2/3 Port Valve

Class B H B Class H DIN connector or DC not available.

MGP

Contents Contents 20 25 32 40 50 63 80 100 MGP63-B-PS MGP80-B-PS MGP100-B-PS MGP20-B-PS MGP25-B-PS MGP32-B-PS MGP40-B-PS MGP50-B-PS Kits include items 21, 22, 23, 24, 32, 33, 41 and 42 from the table above. Kits include items 21, 22, 23, 24, 32, 33, 41 and 42 from the table above. Items 32 and 33 are not included for bores sizes 80 and 100.

CNA

W1 B DX Z + Stroke DDH10 hole 90 B 4-DT B DS A DH DF DU DU DL DA 4-DR DO DO DC DE Rotating Angle Bore size (mm) 40 50 63 80 100 Bore size (mm) 40 50 63 80 100 Part no.

CNA

W1 B DX Z + Stroke DDH10 hole 90 B 4-DT B DS A DH DF DU DU DL DA 4-DR DO DO DC DE Rotating Angle Bore size (mm) 40 50 63 80 100 Bore size (mm) 40 50 63 80 100 Part no.

CL

1401 to 1600 1401 to 1600 1401 to 1600 Stroke Stroke Stroke Stroke Stroke Stroke Stroke 16.0 18.0 MY1 18.0 40 40 40 379.5 382 419 402.5 405 440 Note) 125 to 160 with auto switch and 40 are not available. 3.1-59 Series CL1 Single Clevis/(C) A Lock-up at piston forward B Lock-up at piston backward (mm) Stroke range (mm) A Bore (mm) 40 50 63 80 100 125 140 160 BY C CT BX CD B1 CX GB GC H1 D

Cylinder with Lock

P 1000 1000 80 80 100 100 63 63 50 50 40 40 80 80 100 100 63 63 50 50 40 40 100 100 32 32 Load mass m [kg] Load mass m [kg] 50 50 32 32 10 10 1 100 500 1000 1 100 500 1000 400 300 200 400 300 200 Maximum speed V [mm/s] Maximum speed V [mm/s] 6 Cylinder with Lock Double Acting, Single Rod 32, 40, 50, 63, 80, 100 MWB Series RoHS How to Order 50 B 40 MWB With auto switch MDWB M9BW B 40 50

Table of Contents

ON-flow 0.04 40 B p ipe pe 3/4 B p pi 3B 30 1 0.03 2B, pipe 20 0.02 , 5B , 4B pe 1/4 1 B pi 10 Max.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

, D-F79F Bore size (mm) D-A73/A80 D-F7NTL Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A B A B A B 6 27.5 40.5 28 40 33 35 10 35 45 35.5 44.5 40.5 39.5 15 34.5 62.5 35 62 40 57 20 64 50 64.5 49.5 69.5 44.5 25 44 71 44.5 70.5 49.5 65.5 32 55 83 55.5 82.5 60.5 77.5

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

M5 x 0.8 20 K B 40 31.5 145 115 45 60 M24 x 1.5 40 M6 x 1.0 30 C series rod A 40 31.5 145 115 45 60 M30 x 1.5 50 M6 x 1.0 30 50 40 185 145 57 79 M39 x 1.5 63 M8 x 1.25 40 Double knuckle joint Material: Cast iron Rod series Bore size (mm) 2-P keeper plate mounting threads Part no. l J P A B C D d H K L E + 0.07 0 + 0.07 0 + 0.084 0 + 0.1 0 + 0.1 0 + 0.1 0 + 0.07 0 + 0.084 0 + 0.1 0 + 0.1

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Auto Switch Proper Mounting Position (mm) D-Z7 D-Z80 D-Y59 D-Y69 D-Y7P D-Y7PV D-Y7W D-Y7WV D-Y7BA Auto switch model D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV D-F5W D-J59W D-F5 D-J5 D-F5BA D-F59F D-A3 D-A44 D-G39 D-K39 D-A9 D-A9V D-A5 D-A6 D-P4DW D-F5NT D-A59W A B A B A B A B A B A B A B A B A B Bore size 32 40 50 63 80 100 125 6.5 4 0.5 10.5 0 8 4.5 2 7 4.5 12 9.5 0.5 0 4 1.5 3.5 1 6.5 4 0.5 10.5

A

Model Port size A B C D E F G H J K L M N P B B S Y M B O L S NAC1000 M5X0.8 91 84.5 25.5 25 26 25 33 20 4.5 7.5 5 17.5 16 38.5 86.5 NAC2000 18 14 140 125 38 40 56.8 30 50 24 5.5 8.5 5 22 23 50 120.5 NAC3000 38 181 156.5 38 53 60.8 41 64 35 7 11 7 34.2 26 70.5 182 NAC4000 12 238 191.5 41 70 65.5 50 84 40 9 13 7 42.2 33 88 217 NAC5000 34 300 271.5 48 90 75.5 70 105 50 12 16 10 55.2 40

Aluminum High Vacuum Angle Valve

Heater: 422 A XLC/XLCV Series Aluminum High Vacuum Angle Valve Dimensions XLC16, 25, 40/ Air operated (b) E C D E C E Fn (KF flange) (a) Heater (Option) (c) Auto switch (Option) H J B G A A (mm) J A B C D E Note 1) Fn G H Model XLC-16 XLC-25 XLC-40 40 110 38 1 30 17 40 26 50 121 48 1 12 40 26 39 28 65 171 66 2 11 55 41 63 36 Note 1) Dimension E applies when heater option is included.

LJ1H

(B contact) 2 pcs.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

style: CG1FN Bore size (mm) Stroke range (mm) B E F FX FD FT H 20 25 32 40 Up to 125 6 5.5 28 2 12 40 35 Up to 200 7 5.5 32 2 14 44 40 Up to 200 7 6.6 38 2 18 53 40 Up to 200 8 6.6 46 2 25 61 50 End boss is machined on the flange for E.

CQS

except "A", and "B".)

Micro Mechanical Valve Series VM1000

F.O.F. 5.8 mm 21 N (SUP CYL port) (EXH port) 40 T.T. VFM250-02-30R/B/G/Y-X219 31 1.5 1.5 Panel mounting hole 25.5 3 114.7 20.4 32.2 30.5 (Pilot exhaust port) M5 x 0.8 0.8 to 7.5 PE EA P EB (140) (171) Symbol (B) 2 (A) 4 22 20.4 20.4 A 20.4 32.2 14 12 B 3 (EB) 1 (P) 5 (EA) 42.4 0.5 MPa supply 2 23 4 5.5 3 x 4.5 mounting hole 40 28 T.T.

Integrated Controller

B-B B Component Parts Component Parts (Right/Left side parallel only) No.

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

Vertical Vacuum Entry: Without Buffer ZPT H-A14 (Male thread) 40 50 ZPT H-B (Female thread) 40 50 1/8 (Rc, NPT, NPTF) M14 x 1 Width across flats 24 Hexagon width across flats 19 28 3 x M3 x 0.5 28 Hexagon width across flats 19 ZA Width across flats 24 3 x M3 x 0.5 ZX A 6 ZR B 3 ZM A 18 B ZMA 18 ZQ ZH ZU ZL C M8 x 1.25 40 ZPT40H-B10 42 M10 x 1.5 Model A 40 ZPT40H-B8 B 42 ZY Model A 40 B 42

Modular Type Filter Regulator Series AW

Metal bowl Optional specifications B B B B B N.O.: Black N.C.: Gray M5 x 0.8 Barb fitting Applicable tubing: T0604 B B O S 1/4 10 One-touch fitting Width across flats 17 O S Accessory specification Standard specification Panel mount With auto drain With pressure gauge Bracket mounting size Port size Model B 173 201 239 C 73 86 92 D 52 59 75 E 40 57 73 G 45 50 70 A 40 53 70 H 63 66 76 J 27

Environment

) 100 40 LECSB-S5 LECSC-S5 LECSS-S5 Nil Without option B With lock 200 to 1500 LEH *3 Refer to the applicable stroke table for details.