Actuation: 2-Position Single, Pilot: Internal Pilot, Barrier: Z728.H, Electrical Entry: Plug Connector w/Cover Type, Lead Wire Length: 100 [10000mm (semi-standard)], Manual Override: Non-Locking Push, Port Size: 1/4, Thread Type: NPTF

Actuation: 2-Position Double, Barrier: w/o Barrier, Electrical Entry: Cable Type, Lead Wire Length: 100 [10000mm (semi-standard)], Manual Override: Non-Locking Push, Port Size: 1/4, Thread Type: NPTF, Bracket: -

Actuation: 3-Position Closed Center, Barrier: w/o Barrier, Electrical Entry: Plug Connector w/Cover Type, Lead Wire Length: 600mm, Manual Override: Non-Locking Push, Port Size: 1/4, Thread Type: NPTF, Bracket: -

Actuation: 3-Position Closed Center, Barrier: Z728.H, Electrical Entry: Cable Type, Lead Wire Length: 600mm, Manual Override: Non-Locking Push, Port Size: 1/4, Thread Type: NPTF, Bracket: -

Actuation: 2-Position Single, Barrier: Z728.H, Electrical Entry: Plug Connector w/Cover Type, Lead Wire Length: 300mm, Manual Override: Push Turn Locking Slotted Style, Port Size: 1/4, Thread Type: NPTF

Actuation: 2-Position Single, Barrier: w/o Barrier, Electrical Entry: Plug Connector Type, Lead Wire Length: 300mm, Manual Override: Push Turn Locking Slotted Style, Port Size: 1/4, Thread Type: NPTF

Actuation: 2-Position Single, Barrier: w/o Barrier, Electrical Entry: Cable Type, Lead Wire Length: 100 [10000mm (semi-standard)], Manual Override: Push Turn Locking Slotted Style, Port Size: 1/4, Thread Type: NPTF

Actuation: 2-Position Single, Barrier: w/o Barrier, Electrical Entry: Cable Type, Lead Wire Length: 3000mm, Manual Override: Push Turn Locking Slotted Style, Port Size: 1/4, Thread Type: NPTF

Actuation: 2-Position Single, Barrier: Z728.H, Electrical Entry: Plug Connector w/Cover Type, Lead Wire Length: 300mm, Manual Override: Non-Locking Push, Port Size: 1/4, Thread Type: NPTF

Actuation: 2-Position Single, Barrier: w/o Barrier, Electrical Entry: Cable Type, Lead Wire Length: 100 [10000mm (semi-standard)], Manual Override: Non-Locking Push, Port Size: 1/4, Thread Type: NPTF

Actuation: 2-Position Single, Pilot: Internal Pilot, Barrier: Z728.H, Electrical Entry: Cable Type, Lead Wire Length: 600mm, Manual Override: Non-Locking Push, Port Size: 1/4, Thread Type: NPTF

Actuation: 2 (2-Position Double), Barrier: w/o Barrier, Electrical Entry: TT (Cable Type), Lead Wire Length: 3 (300mm), Manual Override: D (Push Turn Locking Slotted Style), Port Size: 02 (1/4), Thread Type: T (NPTF)

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 10 10 14 18 18 22 26 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 84 90 98 116 126 146 159 170 204 215 RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-4-17

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

52 14 41 118 2 1 1/4, 1 1/2, 2 (IN, OUT port) 105 Note) External pilot port (PA port) 1/4 is processed for threads in external pilot model only.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 10 10 14 18 18 22 26 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 84 90 98 116 126 146 159 170 204 215 RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-4-17

Table of Contents

46 55 63 69 S 33 36 40 46 50 52 Z 46 52 56 65 73 79 6 10 16 20 25 32 7 9 12 16 20 24 6 depth 4.8 6 depth 5 7.6 depth 6.5 9.3 depth 8 9.3 depth 9 11 depth 11.5 5 7 Free Mount Cylinder Double Acting, Single Rod Series CU Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height D-A9 D-M9 D-F9W 22 (24.5) ( ): Denotes the values of D-A93.

MLGP

Bore size (mm) c e b d a 40 50 63 5.5 7.5 10 11 13.5 18.5 10.5 13.5 17.8 4 4.5 7 6.5 8.5 11 b a c d e Common Dimensions: MVGPM/MVGPL Extension locking Retraction locking IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB GC H HA IA ID IE IH J K L IB 52 64 77 40 46 58 M6 27 32 39 34 35 38 11 13 16.5 4 7 6.5 10 14 34.5 40 50 63 100 120 148 162 16 20 20 14 44 12 16 16 44 47 50 54 64

Ionizer

L KJH04-M5-X34 14 14 16 36 20 30 19 14 4 x M4 x 0.7 depth 5 (For mounting, opposite side: Same) 16 20 17 52 58 Emitter cartridge Maintenance detection level selection switch Frequency selection switch Balance adjustment trimmer n (Number of emitter cartridges), L Dimension, Weight Part no. n L (mm) IZS31-460--X10 IZS31-540--X10 IZS31-700--X10 IZS31-860--X10 IZS31-940--X10 IZS31-1020--X10

48

Minimum Stroke for Auto Switch Mounting [mm] Auto switch model Number of auto switches Bore size 12 (10 x 2) 16 (12 x 2) 20 (16 x 2) 25 (20 x 2) 32 (25 x 2) 40 (32 x 2) 50 (40 x 2) 63 (45 x 2) 80 (56 x 2) 100 (71 x 2) D-M9V 1 5 2 5 D-M9 1 51 5 2 101 10 D-M9W 1 52 2 102 10 D-M9WV D-M9AV 1 52 2 10 D-M9A 1 52 2 102 1 Confirm that it is possible to secure the min. bending radius of 10 mm of the

Slider Type Ball Screw Drive/11-LEFS Series

with lock [kg] S4: 0.7/S8: 0.7 523 523 11-LEFS Series AC Servo Motor Clean Room Specification Dimensions: Ball Screw Drive 11-LEFS25 +0.025 0 3H9 ( ) depth 3 (102) Encoder cable (7) 64 4 x M5 x 0.8 thread depth 8.5 Motor cable (6) Body mounting reference plane Note 1) 45 38 50 3.5 +0.025 0 3H9 ( ) depth 3 Motor option: With lock Encoder cable (7) Lock cable (4.5) (2.2) L Motor cable (6) (52