CQM

Rod Dimensions 12 to 25 CUJ CU V V 16 12 CQS 2 x 2-OB counterbore with depth RB 2-M5 x 0.8 Auto switch CQM 2-HB through F Q 2-HA through CQ2 KA Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com IB RQ IA 2-N through MU T EB EA M D-X KA (KB) 2 x 2-OA V 20(RB) Note) 2

1

XSA1 4.5 6 XSA2 7 8 XSA3 10.5 11.5 Reverse pressure potential 0.5 MPa(G)*1 Weight New New 18% *1 XSA1-12 (Refer to the Specifications on page 3.) 0.5 kg 0.41 kg lighter *1 Rated voltage *1 XSA2-2 32 AC 100 V, 200 V, 110 V, 220 V, 240 V, 48 V, 24 V, 230 V DC 24 V, 12 V Applications Photovoltaic cell manufacturing Semiconductor manufacturing LCD manufacturing New New Female thread type (Rc,

Table of Contents

Load voltage Auto switch model Lead wire length (m) Pre-wired connector 0.5 (Nil) Indicator light Wiring (Output) Special function Type Electrical entry Applicable load 3 (L) 5 (Z) AC DC Perpendicular In-line 3-wire IC circuit 5 V A96V A96 Yes Reed switch Solid state switch (NPN equivalent) Grommet 100 V 24V 12 V 5 V, 12 V A93 A90 M9N M9P M9B F9NW F9PW F9BW A93V A90V M9NV M9PV M9BV F9NWV

Model Selection 1

Fluid Name and Option Option symbol and body material Fluid (Application) Brass B Stainless steel J J H H Q P M H M M P Ethyl alcohol Caustic soda (25% ) Gas oil Silicon oil Steam system (Steam) (Max. 183C) Steam system (Condensation) (Max. 99C) Medium vacuum (up to 0.1 Pa.abs) Parachloroethylene Helium Non-leak (10 6Pam 3/s) Heated water (Max. 99C) A A S E V A V V E Note 1) The leakage

Pneumatic Transfer System Series MF

Applicable cylinder D G F H L I C E J K M N Part No.

Soft Start-up Valve

+ 02 1/4 V 03 3/8 V 04 1/2 V 06 3/4 V 10 1 V + e Port size 1(P), 2(A) a Mounting Nil Without mounting option V V V V B With bracket V V V V + Option b Pressure gauge Nil Without pressure gauge V V V V G Round type pressure gauge (with limit indicator) V V V V + r c Silencer Nil Without silencer V V V V S Silencer (Built-in) V V V V + 1 100 VAC V V V V 2 200 VAC V V V V 3 110 VAC [115

VCL

(mm) A B C D E F G H J L Port size Bracket part no.

Series VCL

J L Bracket part no.

3 Port Air Operated Valve VPA3145/3165/3185 Series

oil, Class 1 lSO VG32 equivalent) Mounting orientation Free 150/50 Impact/Vibration resistance (m/s2) Note) VPA3165-06 VPA3145-03 VPA3165-06 VPA3145-03 Note) Impact resistance: No malfunction from test using drop impact tester, to axis and right angle directions of main valve, each one time when pilot signal ON and OFF.

PA3145/3165/3185

5 Body type V For vacuum and low pressure (50A) 2 Specifications Fluid Air N.C. only (N.O. only for vacuum) Type of actuation For general purpose Operating pressure range 0.2 to 0.8 MPa For vacuum and low pressure 101.2 kPa to 0.2 MPa Refer to the graph of pilot pressure.

Compact

If the adjusting screw of the speed controller is loosened, the operating speed will increase, so the screw should be tightened completely. m Impact force MXZ12 MXZ16 1.4 2.5 V = mm/s V = mm/s 1.2 2.0 Load weight m [kg] Load weight m [kg] 1.0 1.5 0.8 0.6 1.0 V = 50 V = 50 0.4 V = 100 V = 100 V = 200 V = 200 0.5 V = 500 V = 500 0.2 0.0 0.0 60 50 40 30 20 10 0 0 5 20 15 10 25 30 35 40 45 50

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

V Y7P Y7PV IC circuit 3-wire (PNP) Y59B Y69B 12 V 2-wire Relay, PLC Solid state switch 24 V Y7NW Y7NWV 3-wire (NPN) Grommet Yes 5 V , 12 V Diagnostic indication (2-color indication) IC circuit Y7PW Y7PWV 3-wire (PNP) Y7BW Y7BWV 12 V 2-wire Lead wire length symbols: 0.5 m Nil (Example) Y69B 3 m L Y69BL 5 m Z Y69BZ Auto switches marked with a symbol are produced upon receipt of order.

MGQ

Z73 Y59A Y7P Y59B Y7NW Y7PW Y7BW 3-wire (NPN) 2-wire Y69A Y7PV Y69B Y7NWV Y7PWV Y7BWV 100 V or less IC circuit 5 V, 12 V 3-wire (PNP) IC circuit 2-wire 12 V Relay, PLC 24 V Grommet 3-wire (NPN) 3-wire (PNP) 5 V, 12 V Diagnostic indication (2-color indication) 2-wire 12 V Lead wire length symbols: 0.5 m Nil (Example) Y59A 3 m L (Example) Y59AL 5 m Z (Example) Y59AZ Since there are

T

Barb one-touch Reducer 3.2, 4 Port size 3 5 32 04 M3 x 0.5 M5 x 0.8 3.2 4 15-6-28 5 Miniature Fittings Series M Barb fitting: M-3AU-2, M-5AU-2 Applicable tubing O.D. x I.D.

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

J L Bracket part no.

Series: 25A-ZSE20, Rated Pressure Range: AF (-100 to 100 kPa), Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire)

Series: 25A-ISE20, Rated Pressure Range: A (-0.1 to 1 MPa), Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: B (Panel Mount Adapter), Operation Manual: K (Operation Manual, Calibration Certificate)

Series: 25A-ZSE20, Rated Pressure Range: A (0 to -101 kPa), Output Specification: S (NPN Open Collector 2 Outputs + Analog Current Output), Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire)

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

(initial value) Solenoid Specifications Electrical entry L type (for plug-in), M type plug connector (M) Rated coil voltage V Note) 24, 12, 6, 5, 3DC Allowable voltage fluctuation 10% of rated voltage Power consumption W 0.6 (with light: 0.65) Surge voltage suppressor Diode Indicator light LED Note) Only 24VDC and 12VDC are available for plug-in use.

CE

Bore size (mm) 12 20 Standard stroke 25, 50, 75, 100, 125, 150 94 M5 x 0.8 16 5.2 25 15.5 69 15 6 25 42.5 25, 50, 75, 100, 125, 150, 175, 200 106 M8 x 1.25 10 8 28 25.5 78 15.5 10 36 53.5 Q R T V Y N O P Bore size (mm) 12 20 47 7 53.5 22 7 M4 x 0.7 M5 x 0.8 50 15 62.5 36 5 5.5 M6 x 1 M5 x 0.8 Refer to page 11 regarding the rod end nut which is included.