RSQ

6 e !0 !3 w @1 @2 !5 t y q r e !0 !3w #0 @9 #3 @8 @7 o @0 !6 i !9 !8 u o @0 !7 i !9 !

MTS

40 200 Overhang L (mm) Overhang L (mm) Graph (7) Maximum Speed: Up to 800 (mm/s) 20 30 40 50 10 2 3 4 5 Weight W (kg) 40 32 1 0.5 0.4 0.3 0.2 16 25 20 12 0.1 50 100 200 5 20 30 40 10 Overhang L (mm) 8-10-6 6 Model Selection Series MTS Horizontal Mounting 8 Maximum speed: Up to 500 mm/s Maximum speed: Up to 300 mm/s Graph (8) Stroke: Up to 10 stroke Graph (11) Stroke: Up to 10 stroke 0.1

Series VQ Metal Seal/Rubber Seal Body Ported

CM2 Pressure 0.5MPa Load factor 50% Piping length 5m Speed controller: AS3000F-06 (S=6.5mm2) Cylinder stroke 100mm Fitting (One-touch fitting) Effective area (mm2)(Cv) Cylinder Speed (mm/s) Model AS3000F-06 (S=6.5mm2) Cylinder stroke 50mm 10 6 16 20 25 32 40 40 50 63 80 100 150 300 450 600 750 150 300 450 600 750 6 4.5 (0.25) VQ1000 (Metal seal) 6 6.3 (0.35) VQ1001 (Rubber seal) Series VQ2000

IDU/IDF

Note 2) Combinations of H and M, R and S, S and T, L and M are not available. Note 3) Option "T" is not available for IDU6D, 8D-4 and -6.

A

Model A B C D E F G H J NAR425 80 141 37 67 71 (72) 3 50 48 80 B24 NAR625 98 152 40 78 76.5 (77.5) 7 87 52 90 B25 NAR825 126 217 75 110 92.5 (93.5) 5 NAR925 160 242 89 140 107.5 (108.5) 10 H O W T O O R D E R P I L O T O P E R AT E D P R E S S U R E R E G U L AT O R 25 (N)AR Japanese N North American O P T I O N S B O D Y S I Z E B Bracket G Gauge 4 1/2 6 1 8 1 1/2 9 2 P O R T S I Z E 25

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

C6: 6 (SMC) N7: 1/4" (SMC) Applicable tubing O.D. C6: 6 (SMC) C8: 8 (SMC) C10: 10 (SMC) N7: 1/4" (SMC) N9: 5/16" (SMC) N11: 3/8" (SMC) (11) (47.7) One-touch fitting [PE: Pilot EXH port] Applicable tubing O.D.

HRL

After the machine has stopped, make sure to turn off the breaker of the users equipment (on the upstream side). 2 h 1 h 30 min 20 min 14 min 10 min 6 min 4 min 2 min 1 min Operating time 30 s 20 s Max. 10 s 5 s 2 s Min. 1 s 0.5 s 0.2 s 0.1 s 0.05 s 0.02 s 0.01 s 100 135 200 300 400 500 600 700 1000 1500 2000 3000 4000 Current (% for chiller main breaker volume) 341 HRL Series Specific Product

ZQ

ZF Left Right 15 -60 -60 ZP 10 -40 -40 Air consumption ZCU -20 -20 5 S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U NL HL H S 1 S 2 R U NL HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP

Slider Type/Ball Bushing Bearing

10 15 20 25 32 40 6 12 6 CY1L10 15 CY1L20 CY1L25 CY1L32 40 Applicable rodless cylinder 5.5 11 CYP 3.5 7 RB0805 RB1006 RB1411 RB2015 Shock absorber model 5.5 11 Maximum energy absorption: (J) 0.98 3.92 14.7 58.8 5 10 Stroke absorption: (mm) 5 6 11 15 5.5 11 Collision speed: (m/s) 0.05 to 5 4.5 9 Max. operating frequency: (cycle/min) 80 70 45 25 Since the cylinder is in an intermediate stop

Solid State Auto Switches

Weight (g) Applicable bore size(mm) Weight Applicable bore size(mm) Weight Auto switch model Auto switch model D-A33C-4, A34C-4 D-A33C-5, A34C-5 D-A33C-6, A34C-6 D-A33C-8, A34C-8 D-A33C-10, A34C-10 D-A44C-4 D-A44C-5 D-A44C-6 D-A44C-8 D-A44C-10 162 166 184 210 232 160 164 182 208 230 40 50 63 80 100 40 50 63 80 100 Dimensions (mm) T Applicable bore size (mm) 40 50 63 80 100 C 44 52 64 78 92

Compact Vacuum Ejector Series ZQ

Left Right 15 -60 -60 10 -40 -40 Air consumption -20 -20 5 S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U NL HL H S 1 S 2 R U NL HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE

SFOD-OMT0009CN

K [mm] 251/73 249/77 246/53 243/48 242/39 254/43 (3.438) (3.234) (4.642) (5.063) (6.205) (5.907) [mm/s] 80 80 100 100 120 120 [mm/s] 5 5 5 5 5 5 () [mm/s] 8 8 8 9 9 9 () 110 No.SFOD-OMT0009CN-B LEHF10 LEHF20 LEHF32 LEHF40 K [mm] 40/15 50/15 70/16 70/16 (2.667) (3.333) (4.375) (4.375) [mm/s] 80 100 100 100 [mm/s] 5 5 5 5 () [mm/s] 7 8 8 8 () LEHS10 LEHS20 LEHS32 LEHS40 K [mm] 255/76 235

2–4

40 45 50 55 60 65 70 75 80 85 40 45 50 55 60 65 70 75 80 85 110 135 45 50 55 60 65 70 75 80 85 90 115 140 55 60 65 70 75 80 85 90 95 120 145 M3 x 30 x 35 x 40 x 45 x 50 x 55 M3 x 30 x 35 x 40 x 45 x 50 x 55 M5 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 M5 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 M5 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 x 110 x 135 M5 x 45 x 50

Dual Rod Cylinder/High Speed Specification Type Series CXS-XB19

130 CXS20-70-XB19 70 164 140 CXS20-75-XB19 75 169 145 60 CXS20-80-XB19 80 174 150 CXS20-90-XB19 90 184 160 CXS20-100-XB19 100 194 170 6 Series CXS-XB19 Dimensions CXS25--XB19 30 ZZ S 14 10 SS 28 1 2-5 x 22l AW (spring pin) 30 Z 20 7 2-6.9 through 2-11 counter bore depth 6.3 78 1 75 0.2 60 0.2 60 0.2 35 80 6.3 64 3.1 5 M6 x 1 x 18.5l and M6 x 1 (hexagon bolt) (hexagon nut) 2-M6 x 1 (through

Heavy Duty Stopper Cylinder Series RSH/RS1H

6 i @7 @1 #2 @9 @6 @4 #9 !0 !9 u #0 #6 t #8 q y $0 $1 20 r !1 e @2 !2 #7 #3 #1 32 w 50, 63, 80 @3 Double acting (DL, DM) !3 !5 #6 o @5 @4 i @1 @6 !0 @7 @9 !6 t u !7 !8 q #8 $1 y Single acting spring extended (TL, TM) Double acting spring type (BL, BM) r $0 !1 !

MY1

DWX D 11.4 d 6 Y 9 S 4 Applicable O-ring C9 Bore size (mm) 25 32 40 38 -X 11.4 13.4 6 8 48 54 11 14 6 9 C9 C11.2 Technical Data 1355 MY1W Series Dimensions: 50, 63 4 x MM depth M (LL) L 4 x B counterbore depth C LD through-hole bottom side J depth K PA YW QW LW PB Q+ Stroke PG This port is not available for use.

ZR

Nil D1 None Nil For 24, 12, 6, 3 VDC Air operated ZSE4 + Filter Digital vacuum switch D2 ZSE4B + Filter Rated voltage L LN Lead wire length 0.3 m Nil Air operated D3 ZSE4E + Filter Without lead wire (Applicable to only DC) 5 24 VDC 6 12 VDC V 6 VDC S 5 VDC R 3 VDC E ZSE2 + Filter Vacuum switch Plug connector type LO Without connector M Lead wire length 0.3 m F Filter Manual override MN MO

Air Slide Table Series MXQ

F A F Lr 6 6 6 Lr = 40mm MXQ6-30 0.015 0.03 0.05 MXQ6-10 MXQ6-20 MXQ6-30 MXQ6-30 MXQ6-50 MXQ6-50 MXQ6-40 Table displacement mm Table displacement mm Table displacement mm MXQ6-50 0.04 MXQ6-20 MXQ6-40 0.010 0.02 MXQ6-20 MXQ6-40 0.03 0.02 MXQ6-10 0.01 0.005 MXQ6-10 0.01 0 0 40 80 120 10 20 30 10 20 30 0 Load N (1N = Approx. 0.102kgf) Load N (1N = Approx. 0.102kgf) Load N (1N = Approx. 0.102kgf

RQ

Note 3) Clevis pins and snap rings are included with the double clevis type. 63 80 100 7-7-5 5 Series RQ Weight Basic Weight Additional Weight (g) (g) Bore size (mm) Magnet Both ends tapped style Bore size (mm) Standard stroke (mm) 25 6 12 8 181 180 171 127 32 11 6 26 17 143 180 165 151 100 35 45 175 116 20 5 6 4 159 143 137 92 40 13 6 27 17 155 214 198 196 50 14 6 53 32 243 373 348 393

Rotary Cylinder Series MRQ Size: 32, 40 1

6 !7 !8 !