VZS

For details, refer to pages 3-7-19 and 3-7-20.

LV50-OMQ0002

4.6 9.5 14 56 38 2.5 depth 8.5 2.6 Approx. 70g LFE38 62 53 4.6 3.5 20 68 43 2.5 depth 8.5 2.6 Approx. 70g -71No.LV50***-OMQ0002-G Dimension of the cable with M12 connector lead wire (LFE-1-A3) 4 Black Blue 3 White 2 1 Brown -72No.LV50***-OMQ0002-G Revision A : Contents revised in several places.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 ZH05DS-06-01-06 ZH05DL-06-01-06 ZH07DS-06-01-06 ZH07DL-06-01-06 ZH10DS-06-01-08 ZH10DL-06-01-08 ZH13DS-08-02-10 ZH13DL-08-02-10 ZH15DS-10-03-12 ZH15DL-10-03-12 12.8 24 21 7.8 6 17 24 12.8 24 21 6 17 24 12.8 24 22 6 17 24 12.8 24 22 6 17 24 13.7 26 24.5 8 20 28 13.7 26 24.5 8 20 28 15.3 28 27 10 22 30 15.3 28 27 10 22 30

JXCx-OMT0030CN

166 . 53 167 . 53 3 - LEC-G Series/ 1 (ISO/IEC)(JIS) 1) 2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating industrial robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1:

Pneumatic Transfer System Series MF

Replacement parts: Seal kits Contents A set of above Nos. 53 through 58 Bore size (mm) 32 Seal kit No.

SFOD-OMT0005CN

(PLC ) No. (01-051) <> (1)( )1(ABS)2(INC) (2)PLC 15ms(30ms) 13.2 [2](P.53) No. B RESET <>(+) (-) (JOG ) <>(+) (-) (01-052) B RESET -63- () 12 (12 0 ) (2) (3) (4) (5) (6) (7) Alarm _Comment _058 (01-058) 3A B RESET <>No.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type G Fd C (K flange) J K H B S M 45 A Fn (KF flange) E K (mm) Model A 86.7 114 128 163 193 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 66 84 95 121 144 H J XYD-25 XYD-40 XYD-50 XYD-63 XYD-80 100.2 130 178 209 268 16 20 20 20 20 7.5 15 17.5 19.5 26.5 10 Stainless

XM, XY

DS M XSA XVD 45 XGT CYV A Fn (KF flange) E K (mm) Model A 86.7 114 128 163 193 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 66 84 95 121 144 H J XYD-25 XYD-40 XYD-50 XYD-63 XYD-80 100.2 130 178 209 268 16 20 20 20 20 7.5 15 17.5 19.5 26.5 491 Stainless steel High Vacuum Angle/In-line Valve Manual Valve/Bellows Seal XMH, XYH Series RoHS

VCW

(mm) Dimensions Electrical entry A B C D E G H J Z Model Grommet Conduit DIN terminal Conduit terminal Q R S T U V W N X Y VV2CW2 49 20 24.5 28 4.5 38 17.3 34.5 63.5 22 45.5 44 43.5 46 58 41.5 66 99 77 VV2CW3 57 25.5 28.5 30 5.5 42 19.3 38.5 74 24 55 45.5 53 48 60 51 68 101 86.5 VV2CW4 57 25.5 28.5 30 5.5 42 20.8 41.5 81.5 26 62.5 47.5 60.5 50 62 58.5 70 103 94 17-2-59

ZMA

53 53 53 60 40 60 40 40 40 40 27 27 27 40 27 Suction flow rate Suction flow rate Suction flow rate Suction flow rate 20 13 13 13 13 20 0 60 40 20 0.6 0.3 0.5 0.4 0.2 0 0.1 0 60 40 20 0 0.6 0.5 0.4 0.3 0.2 0.1 Supply pressure (MPa) Flow rate (l/min (ANR)) Supply pressure (MPa) Flow rate (l/min (ANR)) 13-4-26 7 Series ZM Vacuum Ejector: With Solid State Timer Exhaust Characteristics/Flow Characteristics

Electric Actuator/Slider Type

30 40 0 5 10 15 20 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 1,000 1,000 1,000 Mey Horizontal m 500 500 500 L2 0 0 0 0 0 5 10 15 20 0 10 20 30 40 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 800 800 800 600 600 600 L3 400 400 400 Mer m 200 200 200 0 0 0 0 0 10 20 30 40 50 60 0 10 20 30 40 5 10 15 20 Work load [kg] Work load [kg] Work load [kg] 1,500

Table of Contents

20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 , , 1 4 3 8 40 40 50 50 55 55 65 85 , Misc.

Environment

kg] 0 10 20 30 40 50 60 Work load [kg] 1500 1500 1500 Mep 1000 1000 1000 L3 [mm] L3 [mm] L3 [mm] m L3 Z 500 500 500 0 0 0 0 10 20 30 40 50 60 Work load [kg] 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 1500 1500 1500 L4 1000 1000 1000 L4 [mm] L4 [mm] L4 [mm] X 500 500 500 0 0 0 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] 1500 1500

CQS

, refer to page 7-6-20.

C85

M8 x 1.25 G 1/8 M22 x 1.5 126 13 15 8 15 24 32 6 62 44 17 20 24 28 8 8 22 8.2 11 20 25 G 1/8 M22 x 1.5 M10 x 1.25 137 17 15 10 15 30 32 8 65 50 20 22 28 33.5 8 8 22 11 10.2 22 With Rod Boot (mm) Item h KK 1 to 50 AM C e f K Stroke 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Bore 20 M8 x 1.25 71 20 8 36 20 6 84 96 109 134 159 25 M10 x 1.25 74 22 10 36 20 8 87 99 112

CRQ2

30 40 5 18 9 6 35 44 53 6 40 60 20 10 7 50 10 89 59 30 15 11 74 12 97 65 13 32 18 20 83 15 109 73 36 93 15 11-8-11 12 Series CRQ2 (Size: 10, 15, 20, 30, 40) Simple Specials: -XA1 to -XA24: Shaft Pattern Sequencing I Shaft shape pattern is dealt with simple made-to-order system.

MHZ2/MHZJ2

, 0.7MPa 0.6MPa, 0.7MPa 20 20 MHZ2/Standard 10 10 0 10 20 30 40 50 60 0 10 20 30 40 50 60 Gripping point L mm Gripping point L mm H H MHZ 2-20 MHZ 2-20 Gripping point 100 L 80 Pressure 0.2MPa 80 Pressure 0.2MPa Overhang H mm Overhang H mm 60 MHZJ2/With dust cover 60 0.6MPa 0.3MPa 0.7MPa 40 0.4MPa 0.5MPa 0.3MPa 0.4MPa 0.5MPa 0.6MPa 0.7MPa 40 20 20 0 20 40 60 80 0 20 40 60 80 100 Gripping point

RSQ

QA F Q QB QU QW DBore size (mm) QW QU 29 " 32 40 50 13 13 16 38 42 50 20 24.5 26 7.5 8 9.5 6 6 8 60.5 68 82 -X 20 32 to 50 20B 41.5 45 48 52.5 54 D 10 12 20 25 25 E 29 36 45 52 64 F 6 8 7.5 8 8 G 3 4 8 10 10 H 26.5 33 39 53 53 I 60 69 86 J 4.5 5 7 L 2 2 3 4 4 M 28 36 34 40 50 N 3.5 5.5 5.5 5.5 6.6 O counterbore P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 Q 17 20 20 24.5 24.5 S 8 10 18 24

CNG

GR GQ H1 I 18 13 38 93 1/8 56.5 14 8 12 2 85 10 18 5.5 6 4 8 5 26 20 to 200 15.5 to 200 22 17 45 103 1/8 66 16.5 10 14 2 96 10 25 6.5 9 7 10 6 31 20 to 300 19.5 to 300 22 17 45 104 1/8 67.5 20 12 18 2 97 10 25 6.5 9 7 10 6 38 20 to 300 19.5 to 300 30 19 52 112 1/8 75 26 16 25 2 104 10 (13) 26 7 11 7 12 8 47 20 to 300 301 to 500 301 to 500 27 to 300 (mm) Bore size (mm) 20 25 32 40 P

Cylinder with Lock Series CNG

0.5MPaP 200 200 40 100 100 32 30 40 50 30 40 50 40 25 20 32 Load weight: m (kg) Load weight: m (kg) 20 20 25 20 10 10 5 4 3 5 4 3 2 2 1 1 0.5 0.5 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) 1000 1000 Maximum speed: V(mm/s) Note: 1kg = 2.2046lb 1MPa = 1450psi 1in = 25.4mm 20