth 4 8.45 20 Piping port M5 x 0.8 depth 5 6.4 Piping port R, NPT 1/4 18.35 3.5 12.4 7 7.8 25.1 2.5 10.7 2.6 8.45 10.1 12.4 30 15.2 14.5 22 Piping port G 1/4 Piping port G 7 For General Fluids High Precision Digital Pressure Switch Series ZSE50F/ISE50 Dimensions Bracket A A 30 20 20 45 55 4.5 11.5 40 15 4.5 6.5 1.6 20 41.5 ZS-24-A Bracket A View A Bracket D A 30 20 20

Auto Switch Guide

D-A90V OUT() Brown Contact protection box CD-P11 CD-P12 Reed switch OUT ( ) Blue (g) Weight D-A93V D-A96 D-A96V D-A90 D-A90V D-A93 D-A93V Model 8 8 Lead wire length: 0.5 m 6 6 6 6 LED Brown (Red) OUT (+) Brown Contact protection box CD-P11 CD-P12 41 41 Lead wire length: 3 m 30 30 30 30 Resistor Reed switch Zener diode Dimensions OUT () Blue D-A90, D-A93, D-A96 Blue (Black) D-A96V DC (+