Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

13 15 25 24 HA 17 24 30 36 41 52 62 80 92 G 3 4 5 6 6 7 7 8.5 8.5 HT 10.5 14 17 24 23.5 29 36 45 51 J x E M4 x 0.7 x 6 M4 x 0.7 x 6 M5 x 0.8 x 7 M6 x 1 x 8 M6 x 1 x 8 M8 x 1.25 x 10 M8 x 1.25 x 10 M10 x 1.5 x 15 M10 x 1.5 x 15 B 6.5 8 9.5 9.5 11 11 14 14 GP 20 27 33 39 44 55 65 83 95 HB 10.5 14 17 21 23.5 29 36 45 51 C 3.2 4.2 5.2 5.2 6.5 6.5 8.2 8.2 GW 18.5 25.5 31.5 37.5 42.5 53.5 63.5

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

L FT FX B + Stroke (mm) FZ FX A + Stroke Bore size (mm) Stroke range (mm) FZ A B CL CD CT CU 10 10 to 40 61.5 90.5 84.5 5 4 10 Double clevis type: MQQLD 16 10 to 60 70.5 107.5 98.5 8 5 12 20 10 to 60 79 119 109 10 5 14 CU CD hole H10 Shaft d9 Cap bolt 25 10 to 50,75,100 84.5 126.5 116.5 10 5 14 30 10 to 50,75,100 104 148 138 10 6 14 40 10 to 50,75,100 104 158 144 14 7 20 Bore size (mm) CX

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

K IE S XAH7 depth XL (mm) MLGPM, MLGPL common dimensions Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB GC H HA IA IB IC ID IE 14 11 100 44 16 12 44 54 10 120 M6 34 52 14 4 14 40 25, 50, 75 100, 125, 150, 175 200, 250, 300, 350 12 13 107 44 20 16 47 64 148 M8 35 64 19 50 11 7 14 115 49 20 16 50 78 162 M10 38 77 19 63 16.5 16.5 13.5 6.5 16.5 Bore size (mm) J K L MM ML NN OA OB OL

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

How to Order Manifolds VV5Q G 0 J 1 1 08 C6 B U0 Base mounted plug-in Series VQ1000 1 2 4 3 Kit designation Electrical entry Stations 1 3 02 2 stations Note 1) Top entry Side entry Kit Stations U0 S0 0 Flat cable kit with terminal block (20P) without cable Flat cable kit (20P) without cable 2 to 8 (16) G kit J kit 16 16 stations The minimum and maximum number of stations differ depending

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Fittings & Tubing Air Cylinders Rotary Actuators J 12 Maximum 14.5 (With stroke adjuster at retraction end) I 7.5 8 15 15 14 14 12 6.5 6.5 Vacuum suction port Rc, G, NPT1/8 12 25 6.5 K NA x M6 x 1 thread depth 6.5 25 KA Stroke adjuster at extension end Stroke adjuster at retraction end 6 18 46.5 (With stroke adjuster at extension end) N x M5 x 0.8 thread depth 10 (Insert) 6 x M5 x 0.8 thread

Modular Type Filter Regulator Series AW

R Z W N AWD30 to 40 Accessory/Optional specifications B C D E G H 1 2 6 8 C J N R W Z With bracket (with set nut) Accessories Float type auto drain (N.C.)

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

H G I J K L A B C D E F M R +0.058 0 -0.1 -0.2 -0.1 -0.2 -0.1 -0.3 -0.1 -0.3 AD-FI-20 AD-FI-25 AD-FI-32 9 9 16 16 +0.027 0 +0.027 0 +0.027 0 +0.027 0 36 38 55 55 16 18 22 22 9 9 12 15 20 25 32 40 10 10 15.5 15.5 20 20 24 24 14 14 20 20 M8 x 1.25 M10 x 1.25 M14 x 1.5 M16 x 1.5 20 25 32 40 46 46 56 64 28 30 40 43 60 60 80 88 22 22 30 30 16 16 16 24 10 10 12 16 30 30 36 44 M4 10 10 13 13 10

Micro-Mist Separator with Prefilter Series AMH

Port size 01 1/8 B 06 3/4B 02 1/4 B 10 lB 03 3/8 B 14 1 1/2B 04 1/2B 20 28 Table" combination of accessories and made to order specifications Accessories Accessooos I~p~~Tii\,"aR6~~ Applicable models Made to order specifications C 0 J R T AMHl50 AMH2S0 AMH350 AMH450 AMH550 AMH650 AMH850 D C Drain Quide 1/48 -J Accessories N.C. auto drain N.O. auto drain IN-OUT reversal -R 10 0 Element service

ZPT/ZPX

Hexagon width across flats 14 Hexagon width across flats 27 Hexagon width across flats 27 9 9 35 35 M18 x 1.5 M18 x 1.5 9 Width across flats 16 Rc 1/8 9 10 Width across flats 16 Rc 1/8 10 Hexagon width across flats 21 J Hexagon width across flats 21 J Width across flats 37 4-M4 x 0.7 Width across flats 24 28 45 I I 3-M3 x 0.5 H H 10 10 G G F F E E Y Y 3 4 18 34 C C A A Courtesy of Steven

Lubrication Equipment

Mounting orientation is Upper direction Model Port size Rc(PT) 63 63 80 85 90 100 B C A INA-11-402 INA-11-403 INA-11-404 INA-11-405 INA-11-406 INA-11-407 1/4 141 164.5 170 180 230 251 15 15 15 20 22 22 3/8 1/4, 1/2 3/8, 3/4 3/4, Bracket dimensions Model Port size B C D E A 1 F 345 419.2 K 57 49.6 J 14 14 H 95 120 G 32.5 0 1 1 1 1 2 4, 1 2, 1 175 250 175 250 87.5 125 460 613 135 209 4, 3 ALD600

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

2 P (finger closing port) G I Auto switch mounting groove positions (2 locations) MHS2-16D MHS2-20D MHS2-25D 5 6.5 5 3 24 5 3 24 6 3 5 4.5 24 4 4 4 33 33 33 (mm) I 4 5 5 Model MHS2-16D MHS2-20D MHS2-25D G 25 27 28 FZ 3 3 5 FY 11 13 14.5 FX 12.5 14.5 17 CB 11 13 15 EC 10 12 14 EO 14 16 20 NB 5h9 6h9 6h9 DC 30 36 42 NA 8 10 12 DO 34 40 48 K 4 5 6 B 30 36 42 Q 6 7 8 J 10 12 14 AA 35 38 40 AB

Sine Rodless Cylinder Series REBR Direct Mount Type

Dual axis type/REBHT LL 138 4-M thread depth MM PA XB PB 2-Rc 1/8 LW S + Stroke EB EA HC HP NL HG HT HA H HB NT PP PS N A Z + Stroke W Square nut for body mounting J TW (mm) Model A EA EB H HA HB HC HG HP HT J LL LW M MM N REBHT25 REBHT32 125 28.5 79 63 46 46 61.5 19.5 58.5 35 M6 x 1.0 56 119 M6 x 1.0 10 20.5 30 90 75 52.5 57.5 72.5 25 69.5 43 M8 x 1.25 63.5 130 M8 x 1.25 12 23 132.5 Model

Brake mechanism added

15 14 9 9 10 10 11 D-B59W 14 14 17 16 18 D-A9 and D-A9V cannot be mounted on 50.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

(Refer to page 8-14-26.)

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Digital pressure switch (Electrical entry: Wiring top entry) Digital pressure switch (Electrical entry: Wiring bottom entry) Square embedded type pressure gauge Option Round type pressure gauge J J J J H Dimensions Center of piping H H Center of piping Center of piping H Center of piping Standard specifications Model P1 P2 A B Note 1) C D F J K ARP20(K) ARP30(K) ARP40(K) 2 Note 2) 40 1/8

Series 10-, 21- AW-B Filter Regulator

size) Hexagon width across flats 14 Clearance for maintenance G Drain 1/8 CC A AW30-B to 40-06-B 1021J J D M S N T Bracket (Option) U F Panel fitting dimension R Applicable tubing 6/4 Y C Q V BB W K H IN OUT IN OUT Z P2 (Pressure gauge port size) Pressure gauge (Option) 2 x P1 (Port size) Plate thickness 10-/21-AW30-B: Max. 3.5 10-/21-AW40-B: Max. 5 B Hexagon width across flats 17 Clearance

C95

CA2 CS1 C76 C85 C95 Effective thread length (mm) Width across flats Bore size (mm) D F B A BP GL B2 BN GC GL1 C GA GB GD Ee11 CP95 32 10 12 13 54 19.5 22 G 1/8 7.5 46 97 45.5 12 32.5 83 13 13 30 NCM 40 13 16 13 63 21 24 G 1/8 10 52 104 52.5 12 38 91 14 16.5 35 50 16 20 14 75 29 32 G 1/4 11.5 65 120.5 58.5 15 46.5 104.5 15.5 19 40 NCA 63 16 20 14 90 29 32 G 1/4 17.5 75 134.5 68 12 56.5 119.5

Pneumatic Transfer System Series MF

a maximum of 152mm. 6 Series MF Dimensions Curved Type 15 32 MF -45 (D) H H J I I G Note 1) G Note 1) J J I G Note 1) Y Y C Y C C E (A) E E (A) (A) B B 45 45 45 B X X X X C C C SMC G Note 1) G Note 1) I G Note 1) I J J F H F J (D) I (D) RG RT RS B 720 819 C 300 303 D 376 449 E R310 R445 F 60 87 G 93 129 B 780 851 C 301 300 D 369 418 E R390 R495 F 60 87 G 93 129 B 730 790 C 302 304 D 424

Compact and Lightweight

Applicable model A B C D E F G H J K L t AS-10L ZH05/07/10DA 11 14.8 18.3 3.4 27.5 19.5 3.4 4.9 7.3 12 14 1 AS-25L ZH13/15DA 17 19.6 24.6 4.5 38 28 4.5 6.5 9.5 15.5 20 1.2 AS-30L ZH18/20DA 22 24.8 29.8 43 33 22 1.4 230 Body Ported Type Vacuum Ejector ZH Series Body Ported: ZH05D A--to ZH20D A--S L S L DIN rail mounting bracket (Bracket on a single side) ZH05 to 10DA ZK2 H J E F ZQ ZR G ZB

MGP

PS 24 27 GR-S-010(10g 14 30 1216 30 1216 30 2025 100 3263 100 15 17-2.