High Power Cylinder:

25 32 40 GB 47.5 49.5 51.5 51.5 GA 53.5 56.5 55 56 FZ 68 70 72 84 FW 38 44 50 60 FY 21 27 33 36 FX 51 53 55 66 FT 6 9 9 9 FD 7 7 7 9 F 16 16 19 21 E 14.5 18 18 20.5 D 10 12 12 16 B 32 36 44 53 A 18 22 22 24 H1 5 6 6 8 H2 8 8 9 11 REA REC Bore (mm) 20 25 32 40 S 192 193 195 201.5 Rc(PT)P 1/4 1/4 3/8 3/8 NN M22 X 1.5 M24 X 1.5 M30 X 1.5 M33 X 2.0 ND 15.0 19.6 19.6 25.4 NF 13 17 17 22 MM M8

3 Port Air Operated Valve Series SYJA300 1

Series VPA700 2.9/3.1 3.5/3.3 3.5/3.5 3.8/4.0 0.18/0.23 0.19/0.18 0.27/0.27 0.26/0.28 14/14 15/16 12/12 15/14 VPA744 (Base mounted) 0.71 Note 1) In the case of body ported type, the valve is without bracket.

AC Servo Motor Driver (CC-Link Type)

Recommended Parameter Values [LEF] LEFS25 LEFS32 LEFS40 Lead symbol H A B H A B H A B Series Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para. Initial value Recommended value No.

MXW

20 28 Mr My Mp W L2 B2 W W C2: Moment center position distance compensation amount My L1 A2 L3 C2 (mm) B2: Moment center position distance compensation amount MXW8 MXW12 MXW16 MXW20 MXW25 23 29 37 49 63 A2: Moment center position distance compensation amount Mr (mm) (mm) W Mp MXW8 MXW12 MXW16 MXW20 MXW25 39 48 58 75 97 MXW8 MXW12 MXW16 MXW20 MXW25 10 10 14 20 28 W W 8-7-2 3 Long Stroke Slide

Secondary Batteries

Port size Size Applicable body size 650 850 Symbol 10 14 20 1 1 1 2 2 *Specifications and dimensions for the 90-series are the same as standard products.

AC Servo Motor Driver (Pulse input type/Positioning type)

COM3 15 LA Encoder A-phase pulse (differential line driver) Y004 CR 5 16 LAR (Note 15) COM2 17 LB Encoder B-phase pulse (differential line driver) 18 LBR X INP 10 19 LZ Encoder Z -phase pulse (differential line driver) 20 LZR X X RD 11 21 14 LG SD Control common OP LG Plate 14 SD Plate (Note 7) (Note 3, 5) Forced stop CN1 EM1 8 Servo-on SON 4 Reset (Note 10, 11) RES 3 Forward rotation stroke

JXCx-OMT0061CN

CN4I/O . 19 (1) . 19 (2) . 20 5.4 CN5: . 20 6.

Series CQ2

(Mounting position: Horizontal) W 1000 500 400 Allowable lateral load W (N) 300 Allowable kinetic energy 200 Piston speed 200 180 200 100 180 Piston speed Allowable kinetic energy 20 to 400mm/s 12.4J 50 40 30 (m1 + m2) V Kinetic energy E (J) = 2 m1: Weight of moving cylinder parts kg m2: Load weight kg V: Piston speed m/s 20 10 0 20 40 60 80 100 120 140 160 180 200 220 260 240 280 300 Kinetic

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

MHR2-10/MDHR2-10 MHR2-20/MDHR2-20 50 60 Overhang distance H (mm) Overhang distance H (mm) 50 40 Pressure 0.2 MPa Pressure 0.2 MPa 40 30 30 0.3 MPa External grip 0.3 MPa 0.4 MPa 20 0.4 MPa 20 0.5 MPa 0.5 MPa 0.6 MPa 10 0.6 MPa 10 0 10 20 30 40 50 0 10 20 30 40 50 60 Gripping point L (mm) Gripping point L (mm) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-

CRQ2

) TL JJ US TA TD G L UW TB TC M N b l 90 180 90 180 90 180 3 29 104 130 122 153 20 0 0.03 1 15 59 24.5 8 11 9.6 11.5 4 13.5 27 4 4 2.5 74 20 M5 x 0.8 depth 6 0 0.03 30 2 18 65 27 10 13 11.4 13.5 19 36 4 4 2.5 83 4 33 4 20 40 139 177 5 37 5 M6 x 1 depth 7 0 0.03 93 11 20 15 14 17 25 73 32.5 2 20 5 3.5 39.5 5 Dimension AU does not indicate the dimension when shipped because of the adjustment

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

H9) TL JJ US TA TD G L UW TB TC M N b l 90 180 90 180 90 180 3 29 104 130 122 153 20 0 0.03 1 15 59 24.5 8 11 9.6 11.5 4 13.5 27 4 4 2.5 74 20 M5 x 0.8 depth 6 0 0.03 30 2 18 65 27 10 13 11.4 13.5 19 36 4 4 2.5 83 4 33 4 20 40 139 177 5 37 5 M6 x 1 depth 7 0 0.03 93 11 20 15 14 17 25 73 32.5 2 20 5 3.5 39.5 5 Dimension AU does not indicate the dimension when shipped because of the adjustment

reduces flow setting time

Connection Female Thread: Rc, NPT, NPTF Uni thread size Wrench tightening angle after hand-tightening [deg] Tightening torque [Nm] 1/8 30 to 60 3 to 5 1/4 30 to 60 8 to 12 3/8 15 to 45 14 to 16 1/2 15 to 30 20 to 22 Connection thread size Proper tightening torque [Nm] NPT, R1/8 3 to 5 NPT, R1/4 8 to 12 NPT, R3/8 15 to 20 NPT, R1/2 20 to 25 Connection Female Thread: G Chamfered area for female

VCW

(mm) Electrical entry P Port size A B C D E F H K L M Model Grommet: G Conduit: C DIN connector: D Conduit terminal: T Q R Q R Q R S Q R S 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 22 45 44 43 58 40.5 46.5 99 43 66 1/8 VCW21 18 36 67 31 8.5 12.5 28 18 12.8 M4 22 46 44 44 58 41.5 46.5 99 44 66 1/4 22 40 80.5 36.5 11 15 32 20 19 M5 24 56.5 46 54.5 60 52 48.5 101 54.5 68 1/4, 3/8 VCW31 30 50 85.5

ZX

1 20 1 11.5 7 7 8 8 Manual override (Push and turn the locking type override.)

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

3 4.5 8 9.5 4 Section AA' 6-M3 x 0.5, depth 14 15 15 Mounting reference planes D B Q QL Without magnet and rail 8 2-M2 x 0.4, depth 3 3.15 2.5 (mm) G Model Z J H K L M QL Q S V W L MXP8-10 8 52 60 40 44 10 21 20 20 32 32 14 2-M2.5 x 0.45, depth 4 MXP8-20 50 20 82 36 36 41 20 74 65 90 50 20 8-8-27

Slider Type/Ball Bushing Bearing

7 90 9 18 52 53 39 20 10.5 14 20 8 33.6 8 16 5 7 9.5 66 26.5 24.5 M10 x 1.5 15 100 9.2 110 12 26.5 64 64 47.5 25 11.5 14 25 8 41.6 10 20 5 10 10.5 78 30.5 28.5 M10 x 1.5 15 136 9.2 130 12 35 76 74 56 30 PA (N) (NA) (NB) ta P PB PW Q tb MM NN QW T TT W Z M RW Model CY1L15 CY1L20 CY1L25 CY1L32 CY1L40 Shock absorber RB0805 45 M5 x 0.8 0.5 M8 x 1.0 M5 x 0.8 70 95 90 1.0 30 12.5 22.5 92 112 8

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

30 40 Load N 0 10 20 30 50 Load N 0 10 20 30 40 Load N 40 10 10 10 L = 100mm L = 100mm L = 100mm MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.04 0.03 0.08 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 Table displacement mm Table displacement mm Table displacement mm 0.03 0.06 0.02 0.02 0.04 0.01 0.01 0.02 0 0 0 80 20 40 60 80 Load N 20 40 60 80 Load N 20 40 60 100 Load

Vacuum Equipment

NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber ZP02 ZP04 ZP06 ZP08 ZP10 ZP13 ZP16 ZP20 ZP25 ZP32 ZP40 ZP50 ZP63 ZP80 ZP100 ZP125 5 7 8 2 2 4 4 7 9 11 2 4 5 7 10 4 6 8 10 5 5 10 10 7 9 9 10 13 10 8 13 11 13 11 10 11 16 20 25 32 12 14 9 9 13 15 19 25 33 13 15 20 26 35 14 17 20 24 30 15 18 21 26 33 14 14 13 20 18 12 13 11 17

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

0.5MPa Holding force (N) Holding force (N) 0.4MPa 20 20 0.4MPa MHZ2 0.3MPa 0.3MPa MHZJ2 10 10 0.2MPa 0.2MPa MHQ MHL2 0 10 20 30 40 50 0 10 20 30 40 50 L: Holding point length mm Holding point L (mm) Holding point L (mm) MHR MHR2-20/MDHR2-20 MHR2-20/MDHR2-20 MHK Indication of effective holding force The holding force shown in the tables represents the holding force of one finger when all

MGC

Without rear plate Long stroke Bracket mounting stroke Bracket mounting stroke Stroke range (mm) Bore (mm) Bore (mm) Bore (mm) Y R Z 20 25 32 40 50 20 25 32 40 50 20 25 32 40 50 100st or more 250 to 400 88 14 119 125st or more 350 to 500 88 14 131 150st or more 350 to 600 90 14 136 200st or more 350 to 800 101 15 156 250st or more 350 to 1000 116 16 202 With auto switch MGCB Bore size SMGC