High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

1 IO-Link master Number of ports and connector Symbol Number of ports Connector Port specifications B 4 ports M12 connector Symbol Content A Port Class A B Port Class B Summary of Product parts EX600-L#B1 No.

CNS

B 1181 Class 2 M14 x 1.5 22 DJIS B 4636 + 2 point angle socket 24 24 JIS B 1181 Class 2 M16 x 1.5 160 -X 20Adjustment 1) [Horizontal] Caution Forward Data W SOL.A SOL.B SOL.C Action 1.

CXT

22.5 17 19 22.5 24.5 27 30.5 9 9.5 13 14 12.5 16 MG Bore size (mm) MGP MGQ MGG Reed switch Solid state switch @ HS A B D-F7NWV D-F7BWV D-F7NV D-F7PV D-F7BV D-J79C D-A72 D-A73 D-A80 D-A73C D-A80C D-A79W MGC MGF 32, 40 CY1 MY1 (mm) D-A72 D-A73 D-A80 D-A73C D-A80C D-A79W D-F7NV D-F7PV D-F7BV D-J79C D-F7NWV D-F7BWV Auto switch model A B Hs A B Hs A B Hs A B Hs A B Hs A B Hs Symbol Standard stroke

Compact

Without brake C section details Cross section BB l\rodel D F L 1 5 4 231 LXPB B-50 L X P B B . 7 5 173 256 52 L X P B _ B _ 1 0 0 204 281 246 323 LXPB B -.125 L X P B B 1 5 0 271 348 120 90 L X P B _ B _ 1 7 5 296 373 LXPB_B_-200 321 394 ?$rc zs S8[i8$ [10 Camraclnectl' 0i|llomiom $lift $crExi tlE LXPB S With brake I I shows the localion at which origin point swiich operates.

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

When performing the piping work, turn the tightening tool in the horizontal direction to the hexagon across flats of the body B so that any moment is not applied to the body A. If the tool is in contact with the body A, this may cause the body B to come off.

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

50 3-5 depth 10 +0.02 0 16h9 0 0.043 (A, B, C common view) Misc.

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

) 3-M3 X 0.5 thread depth 6 44 MDHR2-15E port position 42 B 45 120o 11 120o A C 36 M3 X 0.5 M3 X 0.5 Finger opening port Finger closing port 10 M3 X 0.5 Finger opening port M3 X 0.5 Finger closing port 25o 25o MHZ2 MHZJ2 6-M3 X 0.5 thread depth 6 (A, B, C common view) MHQ 3-3 depth 6 +0.02 0 34 (A, B, C common view) MHL2 12h9 0 -0.043 Auto switch mounting groove MHR 1.5 .

LX Series Compact Electric Actuators

Without brake C section details Cross section BB l\rodel D F L 1 5 4 231 LXPB B-50 L X P B B . 7 5 173 256 52 L X P B _ B _ 1 0 0 204 281 246 323 LXPB B -.125 L X P B B 1 5 0 271 348 120 90 L X P B _ B _ 1 7 5 296 373 LXPB_B_-200 321 394 ?$rc zs S8[i8$ [10 Camraclnectl' 0i|llomiom $lift $crExi tlE LXPB S With brake I I shows the localion at which origin point swiich operates.

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

M LY 10 19.5 2 38 33.5 48 8 5 LH 16 22 3.2 48 42 62 9.2 5.8 X X LG Y Y 4-LD LT 20 22.5 3.2 52 46 66 10.7 5.8 LS + Stroke LX LZ 25 26 3.2 57 57 71 11.2 5.8 A + Stroke 30 32.5 3.2 64 64 78 11.2 7 40 27 3.2 79 78 95 14.7 8 Front flange type: MQQTF 10, 16, 20 (mm) Bore size (mm) Stroke range (mm) A B FD FT FV FX FV 10 10 to 40 49.5 31.5 4.5 5.5 30 45 FX FT L B + Stroke 16 10 to 60 54 34 6.6

CXT

state switch HS A B D-F7V D-J79C D-F7WV D-F7BAVL D-A7 D-A80 D-A73C D-A80C D-A79W 32, 40 D-A7 D-A80 D-A73C D-A80C D-A79W D-F7V D-F7BAVL D-F7WV D-J79C Auto switch model A B Hs A B Hs A B Hs A B Hs A B Hs Symbol Standard Stroke Bore size (mm) 32 40 38.5 42 38 41.5 6.5 9 6.5 9 6 (6.5) 9.5 13.5 3.5 6 34 37.5 9.5 13.5 6.5 9 35 38.5 9 (9.5) 31.5 35 6.5 10.5 9.5 13.5 8.5 (9) 13 (13.5) Long Stroke

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

20 15 24 24 65 106 Cable length 250 Motor cable Lock cable Cable length 400 65 (85) (2.4) (68.5) 3H9 (+0.025 0 ) depth 3 Cable length 250 Body mounting reference plane (B dimension range)1 4 x M5 x 0.8, thread depth 8.5 65 (2.4) (109) (125.5) 38 (7.5) 3.5 50 Motor cable 3H9 (+0.025 0 ) depth 35 45 64 (102) L A (Table traveling distance)2 (52) 52 40.5 10 [Origin]4 Origin3 2 [(4)]4 54 [

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

27 Series VQZ Base Mounted Type Dimensions: VQZ200 Dimenisons: VQZ200 (mm) Valve Scale: 45% Grpmmet (G): VQZ2 5(R)G 01T 02T 2 4.5 Mounting holes 4 32 19.2 Manual override Cover diameter 1.4 R4 Cross sectional area 0.2mm2 A 2 13 34 15 SMC 3 R 1 P 300 (Lead wire length) 40 51 45 22 A port 13.5 16 9 9 17 10.5 M5 x 0.8 External pilot port PE port 1/8 NPTF 1/8 NPTF (Only external pilot type(

Process Pump

Symbol C[dm3/(sbar)] b Cv N.C.

CC

S 1/2 45 80 86 101 35 18 35 36 25 72 17.5 1 88.2 148.5 103.9 45 CCVS02-lG-S 1/2 45 80 86 101 35 18 35 36 25 72 17.5 2 98 148.5 121.8 57 CCVSl1-lG-S M5 X 0.8 5.4 to 7.5 1/2 45 80 86 101 35 18 35 36 25 72 17.5 1 98 148.5 57 88.2 103.9 CCVSl2-lG-S 1/2 45 80 86 101 35 18 35 36 25 72 17.5 1 98 148.5 57 88.2 103.9 CCVSl3-lG-S 1/2 45 80 86 35 36 25 72 17.5 98 57 88.2 CCVSl0-S 3

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

(mm) Stroke range Bore size (mm) I J K M B D C E KA GA GB H 40 50 63 78 92 110 M6 x 1.0 M8 x 1.25 M8 x 1.25 25 25 25 10 14 14 45 55 68 21 26 32 36 46 53 34.5 40 46.5 40 45 50 46 55 66 59 71 82 23.5 28 34.5 to 1000 to 1000 to 1000 Stroke range Bore size (mm) MM XA XL Y ZZ MA MB MC N P S 40 50 63 M6 x 1.0 M8 x 1.25 M8 x 1.25 12 16 16 6 6 6 9.5 12.5 15 178 195 221 16 16 16 12 15 15 44 50 56

Transfer

C D Side support B MY-SB 2 x J A B C D A 61 70 87 B 75 84 105 C D E F G H J Part no.

SYJ300/500/700

Enclosure Based on IEC529 Note 1) Based on dynamic performance test, JIS B 8374-1981. (Coil temperature: 20C, at rated voltage, without surge voltage suppressor.)

Series MHR2 11- 2 Finger Rotary Actuated Air Gripper 22- Size: 10, 15, 20, 30

view) 5 19.5 12 27 (45) 9 17 8 M3 x 0.5 thread depth 4 Vacuum suction port 2 2 6 x M3 x 0.5 thread depth 6 (A, B, C common view) -0 -0.05 3.5-0.03 0 3.5-0.03 0 8 Open: 22, Closed: 14 15 15 2 x M3 x 0.5 thread depth 6 (Thread for mounting attachment) 5 5 6 6 With Auto Switch: MDHR2-15R 11221122MDHR2-15E port location B 3 x M3 x 0.5 thread depth 6 P.C.D.29 (Mounting thread) 44 45 42 120 120

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

SYJ Conduit terminal: VP3165-T A B DIN terminal: VP3165-D A B VQZ VP [105] Light (For TL, TZ) 76 30 Max.12 31.3 G1/2 VG Applicable cable 6 to 12 Light position (For DL, DZ) VP3 VP3 G1/2 NO NO [221] 215.6 219 206.5 PE PE 191 26 26 108 108 45 45 36 36 95 95 [ ]: With indicator light (TL, TZ) 1311 VP3185 Series Dimensions: VP3185 Grommet: VP3185-G A B 140 87.4 54 35 81 106 G1/2 1/4 (PA port