42 ) 96.2 71.7 96.2 71.7 58.2 VFR 1/8" External pilot port 44 106 9 9 91 44 106 49.7 58.2 Station number 1/8" External pilot port 49.7 9 9 U side entry (LU) VQ7 D side U side D side n n U side 8 8 Manual override 7 7 A B A B A B A B A B A A A B A B A B A B A B A A B B B A A A A A A A 6 6 5 5 215 P = 25 44 L1 L2 L1 L2 4 4 B B Indicator light 3 3 2 2 P = 25 1 1 27 38 50.5 27 38 50.5 44 Stations
8 @1 @2 w !4 !2 !5 t @0 @3 @4 @5 !9 !8 @1 @2 @6 !4 !2 !3 y !0 !1 e q @8!6 u !7 o i !3 y !0 !1 @7 r q @8 !6 u !7 o i CXSJM10 CXSJL10 @9 !7 o i !6 r !9 !8 @2 @9 !7 o i !6 @4 @5 !8 r !9 @2 Piston rod B-side piston Rod cover Piston rod B-side piston Rod cover Parts List: Standard Piping No. Description Material No.
11.5 18.5 23 B 12.5 14.5 13.5 19 B 9 11 10 15.5 B 7 9 8 13.5 A 14 12 19 23.5 B 13 15 14 19.5 A 14.5 12.5 19.5 24 B 13.5 15.5 14.5 20 B 7.5 9.5 8.5 14 B 10.5 12.5 11.5 17 B 7 9 8 13.5 20 25 32 40 Note) When setting an auto switch, be sure to check its operation before adjusting.
MHZ MHF MHL MHR Hysteresis Hysteresis Switch operating position (ON) Switch operating position (ON) MHK Switch reset position (OFF) Switch reset position (OFF) MHS Hysteresis (mm) D-F9W(V) D-F9BAL D-Y7W(V) D-Y59A/B D-Y69A/B D-Y7P(V) MHC D-M9(V) D-F8 ON position set when red light is turned on ON position set when green light is turned on ON position set when red light is turned on ON position
Flat Type Fingers [3] D4-MM thread depth L (Thread for mounting attachment) 20K J A A D G B D B K J F C S W O (mm) Model Open Closed Weight (g) F G A W B C D J K MM L MHZ2-63 (1) 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 +1.2 0.8 2H9 2.5H9 3H9 4H9 5H9 6H9 +0.2 0 2 2.45 3.05 3.95 4.9 7.3 8.7 5 1 1.4 1.4 1.6 2 3 3 4 5 8 10 12 15 18 3.5 6 8 10 12 20 24 7.2 5.2 8.3 10.5 13.1 18 22 7.5
Standard Strokes Stroke (mm) Bore size (mm) Bore size (mm) Mounting bracket Applicable switch Note 50 100 75 125 150 175 200 250 300 400 500 25 Switch mounting screw (M3 X 0.5 X 8 l ) Square nut 12 V V V V V V D-A7, A8 D-A7lH, A80H D-A73C, A80C D-A79W D-F7lV D-F7, J7 D-J79C D-F7lWV D-F79W, J79W 12 20 BQ-1 20 V V V V V V V V 32 V V V V V V V V V Switch mounting screw (M3 X 0.5 X 10 l )
Order the seal kit, based on each bore size. 8-7-20 21 Long Stroke Slide Table Series MXW Proper Auto Switch Mounting Position (Detection at stroke end) Reed Switch: D-A90(V), D-A93(V), D-A96(V) Stroke (mm) Model 25 50 75 100 125 150 175 200 225 250 275 300 A 52.5 31.5 27.5 27.5 27.5 27.5 B 79.5 100.5 125.5 150.5 175.5 200.5 MXW8 B A W 32.5 11.5 7.5 7.5 7.5 7.5 V 99.5 120.5 145.5 170.5 195.5
9 i @5 o Section B-B' Section B-B' @5 !8@6!7 @5@6!7 !
4 r@4 #8 $1 e @1 @3t #3 !5 @8 B' @9 @0 A' A A' A B !6 !3 #0 40 to 63: Over 100 stroke !6 50 to 100 80, 100: Over 200 stroke Extension locking (Type F) Retraction locking (Type B) !9 @7 #9 #5 i o @5 #5 #9 @7 !9 i @5 o Section B-B' Section B-B' @5 !8@6!7 @5@6!7 !
A 30 Hs Auto SWitch uto ASWltch P roper Mountm Position (mm) ' D-ASO D-A60 D-A30 D-A44 D-G39 D-K39 D-M90 D-M9OV D-M9OW D-M9OWV D-M90AL D-M90 AVL D-FSOW D-J59W D-FSBAL o.F50 D-J50 o.F59F 0.=80 o.Y5DN60 o.Y7PIY7PV o.Y70W o.Y70WV o.Y7BAL ~ switcl:l . rnod8l o.A90 o.A9OV o.A59W D-F5NTL A B A B A B A B A I B A B A B Bore size 125 9 8 13 12 6.5 5.5 3 2 7 I 6 9.5 8.5 14.5 13.5 140 9 8 13 12 6.5
V Red F 0 V Black G Shield 10-12-20 20 Stroke Reading Cylinder Series CE1 Construction 12, 20 32 @7 @4@8 @0 oi @3 !
detected. v Ammonium ion (NH4+) [mg/L] 0.1 or less v Residual chlorine (Cl) [mg/L] 0.3 or less v Free carbon (CO2) [mg/L] 4.0 or less v Reference item dt HED < For 400 V type and option B [With earth leakage breaker]> 3.
only) 1/8, 1/4 1/4, 3/8 3/8, 1/2 1/2 Port size (Nominal size B) 0.83 (0.90) 1.21 (1.30) 1.44 (1.53) 2.23 (2.33) 2.26 (2.36) 2.55 (2.65) 3.10 (3.20) 3.15 (3.25) Type M Weight (kg) (With auto-drain) 1.28 (1.35) 1.67 (1.76) 1.90 (1.99) 3.34 (3.45) 3.37 (3.48) 3.74 (3.84) 4.29 (4.39) 4.34 (4.44) Type V Note 1) For flow characteristics and pressure characteristics of regulator, refer to page 14
BQ-1 BQ-2 BQ2-012 Weight (g) 1.5 1.5 5 259
CHQB/CHQWB Series How to Mount and Move the Auto Switch
Width across flat 12 (Hexagon) A A Width across flat 8 (Hexagon) B 4 11 B 8 9 9 B 4.5 7.9 6.6 9.8 Dimensions A B Model ZPT3-B8 ZPT3-B01 ZPT3-N01 ZPT3-T01 Dimensions M8 x 1.25 Rc1/8 NPT1/8 NPTF1/8 3.5 6.2 6.9 6.9 A B Model ZPT2-B5 ZPT2-B6 M5 x 0.8 M6 x 1 5 6 ZPT2-B01/N01/T01 Adapter part no. ZPT4-B6/B8 Adapter part no.
V Red F 0 V Black G Shield 10-12-20 20 Stroke Reading Cylinder Series CE1 Construction 12, 20 32 @7 @4@8 @0 oi @3 !
Width across flat 12 (Hexagon) A A Width across flat 8 (Hexagon) B 4 11 B 8 9 9 B 4.5 7.9 6.6 9.8 Dimensions A B Model ZPT3-B8 ZPT3-B01 ZPT3-N01 ZPT3-T01 Dimensions M8 x 1.25 Rc1/8 NPT1/8 NPTF1/8 3.5 6.2 6.9 6.9 A B Model ZPT2-B5 ZPT2-B6 M5 x 0.8 M6 x 1 5 6 ZPT2-B01/N01/T01 Adapter part no. ZPT4-B6/B8 Adapter part no.
D-Y59A, B /D-Y69A, B /D-Y7P(V) Direct Mounting Style . D-F9G/D-F9H Normally Closed Direct Mounting Style. D-Y7G/D-Y7H Normally Closed Direct Mounting Style. 2-color Indication Type . D-F79W/D-F7PW/D-J79W Rail Mounting Style. D-F7NWV/D-F7BWV Rail Mounting Style . D-F9NW(V)/D-F9PW(V)/D-F9BW(V) Direct Mounting Style .
-43S(V) P DIN terminal M L Model G 59 60 63 H 48 58.5 64 64 63 J 47 48 51 51 (Unit: inch) 1/4 1/4 1/4 3/8 8 10 10 10 3 5 5 5 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3-43S(V) 34 High Vacuum Angle Valve Series XL 1 With pilot pressure at 0.5MPa (72psi) XLA Normally closed XLC Double acting (dual operation) Valve type Model 1200 1200 1000 1000 800 800 T msec T msec 600 600 Bellows seal 400 400 200
MY1CW16/20 MY1MW16/20 MX B A MTS Reed Switch Solid State Switch D-A90(V), D-A93(V), D-A96(V) (mm) D-M9N(V), D-M9P(V), D-M9B(V) D-F9NW(V), D-F9PW(V), D-F9BW(V) MY 16 20 Mounting position 16 20 Mounting position Mounting position 16 20 93 94 A A A 73 74 70 90 CY 107 106 B B B 87 86 90 110 6.5 7 8.5 6.5 Operating range Note) Operating range Note) Operating range Note) 11 7.5 MG CX MY1MW25/32