CQ2

With built-in One-touch fitting (mm) Bore (mm) 40 50 63 P1 V Z1 W1 Z1 13 16 16 6 8 8 40.5 50 66.5 82 95 56.5 W1 Standard (mm) W/o auto switch With auto switch Bore size (mm) Stroke range (mm) C S H I P D Th9 Q E U Z F J K L M N O A B B A 36.5 46.5 38.5 48.5 44 54 29.5 39.5 30.5 40.5 36 46 5 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 0 0.052 40 46.5 39.5 M8 X 1.25 14 13 66 69 Rc(PT)1/

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Type S3: Side ported (Lead wire length) 91.7[96.1] Approx. 300 10-SS5YJ3-S31Stations -M3 L1 3.5 L2 2-3.5 (For mounting) Manual override M5 x 0.8 (P, R port) 5.2 29.2 7.5 17.3 30 52.2[54.4] 51.4[53.6] 3 91.7[96.1] 78.8[83.2] 78.8[83.2] A A A A A 13.5 B B B B B P R P R P R 29.2 P R 30 17.3 25 7.5 12 25 51.4[53.6] 52.2[54.4] 13.5 B B B B B A A A A A 3 5.2 2-3.5 (For mounting) Manual override

1

CJ1 Series CJ2 CJP C port A port B port JIS Symbol Function CJ2 Bore size (mm) 10 Z SB SA (B) When air pressure is supplied to the port (B), both A and B stokes extend. 112.5 53.5 31 CM2 SB + Stroke B SA + Stroke A Z + Stroke (A + B) 16 114 54.5 31.5 B stroke A stroke CG1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

ZX

Refer to page 13-2-10 for details. (1) Valve unit (4) Adsorption confirmation switch unit K1 A V ZX1 5 Z B D M L Unit for replacement 15 C 0X B ZSP1 D Piping specifications Applicable nozzle diameter Manifold All ports are equipped with plugs.

SYJ3000/5000/7000

center Apparent power VA (B) 2 (A) 4 (B) 2 (A) 4 AC 200 V 2.3 (With indicator light: 2.4) 2.5 (With indicator light: 2.6) [2.7 (With indicator light: 2.8)] 220 V [230 V] 1 (P) 3 (R) 5 (R) 1 (P) 3 (R) Surge voltage suppressor Diode (Non-polarity type: valistor) 3 position exhaust center 3 position exhaust center (B) 2 (A) 4 (B) 2 (A) 4 Indicator light LED In common between 110 VAC and 115

MXS

Combination of Options v: Possible X: Not possible Functional option F R P FR FP Adjuster option v v v v v v v (3) v (3) v (3) AS v v v X X X X AT v v v (3) X X X X A v X X X BS v v v X X X X BT v v X X X X X B v Note 3) For combination of buffer mechanism style and stroke adjuster at extension end style, the buffer stroke is shortened by the adjusted length with the stroke adjuster at extension

Possible to transfer a workpiece at low-speed.

2-wire 5 V, 12 V Reed auto switch Solid state auto switch 12 V IC circuit Diagnostic indication (2-color indicator) 5 V, 12 V Relay, PLC Yes Grommet 24 V 12 V IC circuit 5 V, 12 V Water resistant (2-color indicator) M9PAV1 M9PA1 M9BAV1 M9BA1 12 V 3-wire (NPN equiv.)

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Weight [g] LE-CA-1-B 270 LE-CA-3-B 520 LE-CA-5-B 870 LE-CA-8-B 1370 LE-CA-A-B 1710 LE-CA-B-B 2560 LE-CA-C-B 3400 U V W Red White Black Connector A2 terminal no. B-1 A-1 B-2 A-2 B-3 A-3 B-4 A-4 Connector D terminal no. 12 13 7 6 9 8 11 10 3 Signal Cable color Shield Brown Black Red Black Orange Black Yellow Black Vcc GND A A B B Z Z Connector B terminal no.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

B D Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Parallel electrical entry B A A D Reed Switch D-A90(V), D-A93(V), D-A96(V) Reed Switch D-A90(V), D-A93(V), D-A96(V) Set screw (included to auto switch) (mm) Stroke (mm) 20 45 25 51 31 Stroke (mm) 10 34.5 35.5

Title not found

B-1 A-1 B-2 A-2 B-3 A-3 B-4 A-4 Circuit Cable color Shield Vcc GND A A B B Z Z Brown Black Red Black Orange Black Yellow Black Connector B terminal no.

C95

Applicable Auto Switch/Tie-rod Mounting Load voltage Applicable load Lead wire length (m) Auto switch model Indicator light Wiring (Output) Tie-rod Electrical entry Type Special function Band 0.5 (Nil) 3 (L) 5 (Z) AC DC mounting mounting 3-wire (Equiv. to NPN) A56 IC 5 V A53 A54 A67 A64 A59W Yes A33 A34 A44 100 V, 200 V 200 V or less 12 V 2-wire 5 V, 12 V 12 V IC Relay, PLC 24 V No Reed

Environment

[mm] 11LEJS 25ASize Stroke range [mm] C D EH EV H J K L M O1 R S T U LEC 63 Up to 200 21 40 76 82 M16 x 2 44 36 37.4 60 M8 x 1.25 16 78 83 5 205 to 500 505 to 800 LEC S LEC SS-T Size Stroke range [mm] B V Incremental encoder Absolute encoder Without lock With lock Without lock With lock A W Z A W Z A W Z A W Z LEC Y 63 Up to 200 190.7 60 338.3 110.2 8.1 366.9 138.8 8.1 326.6 98.5 8.1 366.1

Stroke Reading Cylinder and Counter

Connector pin arrangement A phase (White) B phase (Yellow) G A F B H E D C Stroke reading cylinder movement in mm 0.04 0.08 0.12 COM (blue, brown) (0 V) A phase output (White) Output circuit of stroke reading cylinder (Yellow) B phase output Stroke reading cylinder Signal Wire color Contact signal Signal name A White A phase B Yellow B phase C Brown COM (0 V) D Blue COM (0 V) DE Red +12 to

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Relay, PLC 12 V Yes Yes 24 V (B54) B54 100 V, 200 V 2-wire C73C 12 V Diagnostic indication (2-color indication) PLC (B59W) B59W Grommet G79 K79 K79C 3-wire (NPN) H7A1 H7A2 H7B H7C H7NW H7PW H7BW G59 G5P K59 5 V, 12 V IC circuit Grommet 3-wire (PNP) 12 V 2-wire Connector 3-wire (NPN) G59W G5PW K59W 5 V, 12 V Relay, PLC IC circuit Diagnostic indication (2-color indication) 24 V 3-wire

3

AB B MK MK Basic (mm) MK2T A B C D E F Yh9 G 45 52 64 77 H 16 16 20 20 I 9 9 11 14 J 7 7 8 10.5 K M6 x 1.0 M6 x 1.0 M8 x 1.25 M10 x 1.5 L 10 10 14 18 S 31.5 29 34 34.5 T 10.5 9 11.5 10.5 W 14 15 19 19 X 3 3 3.5 3.5 Z 6.5 6.5 7.5 7.5 AA 4.5 5 7 7 AB 1 1 1 1.4 AC 5.5 5.5 6.6 9 AE 1/8 1/8 1/4 1/4 Model 30 30 37 48 MKB32-Z MKB40-Z MKB50-Z MKB63-Z 0 0.062 0 0.062 0 0.062 0 0.062 49.5 57 71 84

ZR

(for replacing filter element etc.) on side mounting. 1 Ejector Adapter C Bracket B Bracket B Rc 1/8 V port (Vacuum port) Nozzle dia./1.8, 2.0 mm Note) 1 Dimensions for mounting bracket B ZR1 1-K1M18 20 2 Dimensions for mounting spacer B Bracket B part no. : P3270154 (Standard accessory) Spacer B part no. : P3270157 Manual override 1 Dimensions not indicated are identical to the top drawing

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

12 V Relay, PLC Grommet Yes 24 V 3-wire (NPN) 5 V, 12 V IC circuit Diagnostic indication (2-color indication) 3-wire (PNP) 2-wire 12 V Yes No Yes No 100 V Reed auto switch Relay, PLC IC circuit 100 V or less Grommet 24 V 2-wire 12 V 100 V, 200 V 200 V or less Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Solid

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

MY1CW16/20 MY1MW16/20 MX B A MTS Reed Switch Solid State Switch D-A90(V), D-A93(V), D-A96(V) (mm) D-M9N(V), D-M9P(V), D-M9B(V) D-F9NW(V), D-F9PW(V), D-F9BW(V) MY 16 20 Mounting position 16 20 Mounting position Mounting position 16 20 93 94 A A A 73 74 70 90 CY 107 106 B B B 87 86 90 110 6.5 7 8.5 6.5 Operating range Note) Operating range Note) Operating range Note) 11 7.5 MG CX MY1MW25/32

•

(NPN) b-v G39 1 e , i,,",, 2-wi," K39 -1 i DiagnostiC Indication I'" 3-~,e (NPN) 1 5V, 12 \ M9NW Relay, PLe 3-w", (PNP) It . ~ .. (2-ColOr indication) 2-~-,"24 V I ( ~ .' Grommet , , 3-wi,.