REC D C 22 30 35 37 0.5 REC Graph w Applicable max. stroke against lateral load* D 17 24 27 29 0.7 RHC W W W 500 82 103 116 127 0.3 Bushing (Bearing) MTS fR 62 79 89 97 U 0.5 Lateral load applied to rod end (fR) N 100 52 66 75 81 0.7 CC 50 33 43 49 53 0.3 10 23 31 36 39 0.5 T 5 18 25 29 31 0.7 Rear flange: G Front flange: F 182 167 148 118 0.3 Foot: L L 1 140 128 114 90 0.5 0.5 W W W F 117 108
to MIL-C-83503) Applicable connector: 20 pin MIL type (Conforming to MIL-C-83503) Light/surge voltage suppressor (18.9) Triangle mark position Triangle mark position 85.5 14.7 70.7 61.8 (45.9) 16.2 10PG (20 pins) 10PH (10 pins) Refer to page 249 (for D-sub connector) for dimensions with individual SUP/EXH spacer.
Cooling water (l/min) 180C Inlet air temperature Correction factor Air flow (l/min (ANR)) Model 50C 70C 100C 41.5 43 45.5 37 43 49.5 37 43 45.5 37 42 43.5 40 44 46 39.5 43 44.5 41 43 45.5 A B C A B C A B C A B C A B C A B C A B C 35.5 36 36.5 33.5 36 38 33.5 36 36.5 33.5 35 36 34.5 36 37 34.5 35.5 36 34.5 35.5 36 38.5 40 42 36 40 45.5 36 40 42.5 36 40 41 38 40 42.5 38
C A D Model D C Model D C Mounting bolt (mm) Mounting bolt (mm) M18 x 125 l M18 x 135 l 125 135 C (D) Q2B18010DC C (D) Q2B20010DC M18 x 135 l M18 x 145 l 135 145 C (D) Q2B18020DC C (D) Q2B20020DC M18 x 145 l M18 x 155 l 145 155 C (D) Q2B18030DC C (D) Q2B20030DC M18 x 155 l M18 x 165 l 36 155 39 165 C (D) Q2B18040DC C (D) Q2B20040DC M18 x 165 l M18 x 175 l 165 175 C (D) Q2B18050DC C (D) Q2B20050DC
Note 2) The withstand voltage specifications for the wiring unit section is JIS C 0704, Grade 1 or its equivalent. Note 3) CE-compliant: For DC only.
Long Stroke Stroke range (mm) Y X Z Bore size (mm) 12 50, 75, 100 32 7.5 7.5 16 50, 75, 100 32 7.5 7.5 20 75, 100, 125, 150, 175, 200 41 9 9 25 75, 100, 125, 150, 175, 200, 250, 300 44 11 11 8-27-8 9 Platform Cylinder Series CXT Dimensions: 32, 40 (N) X + Stroke S + Stroke H 4-M8 x 1.25 4-8.7 through, counterbore 14 depth 8 HP Depth 12 HG 12 Back side 4-M10 x 1.5 depth 15 (N) T PA T MX d
For ejector system Nil L Grommet (0.6 m) S 0.3 to 0.7 B 0.5 to 1.2 Combination of supply valve and release valve Grommet (3 m) C Connector (0.6 m) CL Connector (3 m) CN Without connector Unit for replacement Pilot valve Voltage Manual operation Light/Surge voltage suppressor Electrical entry (2) Manifold base (5) Vacuum switch unit 15 C 0X ZSE2 D 05 ZZX1 R A C Piping specifications Stations
M12 M14 162 202 240 16.5 14.5 18 13.5 15.5 19 16.5 19 23 78 91.5 111.5 15 15 20 12 18 25 16 22 25 49 56.5 66 M6 X 1.0 M8 X 1.25 M8 X 1.25 22 26 32 58 54 62 39 46 56 M10 X 1.5 M12 X 1.75 M14 X 2.0 8.6 10.6 12.5 25, 50, 75, 100, 125, 150, 175, 200 (mm) Bore size (mm) OB OL P PA PB PW Q RA RB RC S SA SB T U VA VB WA WB 50, 75, 100st Larger than 100st 25st 50, 75, 100st Larger than 100st 25st
Size Lead Order no. 19 63 A/B/C LE-D-2-5 Piston rod GR-S-010 (10 g) GR-S-020 (20 g) L LE-D-2-6 * Apply grease on the piston rod periodically.
Snap ring Type C 8 for axis Type C 10 for axis Type C 10 for axis Type C 14 for axis m 1.5 1.25 1.25 1.75 t 0.9 1.15 1.15 1.15 Part no.
Snap ring Type C 8 for axis Type C 10 for axis Type C 10 for axis Type C 14 for axis m 1.5 1.25 1.25 1.75 t 0.9 1.15 1.15 1.15 Part no.
Model EQY16 EQY25 EQY32 Lead A B C H A B C H A B C Work load [kg] 1 1.5 3 1 2.5 5 10 2 4.5 9 18 9. When an actuator is operated with one end fixed and the other free (ends tapped or flange), a bending moment may act on the actuator due to vibration generated at the stroke end, which can damage the actuator.
Circuit for DC Circuit for AC Light A A() [+] SOL SOL C(+) [] C ZNR Light Due to the use of non-polar light, the VQZ series has no polarity. Refer to p.1.12-26 for latching style. Connection of Lead Wire (Not necessary if ordering lead wire pre-connected model.)
A External pilot type R (2) B C A Note 1) Option Note 2) For details about external pilot specifications, refer to page 4-14-40.
DC circuit AC circuit Indicator light A() [+] A SOL SOL C( + ) ZNR Indicator light [] C Locking type (Tool required) VQZ100 No polarity by adopting non-polar light. Connection of Lead Wire If the manual override is turned by 180 clockwise and the mark is adjusted to 1, then pushed in the direction of an arrow (), it will be locked in the ON state.
ZH10BL-01-01 ZH13BS-01-02 ZH13BL-01-02 57 12 3.2 31.5 Rc 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 60 12 3.2 33.5 5.8 2 39.5 60 12 3.2 33.5 5.8 2 39.5 75 17 4.2 36.5 7.5 3 50 75 17 4.2 36.5 7.5 3 50 13-5-6 7 Series ZH Vacuum Ejector: Box Type (Built-in Silencer)/Body Ported Type Body Ported Type (Without silencer): ZH05D --to ZH15D --S L S L
D E E C G H I H V A C F U U M V E A V L Heater (Option) (Maintenance space) Indicator Auto switch (Option) B L K S H J M G A A (mm) Model A 189 198 B 66 79 C 2 2 D 11 11 E 55 75 F 41 52 G 63 68 H 20 20 J Max. 5 Max. 5 K L XLDQ-40 XLDQ-50 65 70 143 153 474 XLAQ/XLDQ Series Glossary of Terms 2 Shaft Sealing Method 1 Seal Materials Bellows Bellows offer cleaner sealing with reduced particle
Lock 15-2-75 4 Series KK Plug (P) Socket (S) Part no. Male thread type Male thread type Body size Port size Part no.
C"=l C'=l C;l C,=l C;l C;l C"=t Flg. 7.28.1 In Series circuit, all devices having a C" of 1 and the resulting impact on the circuit,s ovsrall C, \i_ --+ C,-=t c,=1 .4 C,=1.4 C,=1.73 c"=1 .73 C"=1.73 C"=2 C"=2 C,=2 Q,=2 =.x><+<_= _><_><_# -..>---.> G".v"=1'0 C,*=1.0 C"-=1.0 c,=1 C,=3 c,=4 C-"=r C*"=0.9g C"*=o.06 C,"r.=0.84 C",l/|=0.89 C*=0.82 Flg. 7.28.2 Orifices in series connection and resulting