25

150 100 50 0 50 100 150 150 100 50 0 50 100 150 250 200 150 100 50 0 50 100 150 200 250 0 0 50 50 100 100 0.5 s 0.5 s 150 150 1 s 1 s 200 200 2 s 250 250 2 s 5 s 5 s 300 300 421 IZS40/41/42 Series Note) Static neutralization features are based on the data using the charged plate (size: 150 mm x 150 mm, capacitance: 20 pF) as defined in the U.S.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

Electro-Pneumatic Valve NVEP/NVEF Series

Etfective Orifice (mm2) NPTF (Base mount type) 1 1 3 02=1h 03 = 3/s I .t 1 30 Q2=1/t 03=9e O4=1/z 1 45 03 =3/8 04=1/z 06=aa (Base mount type) 1 2 02=lL 03 = 3/s 8 4.5 4 ?.

HRX-OM-Y098

Configuration One thermo-chiller for one controller. 2 2 R D R D 3 3 S D S D 5 5 S G S G Controller Master This product Do not connect any wire to other PIN numbers. Fig. 3-13 Connection of RS-232C 3.3.10 Ethernet Modbus/TCP Communication wiring This product can operate the following by Ethernet Modbus/TCP communication.

q"s

I { 0 s l I l 6 l ; D.0 t' 6 l 0.6 0.5 o.4 0.3 6 ' ) !

AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel (SUS304) M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel

MLGC

350, 400, 450, 500, 600, 700, 800 20 25 32 40 BMA2 -020 BA -01 BA -02 BA -32 BA -04 BM1 -01 BM1 -02 BM1 -32 BM1 -04 Intermediate strokes and short strokes other than the above are produced upon receipt of order.

MLGC

350, 400, 450, 500, 600, 700, 800 20 25 32 40 BMA2 -020 BA -01 BA -02 BA -32 BA -04 BM1 -01 BM1 -02 BM1 -32 BM1 -04 Intermediate strokes and short strokes other than the above are produced upon receipt of order.

HRX-OM-W060

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-13 Connection of RS-232C HRL Series 3.3 Installation 3-27 HRX-OM-W060 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

CG1

M5 X 0.8 M6 X 0.75 M8 X 1.0 M10 X 1.25 M12 X 1.25 M14 X 1.5 27 32 38 48 59 72 59 71 55 62 62 70 78 78 80 80 16 17 17 17 17 18 10 7 5.5 6.5 7.5 8.5 10 4 5 5.5 6 7.5 0.5 1 30 30 35 35 40 40 52 62 (14.5) (11.5) 126 (134) 133 (141) 135 (143) 150 (159) 170 (182) 170 (182) 191 (205) 191 (205) Bore (mm) 8 10 12 14 16 18 Bore (mm) ZZ GB S HH GA PD HD (17.5) (11.5) 20 25 32 40 50 63 20 25 32 40

HRX-OM-W032

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-13 Connection of RS-232C HRS Series 3.3 Installation 3-25 HRX-OM-W032 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly. Incorrect piping might cause leakage of supplied or drained fluid and wet surrounding area and facility.

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

150 to 1000 150 to 700 150 to 700 10 8 8 8 26.5 22 20 20 12.5 11 10 10 24 22 22 18 46.5 37.5 33.5 22 17 17 13 21 19.5 19.5 15.5 55.5 49.5 45.5 40 7 6.8 6.8 6.8 30 28 28 25 227 199 186 186 55 40 40 40 75 55 55 55 51 42.5 34.5 14 12 10 M10 x 1.25 M14 x 1.5 7 56.2 Bore size Y X NN 264 232 219 215 P 181 159 146 146 S 10 8 8 8 Z ZZ Stroke range 1/8 1/8 1/8 1/4 23 20 20 20 27 25 25 21 40 32 25

E-P HYREG

VVEX2-2-5-02 VY1200-00-G 4 pcs.

Auto Switch Guide

Applicable bore size (mm) Cylinder series 32 40 50 63 80 100 MDB1 BMP1-032 9-15-78

60

H S U P EXH. H S EXH. U H S P U P G H F SUP. SUP.

ISA2

Example) G36-P4-01-X30 Regulator 2 Port Solenoid Valve AR 20 E 02 1 VCA27A S 5 DL 02 4 Q Port size Thread type Voltage CE marked 02 02N 02F Rc 1/4 NPT 1/4 G 1/4 Rc NPT G Nil N F 1 2 3 4 5 6 36 100 VAC 200 VAC 110 VAC 220 VAC 24 VDC 12 VDC 230 VAC Throttle Option (The shape of pressure gauge) Note 2) Nil S B K Without throttle and manual lock With throttle With manual lock With manual lock

Soft Start-up Valve AV2000/3000/4000/5000

-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-D AV5000-DZ AV5000-Y AV5000-YZ M4 x 0.7 Depth 4.5 22 29 0 38 40 31 105 93 66 1/4 47.5 23.5 65.5 6 M4 x 0.7 Depth 4.5 22 29 0 38 40 31 125 66 1/4

VFA3000

Specify the part number for the valve(s), blank plate assembly and manifold base. VV5FA3-40-052-02 .1 pc. VFA3140 .2 pcs. VFA3240 .2 pcs. DXT031-38-1A .1 pc.

Air Pilot Operated Series NVSA

P & S P A 0 1 1 3 43 y. qB siB s/B s/g 9a SP & SPA 0114 54 B B B B sP & sPA 0115 45 S s I 2 MTNG HOLES .FOOTPRINT' CLASS 1 SUB.PLATE MOUNTED 'SWAY VATVES '49 i.'8 (?